JPS60133185U - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS60133185U
JPS60133185U JP1913884U JP1913884U JPS60133185U JP S60133185 U JPS60133185 U JP S60133185U JP 1913884 U JP1913884 U JP 1913884U JP 1913884 U JP1913884 U JP 1913884U JP S60133185 U JPS60133185 U JP S60133185U
Authority
JP
Japan
Prior art keywords
cryopump
cryopanel
frame
cylindrical tank
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1913884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213757Y2 (enrdf_load_stackoverflow
Inventor
柴沼　清
柴田　猛順
及川　新三
後藤　貞信
近藤　修博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1913884U priority Critical patent/JPS60133185U/ja
Publication of JPS60133185U publication Critical patent/JPS60133185U/ja
Application granted granted Critical
Publication of JPH0213757Y2 publication Critical patent/JPH0213757Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1913884U 1984-02-15 1984-02-15 クライオポンプ Granted JPS60133185U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1913884U JPS60133185U (ja) 1984-02-15 1984-02-15 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1913884U JPS60133185U (ja) 1984-02-15 1984-02-15 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60133185U true JPS60133185U (ja) 1985-09-05
JPH0213757Y2 JPH0213757Y2 (enrdf_load_stackoverflow) 1990-04-16

Family

ID=30508431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1913884U Granted JPS60133185U (ja) 1984-02-15 1984-02-15 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60133185U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827525U (enrdf_load_stackoverflow) * 1971-08-10 1973-04-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827525U (enrdf_load_stackoverflow) * 1971-08-10 1973-04-03

Also Published As

Publication number Publication date
JPH0213757Y2 (enrdf_load_stackoverflow) 1990-04-16

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