JPS60133629U - 半導体材料の水切乾燥用回転装置 - Google Patents

半導体材料の水切乾燥用回転装置

Info

Publication number
JPS60133629U
JPS60133629U JP2060284U JP2060284U JPS60133629U JP S60133629 U JPS60133629 U JP S60133629U JP 2060284 U JP2060284 U JP 2060284U JP 2060284 U JP2060284 U JP 2060284U JP S60133629 U JPS60133629 U JP S60133629U
Authority
JP
Japan
Prior art keywords
rotating device
utility
model registration
main shaft
draining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2060284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110923Y2 (enrdf_load_stackoverflow
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP2060284U priority Critical patent/JPS60133629U/ja
Publication of JPS60133629U publication Critical patent/JPS60133629U/ja
Application granted granted Critical
Publication of JPH0110923Y2 publication Critical patent/JPH0110923Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP2060284U 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置 Granted JPS60133629U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2060284U JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2060284U JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Publications (2)

Publication Number Publication Date
JPS60133629U true JPS60133629U (ja) 1985-09-06
JPH0110923Y2 JPH0110923Y2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=30511245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2060284U Granted JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Country Status (1)

Country Link
JP (1) JPS60133629U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260028U (enrdf_load_stackoverflow) * 1985-09-18 1987-04-14
JPH01216542A (ja) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd 両面洗浄装置における保持爪開閉装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260028U (enrdf_load_stackoverflow) * 1985-09-18 1987-04-14
JPH01216542A (ja) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd 両面洗浄装置における保持爪開閉装置

Also Published As

Publication number Publication date
JPH0110923Y2 (enrdf_load_stackoverflow) 1989-03-29

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