JPS60133627U - gas gathering device - Google Patents
gas gathering deviceInfo
- Publication number
- JPS60133627U JPS60133627U JP2088884U JP2088884U JPS60133627U JP S60133627 U JPS60133627 U JP S60133627U JP 2088884 U JP2088884 U JP 2088884U JP 2088884 U JP2088884 U JP 2088884U JP S60133627 U JPS60133627 U JP S60133627U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure
- reducing valve
- pressure reducing
- cylinders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pipeline Systems (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置の配管図、第２図は本考案の一丙施例
を示す配管図である。 。
１、 ５． ７・・・ガスボンベ、４． ４’・・・減
圧弁。FIG. 1 is a piping diagram of a conventional device, and FIG. 2 is a piping diagram showing one embodiment of the present invention. . 1, 5. 7... Gas cylinder, 4. 4'...Reducing valve.
Claims (1)
スを該ガスボンベのガス送出管路に設けた減圧弁で減圧
して供給するガス集合装置において、前記ガスボンベと
同圧のパージ用不活性ガス−ボンベを２本設け、両年活
性ガスボンベを前記ガス供給用減圧弁の一次側に並列に
接続し、かつ一方のパージ用不活性ガ′スボンベの管蕗
にリーク縛−。 鉄用減圧弁を設けたことを特徴とするガス集合装置。
−[Scope of Claim for Utility Model Registration] In a gas collection device that supplies gas used for film formation on semiconductor wafers from a power gas cylinder after reducing the pressure with a pressure reducing valve installed in the gas delivery line of the gas cylinder, the pressure is the same as that of the gas cylinder. Two inert gas cylinders for purging are installed, and both active gas cylinders are connected in parallel to the primary side of the pressure reducing valve for gas supply, and leakage is prevented from occurring at the tube flap of one of the inert gas cylinders for purging. . A gas collecting device characterized by being equipped with a pressure reducing valve for iron.
−
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088884U JPS60133627U (en) | 1984-02-16 | 1984-02-16 | gas gathering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2088884U JPS60133627U (en) | 1984-02-16 | 1984-02-16 | gas gathering device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60133627U true JPS60133627U (en) | 1985-09-06 |
Family
ID=30511785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2088884U Pending JPS60133627U (en) | 1984-02-16 | 1984-02-16 | gas gathering device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133627U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63116000A (en) * | 1986-10-30 | 1988-05-20 | Mitsubishi Electric Corp | High-pressure gas cylinder piping system for manufacturing semiconductor |
-
1984
- 1984-02-16 JP JP2088884U patent/JPS60133627U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63116000A (en) * | 1986-10-30 | 1988-05-20 | Mitsubishi Electric Corp | High-pressure gas cylinder piping system for manufacturing semiconductor |
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