JPS60127914A - Cutting method of groove - Google Patents

Abstract

PURPOSE:To remove only a soft layer and efficiently cut a groove with fixed depth, by moving a work or a tool while pressing the tool to be adapted applying a fixed load onto the upper surface of the work which forms a film of the soft layer on a hard layer. CONSTITUTION:A work, being formed by an evaporated deposition film 13 of gold having a uniform film thickness as a soft layer film and a quartz glass plate 14 as a hard layer, is mounted onto a moving bed 15, while a tool 16, using a diamond tool or the like, acts on the work a fixed load F by utilizing the dead weight. The work, when it is machined, causes an edge point 17 of the tool 16 to move in a follow-up motion with the undulation on a machined surface of the work so as to cut a groove with a fixed depth on the evaporated deposition film 13 of gold by driving the moving bed 15 in a direction at a right angle with the direction of said load F while pressing the edge point 17 of the tool 16 to be adapted onto the evaporated deposition film 13 of gold. Here the hard layer 14 completes a function as a stopper determining the depth of the groove by bringing the edge point 17 of the tool 16 into contact with the hard layer 14.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a groove machining method for machining grooves of a constant depth.

In a groove machining method that uses a tool to form a groove of a constant depth on a workpiece, it is essential to maintain a constant depth of cut into the workpiece. Conventionally, the depth of cut of the tool has been set by detecting the distance between the cutting edge 11 of the tool and the machined surface of the workpiece 12, as shown in FIG. However, as shown in Fig. 1, there are ridges on the machined surface of the workpiece 12, so in the conventional machining method, the distance between the tool cutting edge 11 and the workpiece machined surface 12 cannot be kept constant. Therefore, the tool 10 had to be moved to follow the ridge scale, making it difficult to achieve groove depth accuracy on the order of submicrons.

An object of the present invention is to provide a groove machining method that solves these conventional drawbacks.

According to the present invention, in the groove machining method (i) of machining a groove in a workpiece using a tool, a constant load is applied to the workpiece in which a soft layer film having a uniform thickness is formed on a hard layer. The hard layer is used as a stopper to determine the groove depth by moving the workpiece or the tool while pressing the tool, and removing only the soft layer. It is possible to machine a deep groove.

The present invention will be described below with reference to drawings showing embodiments. FIG. 2 is a side view showing one embodiment. The workpiece has a gold vapor deposited film 13 (corresponding to M'ohs thickness 2) having a uniform film thickness of 0, i μm as a soft layer film.
and a quartz glass plate 14 (Mohs) as a hard layer.
) with a hardness of 7), and is attached to the workpiece moving table 15. As the tool 16, a diamond tool having a cutting edge angle θ of 90° as shown in FIG. 3 is used. As shown in FIG. 2, a constant load F is applied to the diamond tool 16 using its own weight.

When the workpiece moving table 15 is moved in a direction perpendicular to the load F acting on the diamond tool 16 while pressing the tool cutting edge 17 onto the gold vapor deposited film 13, the load acting on the diamond tool 16 is Because the tool uses its own weight, the tool tip 17 is pushed by the undulations on the machined surface of the workpiece 13.
Accordingly, a groove with a constant depth (01 μm) can be formed on the gold vapor deposited film 13. In this case, as shown in FIG. 4, the tool cutting edge 17 is f,! ! ! The hard layer 14 is in contact with the quartz glass plate 14, which is a hard layer, and functions as a stopper that determines the depth of the groove. Here, the load F applied to the diamond tool 16 is determined as follows, when the thickness of the gold vapor deposited film 13 is t. Let Fl be the load applied to the diamond tool 16 necessary to remove the gold vapor deposited film 13 to a depth t, and the gold vapor deposited film 16
Let F2 be the load applied to the diamond tool 16 necessary to remove the quartz glass plate 14, which is a hard layer, to a depth t and cause extremely microscopic plastic deformation or destruction of the quartz glass plate 14, which is a hard layer. , the load FitFl≦F applied to the diamond tool 16 to machine a groove with a constant depth t.
'<F2.

In this example, the thickness of the gold vapor deposited film 13 is 0.1 μm.
m, Fl is experimentally 0.4/, F2 is I-, OJ
'That's it.

Therefore, the diamond tool 16 has O,4J'≦F(1
, OJ', F=05), a groove with a depth of 01 μm can be formed on the gold vapor deposited film 13.

As explained above, according to the present invention, in a method of machining a groove of a constant depth in a workpiece using a tool, a soft layer film having a uniform thickness is formed on a hard layer. Move the workpiece or tool while pressing the tool r with a constant load applied, and 4iI! By using the scraps as a stopper to determine the width of the groove a and removing only the soft layer, it is possible to process the adjacent area with a constant depth equal to the thickness of the soft layer. By forming extremely thin grooves, it is also possible to process grooves with a submicron or submicron depth.

In the embodiment of the present invention, +-j, the soft layer is all one layer, but the same effect can be obtained even if the low continuous layer is two or more layers.

[Brief explanation of drawings]

Figure 1 is a side view showing an overview of the conventional groove machining method;
The figure is a side view showing one embodiment of the present invention;
fbl is a front view and a side view of the diamond tool, respectively, and FIG. 4 is a front view showing how the hard layer functions as a stopper that determines the groove depth. 10 and io'... Tool, 11 and 11'... Tool cutting edge, 12... Workpiece, 13... Gold vapor deposited film (soft layer film), 14... Quartz glass plate (hard layer) ), 15...
・Workpiece moving table, 16...Diamond tool, 17.
...Indicates each tool cutting edge. Rod 1 Figure 3

Claims (1)

[Claims] A method of machining grooves of a constant depth in a workpiece using a tool, in which a tool is pressed with a constant load onto a workpiece in which a soft layer film with a uniform thickness is formed on a hard layer. Machining a groove having a constant depth equal to the thickness of the soft 9ILF111 by moving the workpiece or tool, using the hard layer as a stopper to determine the soft depth, and removing only the soft layer. A groove machining method characterized by: