JPS60146343U - wafer holder - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

FIG. 1a is a plan view showing an example of a conventional wafer holder, FIG. 1 is an XOX sectional view of FIG. 2 is a YOY sectional view of FIG. 2a, and FIG. 2C is a sectional view showing a second embodiment of the present invention. In the figure, 1 is a wafer, 2 is a wafer holder, 201
3 is a relief hole, 3 is a metal elastic body, 301 is a support fitting, 30
2 is a fixture, 4 and 4' are support pins, 5 is a wafer holder body, 501 and 501' are supports, 502 is an elastic body fixing part, 503 and 503' are escape grooves, 504 is a guide groove, and 6' is a guide groove. Wire spoolings 601 and 601' are U-shaped support fittings, and 602 and 602' are L-shaped support fittings.

Claims (1)

[Scope of utility model registration request] At least two wafer holders made of circular, smooth and thin metal plates, each having a guide groove for attaching and detaching a wafer, and a bent part for supporting the outer edge of the wafer around the metal plate across the guide groove. The above supporting device, a plurality of relief grooves in the opposite direction of the supporting device, and an elastic support portion for fixing approximately the center of the wire spring at a position sandwiched by the relief groove, and the wire spring A wafer holder characterized in that a wafer outer edge support is attached to a position within the groove.