JPS60129587A - Continuous treater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION 1. Industrial Application Field The present invention relates to a continuous processing apparatus, and more specifically to an improved continuous heating furnace suitable for heating a workpiece in a predetermined atmosphere. .

2. Among conventional continuous processing devices, for example, continuous heating furnaces are used for heat treatment and powder metallurgy, which require heating the object in a predetermined atmosphere, especially for preventing oxidation of the object, surface treatment, etc. It is used in a wide range of fields, such as sintering in manufacturing and firing ceramics.

In a continuous heating furnace, the charge is generally carried into the furnace intermittently from the entrance of the furnace body, and the charge carried into the furnace is lined up in the axial direction of the furnace, and at the same time as the charge is carried in from the outlet of the furnace. The charge located at the extreme end is discharged out of the furnace, so that, if necessary, a predetermined temperature curve is provided in the furnace. Further, it is often necessary to heat the object in a predetermined atmospheric gas depending on the heating temperature, the type of the object to be heated, or the purpose of heating. Hereinafter, in this specification, such a heating furnace will be referred to as an atmosphere continuous heating furnace.

Continuous atmosphere heating furnaces used for such purposes have conventionally provided a charging chamber adjacent to the inlet of the furnace body and an outlet chamber adjacent to the outlet of the furnace body, so that the inside of the furnace can be accessed from the gas introduction hole. The atmosphere scum supplied to the chamber is guided outside from these chambers, and when the door that opens and closes between these chambers and the outside is opened, it ignites.
Combustion gas is exhausted at the boundary between these rooms and the outside, forming a frame curtain to prevent outside air from entering the room when the door is opened.

In such a conventional atmospheric continuous heating furnace,
When the door is opened, a large amount of atmospheric gas inside the furnace is released into the outside air, and a large amount of atmospheric gas must be supplied, which increases costs.

3. Purpose of the Invention The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a continuous processing apparatus that consumes less atmospheric gas.

4. Structure of the Invention In other words, the present invention provides a predetermined atmosphere within the apparatus, and the workpiece is intermittently carried into the apparatus main body from the entrance of the apparatus main body, and the process material is discharged from the exit of the apparatus main body. In a continuous processing device having a mechanism of a second charging chamber which is divided by an opening/closing means in a state that allows the opening and closing, and is equipped on the other side with an opening/closing means for opening and closing between it and the outside and a mechanism for feeding the material to be processed into the first charging chamber; and; a mechanism for feeding the processed material into the second charging chamber on the inlet side of the apparatus main body, and a first exit chamber equipped with a mechanism for sending out the processed material fed from within the apparatus main body. and the first exit chamber are separated by an opening/closing means in a state that allows ventilation, and the atmospheric gas is discharged to the outside to the outside on the other ψ side, and to either or both of the second exit chambers. The present invention relates to a continuous processing device characterized by having an exhaust passage.

5. Embodiments The present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a plan view showing an example of an atmospheric continuous heating furnace for firing IC substrates, and FIG. 2 is a cross-sectional view taken along the line 1--2 in FIG. A green (to-be-fired) substrate (not shown) is placed on a refractory tray 31 (not shown in FIG. 1), and is moved in the direction of the arrow by the main pusher 13. It is sent into the furnace main body 3 one after another from the first charging chamber 1, passes through a temperature rising zone 3a, a high temperature holding zone 3b, and a temperature falling zone 3c, and is heated in the furnace according to the temperature curve shown in FIG. It is fired through a cooling process and sent to the first outlet chamber 4, then passed through the second outlet chamber 5, the first table 6 extending to the second outlet chamber 5, and then onto the first pallet 8. The conveyor 9 is moved on the first guide 7 by a drive device (not shown) to a position in contact with the end of the conveyor 9 on the furnace exit side, which is provided parallel to the furnace body 3 .

Heating of the charge is performed by an electric resistance heating element (not shown) connected to a terminal 3d, the temperature is measured by a thermocouple 3e inserted from the ceiling into the furnace, and a predetermined temperature curve is controlled by a control device (not shown). is now maintained.

The trays on the conveyor 9 are sent one after another from the furnace outlet side end to the furnace inlet side end by the tray return pusher 14, moved onto the second pallet 11, and then transferred to the second guide 1.
0 is fed into the first charging chamber l via the second table 12 extending into the second charging chamber 2 and the second charging chamber 2 by a drive device (not shown). There is.

The movement of the trays from the second pallet 11 to the second charging chamber 2 via the second table 12 is carried out by the first secondary pusher 15 from the second charging chamber 2 to the first charging chamber 1. The movement is carried out by the second sub-button 16, the movement from the first outlet chamber 4 to the second outlet chamber 5 is carried out by the third sub-button 17, and from the second outlet chamber 5 via the first table 6. The movement to the first pallet '1 is effected by the fourth subsidiary pusher 18.

In the furnace body 3, 60 trays 31 are arranged in one row, and the trays 31 are allowed to pass through the furnace body 3 for 8 hours. Further, while the tray is moving on the conveyor 9, the fired substrate is collected from the tray, and a green substrate is placed thereon.

