JPS60143751A - Analysis information color display - Google Patents

Abstract

PURPOSE:To facilitate the estimation of contents of qualitative information by color displaying the distribution of several kinds of quantities like distribution state of several kinds of elements on the surface of a sample to indicate information on the distribution of kinds by colors and information on the size of the quantities depending on the brightness of parts in colors. CONSTITUTION:As the magnification of output varies with changes in the position of sliding elements on negative feedback resistances r1 and r3, the position of sliding elements on resistances r1, r2 and r3 is adjusted according to the ratio of R, G and B with respect to X ray wavelength at a peak to obtain a three primary color brightness signal in the detected X ray intensity for the peak A. Then, when the red brightness signal for each peak is applied to an addition circuit AdR, the red brightness signal is obtained as output of the circuit AdR and is applied to a brightness control grid of a red electron gun in a color Braun tube 2. Separate brightness signals are obtained with the same circuitry for other two primary colors.

Description

[Detailed Description of the Invention] A. Field of Industrial Application The present invention is applicable to
The present invention relates to a method of displaying analysis results in an analysis device having a function of performing dimension analysis and displaying the analysis results as images.

Prior Art The above-mentioned X-ray microanalyzer uses a monochromatic CRT as a display means, and when performing elemental analysis on a sample surface, it is possible to visually display the distribution state and concentration of a single element in terms of brightness and darkness. It was not possible to display images of the distribution states of various elements at the same time.

For example, color CRTs have been used to simultaneously display elements B in red and elements B in blue, but this is simply a personal choice made by the operator at the time; There is no necessity that blue indicates element B, and even operators themselves do not always set it that way, and when there are many types of elements to display, it is difficult to choose a color. It is. In addition, temperature distribution on the surface of the human body, etc., is displayed in color, but this is a way to colorize and display the magnitude of one type of quantity called temperature.The essence of this is to display the magnitude of the measured quantity in bright and dark levels. It is the same as converting and displaying the temperature, but the only advantage is that color display makes it easier to see differences in temperature than by bright and dark, and it is easier to recognize regions of the same temperature.

In other words, although it is possible to recognize relative differences in brightness and darkness between adjacent areas, the ability to recognize whether two areas that are far apart have the same brightness or not is low, so we colorize the distribution state of one nail. When displayed, it is easy to understand what is called the same level band. The idea of displaying the same magnitude in color is the same as the way contour lines are represented in different colors, and the topography is represented using green for flatlands and dark cotton for higher mountains.

C. Purpose The present invention displays in color the distribution of quantities of multiple elements, such as the distribution state of multiple elements on a sample surface. This is intended to display three-dimensional information on a two-dimensional sample surface as an image by representing quantitative information.

In analysis using a two-component X-ray microanalyzer, the atoms on the sample surface are excited with deuteron beams and the X-rays emitted from the atoms that make up the sample are spectrally analyzed, so the amount directly measured is based on the energy of the X-rays or is the wavelength. In addition, in the case of Auger electron spectroscopy, the energy of electrons emitted from a sample excited by an electron beam is analyzed, so what is directly measured is the energy of the electrons. In secondary ion mass spectrometry, the sample is irradiated with an ion beam and the secondary ions emitted from the sample are subjected to mass spectrometry, so the directly measured quantity is mass. On the other hand, it is possible to establish a one-to-one correspondence between visible light and approximately 40 ODA.

In addition, the quantities such as the X-ray wavelength, electron energy, and mass mentioned above represent an element with a specific wavelength, energy, and mass, and the detected intensity at that X-ray wavelength, electron energy, or mass I is Since this quantity is attached and this intensity represents the concentration of the element, this can be correlated to the brightness of visible light.

In other words, the present invention converts X-rays in a wavelength range of The wavelength corresponds to the type of element, and the intensity of X-rays at each wavelength represents the concentration of each element, which corresponds to the intensity of light at the wavelength that makes up visible light, and the temperature distribution In the case of colorization, the level of brightness and darkness of the colors that represent the temperature no longer has any meaning, which is a completely different form of display.

E. Example An example in which the present invention is applied to an X-ray microanalyzer will be described. FIG. 1 shows an example of an X-ray spectrum emitted from a sample surface excited by an electron beam.

