JPS60138681U - wafer chuck hand - Google Patents
wafer chuck handInfo
- Publication number
- JPS60138681U JPS60138681U JP2450684U JP2450684U JPS60138681U JP S60138681 U JPS60138681 U JP S60138681U JP 2450684 U JP2450684 U JP 2450684U JP 2450684 U JP2450684 U JP 2450684U JP S60138681 U JPS60138681 U JP S60138681U
- Authority
- JP
- Japan
- Prior art keywords
- wafer chuck
- chuck hand
- wafer
- hand
- suction cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハーチャックハンドの斜視図、第２
図は本考案による実施例を示す部分的平面図、第３図は
第２図の側面図である。
＝・・ハンド反転部、２・・・バンド固定部、３・・・
吸着−カップ、６・・・軸受、６′・・・側面ガイド、
７・・・軸受、８・・・軸、９．１０・・・マグネット
、１１・・・チューブ、１・２・・・ウェハニ。 ゛Figure 1 is a perspective view of a conventional wafer chuck hand, Figure 2 is a perspective view of a conventional wafer chuck hand.
The figure is a partial plan view showing an embodiment of the present invention, and FIG. 3 is a side view of FIG. 2. =...Hand reversing part, 2...Band fixing part, 3...
Suction cup, 6...bearing, 6'...side guide,
7... Bearing, 8... Shaft, 9.10... Magnet, 11... Tube, 1/2... Wahani.゛
Claims (1)
ェハーチャックハンドにおいて、前記ウェハーチャック
ハンドの先端部を分割し、前記吸着カップと反対へ反転
可能としたことを特徴とするウェハーチャックハンド。A wafer chuck hand having a suction cup at its tip for vacuum suctioning a wafer, characterized in that the tip of the wafer chuck hand is divided and can be reversed in the opposite direction to the suction cup.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2450684U JPS60138681U (en) | 1984-02-24 | 1984-02-24 | wafer chuck hand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2450684U JPS60138681U (en) | 1984-02-24 | 1984-02-24 | wafer chuck hand |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60138681U true JPS60138681U (en) | 1985-09-13 |
Family
ID=30518715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2450684U Pending JPS60138681U (en) | 1984-02-24 | 1984-02-24 | wafer chuck hand |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60138681U (en) |
-
1984
- 1984-02-24 JP JP2450684U patent/JPS60138681U/en active Pending
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