JPS60130043A - Electron microscope - Google Patents

Abstract

PURPOSE:To reduce the effect of vibration transmitted via a specimen driving mechanism and thereby enable a good image to be observed by supporting a specimen stage and a specimen driving mechanism on either of the magnetic pole piece of an objective lens or a spacer for engagement of the magnetic pole piece. CONSTITUTION:A Y-movement stage 7 placed on a fixed bench 6 via a means for smoothing the movement of the stage is moved in the Y-axis direction by a linearly moving driving mechanism 8 connected to a driving power source and adapted to make use of, for example, a piezoelectric element. An X-movement stage 9 is moved in the X-axis direction by a similar driving mechanism 10 to the foregoing driving mechanism 8 fixed on the Y-movement stage 7. Accordingly, a specimen 12 can be moved by driving, by means of an external driving power source, the foregoing specimen driving mechanisms disposed between the upper magnetic pole piece 3 and the lower magnetic pole piece 4 which constitute an objective lens. It is thus possible to observe an image with the reduced effect of external vibration because the vibration is not transmitted to the specimen.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron microscope equipped with a sample driving mechanism and the like between an upper magnetic pole piece and a lower magnetic pole piece of an objective lens.

Generally, as a sample stage for an electron microscope, either a top entry type or a side entry type is used depending on the sample to be observed and the purpose of observation. The sample drive mechanisms of these sample stages are all fixed to the objective lens yoke, and vibrations from the sample drive mechanisms are easily transmitted to the sample. Furthermore, since the objective lens yoke, the upper magnetic pole piece, the lower magnetic pole piece, and the spacer that form the objective lens magnetic field are not integrated, the sample held by the upper magnetic pole piece, the lower magnetic pole piece, and the objective lens yoke via the sample drive mechanism is Mechanically they are far apart. Therefore, the vibrations experienced by the sample and the vibrations of the objective lens magnetic field are completely different, and the vibrations have a large effect on image observation.

The present invention was made in view of the above points, and the objective lens l
The present invention is characterized in that either the pole piece or the spacer for engaging the pole piece substantially supports the sample stage and the drive mechanism.

The embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1st
The figure is a block diagram showing an embodiment of the device of the present invention.
The figure is an enlarged view of the embodiment apparatus of FIG. 1 viewed from the direction AA. In the figure, reference numeral 1 denotes an objective lens yoke having an excitation coil 2 inside. At the annular end of the objective lens yoke, an upper magnetic pole piece 3 and a lower magnetic pole piece 4 are arranged facing each other with a spacer 5 formed of a non-magnetic material interposed therebetween, and together constitute an objective lens. When the excitation coil 2 in the objective lens yoke is excited, a lens magnetic field is formed between the upper and lower magnetic pole pieces. 6 is a fixed base C fixed to the lower magnetic pole piece.
A Y-movement stage 7 is placed on the fixed base 6 via means for smoothing the movement (not shown), and the Y-movement stage 7 is fixed to the fixed base 6 and is mounted on a drive unit (not shown in the figure). It is moved in the Y-axis direction by a drive mechanism (see Japanese Patent Publication No. 51-12497) connected to a power source that uses, for example, a piezoelectric element to move linearly. 9 moves on the Y-movement stage 7 via a means (not shown) that smoothly covers the movement [1
The X-movement stage 9 is fixed on the Y-movement stage 7 and is moved in the X-axis direction by a drive mechanism 10 similar to the drive mechanism 8 described above. It is a sample holder that is removably placed on the moving stage 9 from the Y direction outside the vacuum, and 12 is the sample holder 11.
This is the sample placed on the . 13 is the sample holder 11 and X
This is a spring for fixing the movable stage 9.

14 is connected to the connector 15 by a lead wire of the drive mechanism 8 and 1O passing through a hole 5a formed in the spacer 5. Reference numeral 16 is a connection terminal connected to the connector 15 to supply power to each drive mechanism from a drive power source (not shown). are doing.

In the apparatus configured as described above, sample exchange is performed using a threaded part provided at the tip of a sample exchange rod (not shown in this figure).
By screwing together a threaded portion provided on the sample holder 11, the sample can be exchanged from the Y direction outside the vacuum. The sample 12 is moved by placing it between an upper magnetic pole piece 3 and a lower magnetic pole 14 constituting an objective lens and driving the sample drive mechanism with an external drive power source. Therefore, unlike conventional devices, the sample is not moved via the sample drive rod of the sample drive mechanism installed externally, so external vibrations are not transmitted to the sample 1, and the sample and top Since the F magnetic pole piece vibrates together with the F magnetic pole piece 41, it is possible to observe images with less influence from vibration.

It should be noted that the present invention is not limited to the above embodiments, and modifications are possible. In this embodiment, a fixed base 6 is attached to the lower magnetic pole Ji of the objective lens.
Set up the sample stage and sample drive mechanism through the
A similar effect can be obtained by supporting the upper magnetic pole piece or a spacer.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
It is a figure which looked at one Example apparatus of the figure from the AA direction. 1: Objective lens rotation, 2: Excitation coil, 3: Upper magnetic pole J'i', 4: Lower magnetic pole piece, 5 Ni spacer, 26: Fixed base, 7: Y movement stage, 8.10: Drive mechanism. 9: X movement stage, 11: Sample holder, 12: Trial 23
1.13 spring, 14: lead wire, 15: connector, 16: connecting terminal, 17: member. 18: O-ring. Patent applicant: JEOL Ltd. Representative Kiyokatsu - Husband

Claims (1)

[Claims] An electron microscope characterized in that a sample stage and sample stage 1 drive mechanism are substantially supported on either the objective lens magnetic pole piece or a spacer that engages the magnetic pole piece.