The peaks such as A, B, and C represent the elements A, B, and C. This spectrum is obtained by scanning wavelengths with a single X-ray spectrometer, but with an X-ray microanalyzer, multiple X-ray spectrometers are placed around the sample, and these X-ray spectrometers are By fixing the wavelengths of the peaks A, B, C, etc., it is possible to simultaneously detect the presence or absence and concentration of the elements A, B, and C. However, conventional monochrome CRTs cannot display images of the distribution of multiple types of elements at the same time.

In the present invention, when reproducing colors using visible light colors in the wavelength range of X-rays from 1A to 10DA in Figure 1 as shown in Figure 2, strictly speaking, wavelengths other than the three primary colors are pure wavelengths. Although it is not possible to reproduce the color of
There is a good correspondence between the wavelength of the line and the spectral color of visible light.

FIG. 3 shows the relationship between the X-ray wavelength of X-rays of unit intensity and the luminance signal given to the three primary color electron ratios of a color cathode ray tube. B is the luminance signal of each of blue, G is green, and R is red.

In Kintetsu 19, the luminance signal of the three primary colors corresponding to the unit intensity X-ray of the wavelength of peak A is set as B a + Ga + Ra, and similarly, the luminance signal of the three primary colors of peak B is B1).

Gb, Rb, and the three primary color luminance signals of peak C are Bc, G
c, Rc, and the intensities of the A, B, and C peaks are α, β, and γ.
Then, the luminance signal applied to each of the three primary color electrons is blue αBa + βB b -1-7B C green αGa
10βGb10γGc Red αRa+βRb 10r Rc.

FIG. 4 shows each primary color luminance signal generating circuit. l is an X-ray spectrometer set to detect the X-ray of peak A in Figure 1, D is its X-ray detector, A is a preamplifier, AR, A
G and AB are constant multiplier circuits, and preamplifier A is connected to the non-inverting terminal.
The output of is applied.

Negative feedback resistors γl, γ2. If you change the position of the slider of γ3, the output magnification will change, so the graph in Figure 3 shows that peak A
γl, depending on the ratio of R, G, H to the X-ray wavelength of
γ2. By adjusting the position of the slider of each γ3 resistor, three primary color luminance signals of the detected X-ray intensity with respect to peak A can be obtained.

Similar circuits exist for other peaks B and C8, and when the red luminance signal for each peak is applied to the adder circuit AdR, a red luminance signal is obtained as the output of AdR, and this is sent to the red electrons of the color cathode ray tube 2. The brightness of the phrase is applied to the suppressing grid. Luminance signals for the other two primary colors are obtained using the same circuit configuration.

EFFECT In the present invention, the information obtained by the analyzer consists of qualitative information (type of element, etc.) and quantitative information (concentration, etc.), such as wavelength and intensity, energy and intensity, mass and intensity.
When this information is obtained two-dimensionally about the sample surface, the qualitative information is displayed as a color image in one-to-one correspondence with each wavelength of visible light, and the two-dimensional distribution of qualitative differences ( The distribution state of multiple elements, etc.) and the concentration distribution of homogeneous parts can be directly recognized intuitively through a single image, and the difference in color is not a subjective thing such as a mere idea or a beautiful color scheme. The size of the numerical value representing the wavelength of visible light,
Since there is a continuous one-to-one correspondence between the size of numerical data (wavelength, energy, mass, etc.) that corresponds to the quality of qualitative information, it takes a certain amount of physics to know the content of qualitative information from the hue of the image. This means that a principle exists, and the content of qualitative information can be easily inferred from the hue, even without something like a correspondence table.

[Brief explanation of drawings]

Figure 1 is an example of an X-ray spectrum obtained from a sample, Figure 2
The figure is a graph of the correspondence between the wavelength of X-rays and the wavelength of visible light.
FIG. 3 is a graph showing the relationship between the X-ray wavelength and the three primary color luminance signals in one embodiment of the present invention, and FIG. 4 is a circuit diagram showing the main part of the luminance signal forming circuit of the above embodiment. l...X-ray spectrometer, D...X-ray detector, AR,
A.G. AB... Constant multiplier circuit, AdR, etc., adder, 2...
・CR0 Agent Patent Attorney Kosuke Mai

Claims (1)

[Claims] In an analyzer that detects qualitative information such as element distribution at each point on the sample surface and quantitative information such as element concentration at that point, the content of the qualitative information is 1. The size of the corresponding numerical data and visible light. A method for color displaying analytical information, characterized in that qualitative information is colored in a continuous one-to-one correspondence with the wavelength of each color, and quantitative information is displayed in a continuous one-to-one correspondence with the brightness of each color.