JPS60133629U - 半導体材料の水切乾燥用回転装置 - Google Patents

半導体材料の水切乾燥用回転装置

Info

Publication number
JPS60133629U
JPS60133629U JP2060284U JP2060284U JPS60133629U JP S60133629 U JPS60133629 U JP S60133629U JP 2060284 U JP2060284 U JP 2060284U JP 2060284 U JP2060284 U JP 2060284U JP S60133629 U JPS60133629 U JP S60133629U
Authority
JP
Japan
Prior art keywords
rotating device
utility
model registration
main shaft
draining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2060284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110923Y2 (cs
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP2060284U priority Critical patent/JPS60133629U/ja
Publication of JPS60133629U publication Critical patent/JPS60133629U/ja
Application granted granted Critical
Publication of JPH0110923Y2 publication Critical patent/JPH0110923Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP2060284U 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置 Granted JPS60133629U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2060284U JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2060284U JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Publications (2)

Publication Number Publication Date
JPS60133629U true JPS60133629U (ja) 1985-09-06
JPH0110923Y2 JPH0110923Y2 (cs) 1989-03-29

Family

ID=30511245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2060284U Granted JPS60133629U (ja) 1984-02-17 1984-02-17 半導体材料の水切乾燥用回転装置

Country Status (1)

Country Link
JP (1) JPS60133629U (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260028U (cs) * 1985-09-18 1987-04-14
JPH01216542A (ja) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd 両面洗浄装置における保持爪開閉装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260028U (cs) * 1985-09-18 1987-04-14
JPH01216542A (ja) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd 両面洗浄装置における保持爪開閉装置

Also Published As

Publication number Publication date
JPH0110923Y2 (cs) 1989-03-29

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