The atmospheric gas inside the furnace body 3 is a mixed gas in which 3 parts of nitrogen gas are mixed with 50 parts of AX gas (ammonia decomposition gas), and the gas is supplied into the furnace in the elevated temperate zone 3c and the first charging chamber. l and the introduction hole 3 provided in the ceiling of the first exit chamber 4
It is done from f. 3g is an explosion-proof valve. Most of the atmospheric gas introduced into the furnace body 3 (approximately 90%) passes through the gas passage hole 1b provided in the door 1a between the first charging chamber 1 and the second charging chamber 2. from there to the second charging chamber 2. When the door 2a that opens and closes between the second charging chamber 2 and the outside is opened, the gas released from the second charging chamber 2 to the outside is ignited and becomes a flame, and the gas is emitted from the second charging chamber 2 to the outside. A frame curtain is formed at the boundary between 2 and the outside to prevent outside air from entering.

The remaining portion (approximately 10%) of the atmospheric gas is sent to the second outlet chamber 5 through a gas passage hole 4b provided in the door 4a between the first outlet chamber 4 and the second outlet chamber 5. When the door 5a that opens and closes between the second outlet chamber 5 and the outside is opened, the gas released from the second outlet chamber 5 to the outside is ignited and becomes a flame, which separates the second outlet chamber 5 from the outside. A frame curtain is formed at the border to prevent outside air from entering.

As shown in FIG. 4, which is a cross-sectional view of the second charging chamber and its surroundings taken along line IV-1V in FIG. Pass through the first charging chamber (not shown) on the side, pass through the first waste passage hole ib provided in the first door 1a, and enter the second charging chamber 2. The gas is ignited and discharged through the gas discharge hole 2b, the gas discharge pipe 2c, and the flow rate control valve 2d provided in the middle thereof. The amount of atmospheric gas supplied into the furnace is adjusted by the control valve 2d.

When the second door 2a is opened, the second door Lj is installed near the lower end of the second door 2a in the closed state in a direction perpendicular to the moving direction of the charge.
A valve (not shown) connected to the ignition pipe 33 having a large number of nozzles 33a is opened, and the fuel gas released from the nozzle of the ignition pipe 33 is ignited by the pyro-burner 32. The atmospheric gas released from the second charging chamber 2 to the outside is ignited and becomes a flame, forming a frame curtain at the boundary between the second charging chamber 2 and the outside to prevent outside air from entering. and is discharged via the hood 34.

The first sub-butcher 15 is made up of an air cylinder 15a and a bushing rod 15d fixed to its piston 15b via a connector 15c, and is connected to the second charging chamber 2 from above the second table I2 of the charged material. Move to air cylinder 1
5a to push the tray 31 with the bushing rod 15d.

The second sub-butcher 16 (see Figure 1) for moving the charge from the second charging chamber 2 to the first charging chamber 1 also has the same structure as the first sub-butcher 15. ing.

When moving the charge from above the second bar opening 1 to the second charging chamber 2, open the second 0m2a, and at that time, keep the first door 1a closed. 2 and the first charging chamber. When moving the charge from the second charging chamber 2 to the first charging chamber, the first door la is opened with the second m2a closed to block only the outside.

The door is opened and closed by an air cylinder. Regarding the second door, the second door 2a is opened and closed by an air cylinder 35 connected to a sprocket wheel 37 via a chain 36. This is done by activating.

The second outlet chamber 5 and its surroundings also have the same mechanism as the second charging chamber 2 and its surroundings.

In this example, the first gas passage hole 1b and the third gas passage hole 4b are provided in the first door 1a and the third door 4a, respectively, but these gas passage holes are not necessarily provided in these doors. For example, it is not necessary to provide a first charging chamber 1 and a second charging chamber 2.
Between the first outlet chamber 4 and the second outlet chamber 5, a gas passage path is provided between the first outlet chamber 4 and the second outlet chamber 5, respectively, by providing a position avoiding the doors 1a and 4a, or by piping from outer wall to outer wall. You can do it like this.

In addition, in this example, a gas containing hydrogen is used as the atmospheric gas, so the gas released to the outside is ignited and forms a flame curtain. When using a non-combustible gas such as carbon, it is best to form a gas curtain with the emitted gas to isolate it from the outside.

The cross section of the high temperature holding zone 3b portion of the furnace body 3 is v'-- in FIG.
As shown in Figure 5, which is a cross-sectional view along line v, the thickness is 6 m.
Inner shell I9 made of heat-resistant steel plate 5US310S and carbon steel plate 5S with thickness 9IIlfl provided spaced apart from inner shell 19.
It has a double structure with an outer shell 20 made of 41°C, and the space between the two is filled with ceramic fibers 21 as a heat insulating material. 19a is a reinforcing rib attached to the inner shell 19.

In this example, the furnace temperature reaches a maximum of 1 in the high temperature holding zone 3b.
Since the temperature of the inner shell 19 rises to several degrees Celsius at 600°C, 5US310 is used as the material for the inner shell 19.
In general, it is best to use an appropriate material depending on the temperature inside the furnace.

