JPS60142581A - レ−ザ装置 - Google Patents

レ−ザ装置

Info

Publication number
JPS60142581A
JPS60142581A JP24675883A JP24675883A JPS60142581A JP S60142581 A JPS60142581 A JP S60142581A JP 24675883 A JP24675883 A JP 24675883A JP 24675883 A JP24675883 A JP 24675883A JP S60142581 A JPS60142581 A JP S60142581A
Authority
JP
Japan
Prior art keywords
temperature
mirror
laser
support
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24675883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131713B2 (enExample
Inventor
Norio Takahashi
鷹觜　紀雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP24675883A priority Critical patent/JPS60142581A/ja
Publication of JPS60142581A publication Critical patent/JPS60142581A/ja
Publication of JPH0131713B2 publication Critical patent/JPH0131713B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP24675883A 1983-12-29 1983-12-29 レ−ザ装置 Granted JPS60142581A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24675883A JPS60142581A (ja) 1983-12-29 1983-12-29 レ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24675883A JPS60142581A (ja) 1983-12-29 1983-12-29 レ−ザ装置

Publications (2)

Publication Number Publication Date
JPS60142581A true JPS60142581A (ja) 1985-07-27
JPH0131713B2 JPH0131713B2 (enExample) 1989-06-27

Family

ID=17153215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24675883A Granted JPS60142581A (ja) 1983-12-29 1983-12-29 レ−ザ装置

Country Status (1)

Country Link
JP (1) JPS60142581A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022054180A1 (ja) * 2020-09-09 2022-03-17 ギガフォトン株式会社 狭帯域化ガスレーザ装置、及び電子デバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889885A (ja) * 1981-11-24 1983-05-28 Matsushita Electric Ind Co Ltd レ−ザ発振器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889885A (ja) * 1981-11-24 1983-05-28 Matsushita Electric Ind Co Ltd レ−ザ発振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022054180A1 (ja) * 2020-09-09 2022-03-17 ギガフォトン株式会社 狭帯域化ガスレーザ装置、及び電子デバイスの製造方法
US12155168B2 (en) 2020-09-09 2024-11-26 Gigaphoton Inc. Line narrowing gas laser device and electronic device manufacturing method

Also Published As

Publication number Publication date
JPH0131713B2 (enExample) 1989-06-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees