JPS6014381U - 真空配管接続装置 - Google Patents

真空配管接続装置

Info

Publication number
JPS6014381U
JPS6014381U JP10525083U JP10525083U JPS6014381U JP S6014381 U JPS6014381 U JP S6014381U JP 10525083 U JP10525083 U JP 10525083U JP 10525083 U JP10525083 U JP 10525083U JP S6014381 U JPS6014381 U JP S6014381U
Authority
JP
Japan
Prior art keywords
connection device
piping connection
vacuum piping
vacuum pipes
flanges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10525083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217264Y2 (OSRAM
Inventor
宏 木村
兼次 安彦
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP10525083U priority Critical patent/JPS6014381U/ja
Publication of JPS6014381U publication Critical patent/JPS6014381U/ja
Application granted granted Critical
Publication of JPH0217264Y2 publication Critical patent/JPH0217264Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
JP10525083U 1983-07-08 1983-07-08 真空配管接続装置 Granted JPS6014381U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10525083U JPS6014381U (ja) 1983-07-08 1983-07-08 真空配管接続装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10525083U JPS6014381U (ja) 1983-07-08 1983-07-08 真空配管接続装置

Publications (2)

Publication Number Publication Date
JPS6014381U true JPS6014381U (ja) 1985-01-31
JPH0217264Y2 JPH0217264Y2 (OSRAM) 1990-05-14

Family

ID=30246787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10525083U Granted JPS6014381U (ja) 1983-07-08 1983-07-08 真空配管接続装置

Country Status (1)

Country Link
JP (1) JPS6014381U (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483116A (en) * 1977-12-16 1979-07-03 Mitsubishi Heavy Ind Ltd Quick attachment and detachment joint

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483116A (en) * 1977-12-16 1979-07-03 Mitsubishi Heavy Ind Ltd Quick attachment and detachment joint

Also Published As

Publication number Publication date
JPH0217264Y2 (OSRAM) 1990-05-14

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