JPS60131885A - Manufacture of ceramic sintered body with metallized surface - Google Patents
Manufacture of ceramic sintered body with metallized surfaceInfo
- Publication number
- JPS60131885A JPS60131885A JP23764883A JP23764883A JPS60131885A JP S60131885 A JPS60131885 A JP S60131885A JP 23764883 A JP23764883 A JP 23764883A JP 23764883 A JP23764883 A JP 23764883A JP S60131885 A JPS60131885 A JP S60131885A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- ceramic sintered
- metallized surface
- ceramic
- surface according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［発明の技、術分野］
本発明は、金属化表面を有するセラミックス焼結体の製
造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for producing a ceramic sintered body having a metallized surface.
［発明の技術的背景とその問題点］
従来から、セラミックス焼結体を金属部材に接合させる
ためにセラミックス焼結体の表面に導電性被膜を形成さ
せることが行われている。[Technical Background of the Invention and Problems Therewith] Conventionally, a conductive film has been formed on the surface of a ceramic sintered body in order to bond the ceramic sintered body to a metal member.
この導電性被膜の形成方法としては、セラミックス焼結
体表面にモリブデン粉末とマンガン粉末とを主成分とす
るモリブデン−マンガンメタライズペーストを塗布し、
還元雰囲気中で焼成する方法が一般に行われている。The method for forming this conductive film is to apply a molybdenum-manganese metallization paste containing molybdenum powder and manganese powder as main components to the surface of the ceramic sintered body.
A method of firing in a reducing atmosphere is generally used.
この方法は、いずれもアルミナ等の酸化物系セラミック
ス焼結体に適用され成功を収めてきているが、耐摩耗性
や高温特性の良好なことで脚光を浴びている窒化物系セ
ラミックス、酸窒化物系セラミックスあるいは炭化物系
セラミックスのような非酸化物系セラミックスには適用
が困難であるという欠点があった。All of these methods have been successfully applied to sintered oxide-based ceramics such as alumina, but nitride-based ceramics, which are attracting attention due to their good wear resistance and high-temperature properties, Non-oxide ceramics such as solid ceramics or carbide ceramics have the drawback of being difficult to apply.
近年、非酸化物系セラミックスは耐摩耗性や高温特性に
優れているところから、自動車部めやノコスタービン部
品として用途が拡大してきており、そのためにも非酸化
物系セラミックスに適用可能で、しかもより密着性のＪ
、い導“電性被膜をイｊ−ｔＪるセラミックス焼結体が
望まれている。In recent years, non-oxide ceramics have been used in automobile parts and turbine parts because of their excellent wear resistance and high-temperature properties. More adhesive J
A ceramic sintered body with a highly conductive coating is desired.
［発明の目的］
本発明はこのような点に対処してなされたちのＣ１非酸
化物系セラミックスを含むほとんどリ−べてのセラミッ
クス焼結体に適用可能ぐ、しかも接合強度の大きい金属
化表面を有するセラミックス焼結体の製造方法を提供す
ることを目的とＪる。[Object of the Invention] The present invention has been developed to address these points, and is applicable to almost all ceramic sintered bodies including C1 non-oxide ceramics, and has a metallized surface with high bonding strength. An object of the present invention is to provide a method for manufacturing a ceramic sintered body having the following properties.
［発明の概要］
すなわち本発明の金属化表面を右するセラミックス焼結
体の製造方法は、セラミックス焼結体表面に、このセラ
ミックス焼結体の成分元素と共晶組織を形成し得る金属
の薄層を配置し、焼成することを特徴としくいる。[Summary of the Invention] That is, the method for producing a ceramic sintered body, which has a metallized surface according to the present invention, involves applying a thin layer of metal that can form a eutectic structure with the component elements of the ceramic sintered body on the surface of the ceramic sintered body. It is characterized by arranging layers and firing them.
本発明に使用されるセラミックス焼結体とじては、窒化
ケイ素、窒化アルミニウム、窒化チタンのような窒化物
系セラミックスやサイアロンのような酸窒化物系セラミ
ックスあるいは炭化ケイ素のような炭化物系セラミック
ス等の非酸化物系セラミックスが適している。・また酸
化物系セラミックスにも適用可能である。The ceramic sintered bodies used in the present invention include nitride ceramics such as silicon nitride, aluminum nitride, and titanium nitride, oxynitride ceramics such as Sialon, and carbide ceramics such as silicon carbide. Non-oxide ceramics are suitable. - Also applicable to oxide ceramics.
また、これらのセラミックス焼結体、上に形成される共
晶組織はこれらのセラミックスの構成元素と金属からな
る共晶組織であって、例えば、次のような方法により形
成される。Moreover, the eutectic structure formed on these ceramic sintered bodies is a eutectic structure consisting of the constituent elements of these ceramics and metal, and is formed, for example, by the following method.
