JPS60119784U - Vacuum seal structure - Google Patents

Vacuum seal structure

Info

Publication number
JPS60119784U
JPS60119784U JP746784U JP746784U JPS60119784U JP S60119784 U JPS60119784 U JP S60119784U JP 746784 U JP746784 U JP 746784U JP 746784 U JP746784 U JP 746784U JP S60119784 U JPS60119784 U JP S60119784U
Authority
JP
Japan
Prior art keywords
vacuum seal
desiccant
seal structure
ring backing
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP746784U
Other languages
Japanese (ja)
Inventor
吉村　長光
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP746784U priority Critical patent/JPS60119784U/en
Publication of JPS60119784U publication Critical patent/JPS60119784U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図及び第２図は夫々従来の真空シール構造の主要部
断面図、第３図は本考案の一実施例を示す主要部断面図
である。 １．２：接続すべき部材、３，４：フランジ、５ａ、５
ｂ：０−リングバッキング、７：凹部、８：乾燥剤。1 and 2 are sectional views of main parts of a conventional vacuum seal structure, respectively, and FIG. 3 is a sectional view of main parts showing an embodiment of the present invention. 1.2: Member to be connected, 3, 4: Flange, 5a, 5
b: 0-ring backing, 7: recess, 8: desiccant.

Claims (4)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）互いに気密を保って接続すべき２つの部材の間に
弗素ゴムからなるＯ−リングバッキングを設置して真空
シールを行なう構造において、前記Ｏ−リングバッキン
グの大気側に水分を吸収する乾燥剤を配設し、該乾燥剤
の置かれた空間を外気から実質的に遮断する部材を設け
てなる真空シール構造。(1) In a structure in which an O-ring backing made of fluorine rubber is installed between two members that are to be connected to each other in an airtight manner to create a vacuum seal, drying that absorbs moisture on the atmospheric side of the O-ring backing A vacuum seal structure comprising a member for disposing a desiccant and substantially shielding a space in which the desiccant is placed from outside air. （２）前記乾燥剤が配設される空間を遮断する部材は前
記シール用の０−リングバッキングと同材を使用して二
重Ｏ−リングバッキング構造となし、その間に乾燥剤が
置かれる実用新案登録請求の範囲第１項記載の真空シー
ル構造。(2) The member that blocks the space where the desiccant is placed is made of the same material as the O-ring backing for sealing, and has a double O-ring backing structure, and the desiccant is placed between them. A vacuum seal structure according to claim 1 of patent registration. （３）前記乾燥剤が配設される空間を遮断する部材は前
記シール用の０−リングバッキングとは異質のガスケッ
ト等である実用新案登録請求の範囲第１項記載の真空シ
ール構造。(3) The vacuum seal structure according to claim 1, wherein the member for blocking the space in which the desiccant is disposed is a gasket or the like different from the O-ring backing for sealing. （４）前記乾燥剤は接続すべき２つの部材の何れか又は
両者に設けた凹部に埋設される実用新案登録請求の範囲
第１項乃至第３項の何れかに記載の真空シール構造。(4) The vacuum seal structure according to any one of claims 1 to 3, wherein the desiccant is buried in a recess provided in one or both of the two members to be connected.
JP746784U 1984-01-23 1984-01-23 Vacuum seal structure Pending JPS60119784U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP746784U JPS60119784U (en) 1984-01-23 1984-01-23 Vacuum seal structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP746784U JPS60119784U (en) 1984-01-23 1984-01-23 Vacuum seal structure

Publications (1)

Publication Number Publication Date
JPS60119784U true JPS60119784U (en) 1985-08-13

Family

ID=30485846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP746784U Pending JPS60119784U (en) 1984-01-23 1984-01-23 Vacuum seal structure

Country Status (1)

Country Link
JP (1) JPS60119784U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005325973A (en) * 2004-05-17 2005-11-24 Sigma Meltec Ltd Sealing structure for processing chamber device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106899A (en) * 1975-02-13 1976-09-22 Westinghouse Electric Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106899A (en) * 1975-02-13 1976-09-22 Westinghouse Electric Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005325973A (en) * 2004-05-17 2005-11-24 Sigma Meltec Ltd Sealing structure for processing chamber device

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