Furthermore, the inside of the inner shell 19 is lined with refractory bricks 23. By making the side wall of the furnace have a multilayer structure in this way,
Even if the inner shell 19 is heated by the heated atmospheric gas and the refractory bricks 23, the outer wall 20 is not heated much;
．． Ceramic fibers 21 filled between the chambers 20 further increase the heat insulating effect and prevent the heat inside the furnace from being released outside the furnace. As mentioned above, this effect
Since hydrogen gas easily penetrates the refractory bricks and directly heats the outer shell of the furnace, it is particularly large when the inside of the furnace is made into a hydrogen atmosphere or an atmosphere containing hydrogen. Note that if the pressure in the space between the inner and outer walls 19, 20 is reduced to about 10 Torr or less, the above-mentioned heat insulation effect will be further increased.

In the case of a continuous heating furnace, where the temperature varies depending on the position in the furnace, the acid outside the furnace is distorted during operation, causing unevenness on the hearth surface, and the charge (in this example, placed on a tray) caused by the main bushing 13. (substrates) may be difficult to transport. Therefore, as shown in FIG. 5, the floor of the furnace shell is made into an inclined surface so that the center thereof is located at a lower level than both ends, and a crosspiece 22, preferably made of heat-resistant steel, is placed on the floor. It is desirable to lay the inner refractory bricks 23 flatly on top of this.

In the case of such a hearth structure, even if strain occurs in the hearth shell during operation, the strain 1 is absorbed by the floor of the hearth, that is, the strain 1 is absorbed by the floor of the hearth. Because of the bulging, the refractory bricks in the hearth can maintain a flat surface, and the transport of the charge inside the furnace is not difficult. In this example, the high temperature holding part of the furnace body is made of a heat-resistant steel plate 5US310 having a thickness of 5 mm and a width of 40 mm as shown in FIG. Length 3.500mm, inner furnace dimensions, width 315mm
, In an atmosphere-heated □ furnace with a height of 250 mm, under the above operating conditions, one charging chamber was opened adjacent to the furnace main inlet.
In a conventional atmospheric continuous heating furnace in which one outlet chamber is provided adjacent to the outlet of the furnace main body, the consumption of atmospheric gas is 0.0191 n? / oa-hr
However, in the atmosphere continuous heating furnace having the structure of the present invention, this was reduced to o, otosrrr/ca·hr, which was approximately half that of the conventional atmosphere continuous heating furnace.

The present invention has been explained above using a continuous heating furnace as an example.
In addition, it goes without saying that chemical treatment and surface cleaning treatment using atmospheric gas at room temperature or low temperature can also have the effect of saving atmospheric gas.

6. As described in detail of the invention, when using the continuous processing equipment of the present invention, the consumption of atmospheric gas is significantly reduced compared to when using the conventional continuous processing equipment, and from the viewpoint of resource saving, the industry The utility value of the above is great.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-n in FIG. 1, FIG. 5 is a sectional view taken along line V-V in FIG. 1, and FIG. 6 is a plan view of the crosspiece. Regarding the symbols used in the drawings, ■ - = - First charging chamber 2 - Part 2 charging chamber 3 - One furnace main body 4 - Part 1 outlet chamber 5 ---Second exit chamber la, 2a, 4a, 5a ---One door 1b
, 4 b---Gas passage hole 2 b---Gas discharge hole 2c------Pipe 2 d -1---Flow control valve 13------Main valve, shaft 15, 16 .17.18---11 Vice Psosha. Agent: Patent attorney Hiroshi Aisaka (and 1 other person) Figure 5 Figure 6 η /

Claims (1)

[Claims] i. A predetermined atmosphere is created inside the device, and the material to be processed is intermittently carried into the device body from the entrance of the device body, and the material to be processed is discharged from the outlet force of the device body. In the continuous processing apparatus, there is a space between the first charging chamber and the first charging chamber, which is adjacent to the inlet of the apparatus main body and is equipped with a mechanism □ for feeding the material to be processed into the apparatus main body. - A second chamber is divided by an opening/closing means in a state allowing ventilation, and is equipped with an opening/closing means for opening/closing between it and the outside and a mechanism for feeding the material to be processed into the first charging chamber. A mechanism for feeding the material to be processed into the second charging chamber is provided on the entrance side of the main body of the apparatus, and on the other hand,
A first outlet chamber equipped with a mechanism for discharging the processed material sent from inside the apparatus main body; It has an opening/closing means for opening and closing between the outside and a mechanism for sending out the processed material to the outside, and the above-mentioned 1. A continuous processing apparatus characterized in that an exhaust passage is provided in one or both of a second charging chamber and a second outlet chamber for discharging atmospheric gas to the outside. 2. The atmospheric gas passage hole penetrates each of the opening/closing means between the first charging chamber and the second charging chamber and the opening/closing means between the first outlet chamber and the second outlet chamber. 2. The continuous processing apparatus according to claim 1, wherein the continuous processing apparatus is arranged to allow ventilation. 3. The continuous processing apparatus according to claim 1 or 21 rB, wherein the exhaust passage is equipped with a flow control valve.