（イ）セラミックス焼結体上に、このセラミックス焼結
体と共晶組織を形成し得る金属を電解めっきにより形成
し、非、酸化性雰囲気中で焼成する。(a) A metal capable of forming a eutectic structure with the ceramic sintered body is formed on the ceramic sintered body by electrolytic plating, and the metal is fired in a non-oxidizing atmosphere.
（ロ）セラミックス焼結体上に、このセラミックス焼結
体と共晶組織を形成し得る金属粉末をスラリー状にして
塗布し、これを焼成して形成する。(b) Metal powder capable of forming a eutectic structure with the ceramic sintered body is applied in the form of a slurry onto the ceramic sintered body, and the slurry is fired.
（ハ）しラミックス焼結体上に、このセラミックス焼結
体と共晶組織を形成し得る金属の箔を載せ、軽く荷臣を
加えた状態で非酸化性雰囲気中で焼成する。(c) A metal foil capable of forming a eutectic structure with the ceramic sintered body is placed on the ceramic sintered body, and fired in a non-oxidizing atmosphere with a light weight added thereto.
上記したセラミックス焼結体と共晶組織を形成し得る金
属としては、例えばニッケルまたはニッケルを含む合金
が適している。For example, nickel or an alloy containing nickel is suitable as a metal capable of forming a eutectic structure with the above-described ceramic sintered body.
このようにしてセラミックス焼結体上に形成された共晶
組織からなる層は、金属部Ｉとの接合強度が極めて大き
く、前述した各種用途に有利に使用することができる。The layer made of the eutectic structure thus formed on the ceramic sintered body has extremely high bonding strength with the metal portion I, and can be advantageously used in the various applications described above.
特に、例えば３ｉ ３Ｎ＊やＳｉＣのような非導電性の
セラミツｌラス焼結体の場合には、この共晶組織により
表面に導電性被膜が形成されるので、任意の金属を例え
ば電解めっきにより被着することかでき、金属部材と強
固に接合することが可能となる。In particular, in the case of non-conductive ceramic lath sintered bodies such as 3i 3N* and SiC, a conductive film is formed on the surface due to this eutectic structure, so any metal can be coated by, for example, electrolytic plating. It can be firmly bonded to metal members.
［発明の実施例］ 次に実施例について説明する。[Embodiments of the invention] Next, an example will be described.
実施例１
１ｌ１０Ｘ１０Ｘ３のＴｉＮ焼結体上に、ニッケル電解
めっきにより厚さ３〜４μｍのニッケル層を形成し、こ
れをホーミングガス（Ｎ２：１１２＝１＝１）中で１２
５０℃で５分間焼成し、ＴｉＮ焼結体上にＴｉＮとニッ
ケルの共晶組織を有する被膜を形成した。Example 1 A nickel layer with a thickness of 3 to 4 μm was formed on a 1110×10×3 TiN sintered body by nickel electroplating, and this was heated in a homing gas (N2:112=1=1) for 12
It was fired at 50° C. for 5 minutes to form a film having a eutectic structure of TiN and nickel on the TiN sintered body.
実施例２
実施例１′ｃ使用したと同一のＴｉＮ焼結体上にニッケ
ル粉末をスラリー状にして塗布し、ホーミングガス（Ｎ
２ ：Ｈ２−１： １）中で１２５０℃ｅ５分間焼成し
、ＴｉＮ焼結体上にＴｌＮとニッケルとの共晶組織を有
する被膜を形成した。Example 2 Nickel powder was applied in slurry form onto the same TiN sintered body as used in Example 1'c, and homing gas (N
2:H2-1: 1) for 5 minutes at 1250°C to form a film having a eutectic structure of TIN and nickel on the TiN sintered body.
実施例３
実施例１で使用したと同一のＴｉＮ焼結体上に厚さ２０
μｍのニッケル箔を載せ、重さ５０（］のタングステン
錘を載せ、ホーミングガス（Ｎ２：８２＝１：１）中で
１２５０℃で５分間焼成し、１’ｉＮ焼結体表面にＴｉ
Ｎとニッケルとの共晶組織を有する被膜を形成した。Example 3 A film with a thickness of 20 mm was deposited on the same TiN sintered body used in Example 1.
A 1'iN sintered body was covered with a nickel foil, a tungsten weight with a weight of 50 (] was placed on it, and was fired at 1250°C for 5 minutes in a homing gas (N2:82=1:1).
A film having a eutectic structure of N and nickel was formed.
このようにして得られ１＝ 、１ラミックス−ニッケル
直接接合体の境界面を電子顕微鏡（Ｘ２０００）ｅ観察
したところ、連続的に変化する境界層を呈しており、充
分な接合状態を示すものであった。When the interface of the thus obtained 1=,1 ramix-nickel direct bonded body was observed using an electron microscope (X2000), a continuously changing boundary layer was observed, indicating a satisfactory bonding state. Met.
（発明の効果」
以上の実施例からも明らかなように本発明の金属化表面
を有Ｊるセラミックス焼結体の製造方法は、非酸化物系
セラミックスについても優れた金属部材との接合強度を
有しでいる。(Effects of the Invention) As is clear from the above examples, the method for producing a ceramic sintered body having a metallized surface according to the present invention also provides excellent bonding strength with metal members even for non-oxide ceramics. I have it.
代理人弁理士 須 山 佐 −Representative Patent Attorney Su Yamasa -
Claims (9)
結体の成分元素と共晶組織を形成し得る金属の薄層を配
置し、前記共晶組織の溶融温度以上の温度で焼成するこ
とを特徴とする金属化表面を有するセラミックス焼結体
の製造り法。(1) A thin layer of a metal capable of forming a eutectic structure with the component elements of the ceramic sintered body is placed on the surface of the ceramic sintered body, and fired at a temperature equal to or higher than the melting temperature of the eutectic structure. A method for manufacturing a ceramic sintered body having a metallized surface.
らなる特許請求の範囲第１項記載の金属化表面を有する
セラミックス焼結体の製造方法。(2) A method for manufacturing a ceramic sintered body having a metallized surface according to claim 1, wherein the ceramic sintered body is made of a non-oxide ceramic.
窒化物系セラミックスまたは炭化物系セラミックスから
なる特許請求の範囲第１項または第２項記載の金属化表
面を有するセラミックス焼結体の製造方法。(3) A method for manufacturing a ceramic sintered body having a metallized surface according to claim 1 or 2, wherein the ceramic sintered body is made of a nitride ceramic, an oxynitride ceramic, or a carbide ceramic.
び窒素を含有する特許請求の範囲第１項ないし第３項の
いずれか１項記載の金属化表面を有するセラミックス焼
結体の製造方法。(4) A method for producing a ceramic sintered body having a metallized surface according to any one of claims 1 to 3, wherein the ceramic sintered body contains titanium and nitrogen as component elements.
合金からなる特許請求の範囲第１項ないし第４項のいず
れか１項記載の金属化表面を有Ｊるセラミックス焼結体
の製造方法。(5) A method for manufacturing a ceramic sintered body having a metallized surface according to any one of claims 1 to 4, wherein the metal layer is made of nickel or an alloy containing nickel. .
求の範囲第１項ないし第５項のいずれか１項記載の金属
化表面を有するセラミックス焼結体の製造方法。(6) A method for producing a ceramic sintered body having a metallized surface according to any one of claims 1 to 5, wherein the thin metal layer is formed by electrolytic plating.
の金属化表面を有りるセラミックス焼結体の製造方法。(7) A thin layer of metal is formed by applying metal powder. A method for manufacturing a ceramic sintered body having a metallized surface according to any one of claims 1 to 6.
ないし第７項のいずれか１項記載の金属化表面を有する
セラミックス焼結体の製造方法。(8) A method for producing a ceramic sintered body having a metallized surface according to any one of claims 1 to 7, wherein the thin metal layer is a metal foil.
範囲第１項ないし第８項のいずれか１項記載の金属化表
面を有するセラミックス焼結体の製遣方法。(9) A method for producing a ceramic sintered body having a metallized surface according to any one of claims 1 to 8, wherein the firing is performed in a non-oxidizing atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23764883A JPS60131885A (en) | 1983-12-15 | 1983-12-15 | Manufacture of ceramic sintered body with metallized surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23764883A JPS60131885A (en) | 1983-12-15 | 1983-12-15 | Manufacture of ceramic sintered body with metallized surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60131885A true JPS60131885A (en) | 1985-07-13 |
Family
ID=17018432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23764883A Pending JPS60131885A (en) | 1983-12-15 | 1983-12-15 | Manufacture of ceramic sintered body with metallized surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60131885A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0273227A2 (en) * | 1986-12-22 | 1988-07-06 | Kalman F. Zsamboky | A method of improving bond strength between a metal layer and a non-metallic substrate |
-
1983
- 1983-12-15 JP JP23764883A patent/JPS60131885A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0273227A2 (en) * | 1986-12-22 | 1988-07-06 | Kalman F. Zsamboky | A method of improving bond strength between a metal layer and a non-metallic substrate |
| EP0273227A3 (en) * | 1986-12-22 | 1989-01-25 | Kalman F. Zsamboky | A method of improving bond strength between a metal layer and a non-metallic substrate |
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