JPS60117434A - Electron beam recording disc - Google Patents

Abstract

PURPOSE:To read information without a detector of an electron beam arranged in a vacuum system by forming a thermally fusible nonconductive layer on a conductive layer. CONSTITUTION:An electron beam 24 having spot diameter 500Angstrom is accelerated to 50keV and is irradiated to an EB disc 21 for information recording in a vacuum of about 10<-3> pascals (Pa) to fuse locally a cellulose acetate layer 23 in the irradiated area to form an aperture part 25, thus writing information. Next, a relatively weak electron beam 30 having, for example, a 1/10 strength of said irradiated beam is irradiated. Electrons are flowed through an Al conductive layer 22 in the aperture part 25, and therefore, presence/absence of the current is detected by a current detector 33 connected to the Al conductive layer 22 of the EB disc 21 to read information.

Description

DETAILED DESCRIPTION OF THE INVENTION (11) Technical Field of the Invention The present invention relates to an electron beam recording disk, and more particularly to a large capacity recording disk in which an electron beam is used for writing and reading.

(2) Background of the technology A technology using an optical disk for writing and reading records is known. To explain this with reference to a perspective view showing a partial cross section in FIG. A portion 4 is formed. The position of the trunk 3 is determined by the front side, and on a particular truck (1) digitally determines whether or not the opening 4 will be provided.
'', recording is written by forming or not forming an opening in the track 4, and recording is read by detecting this.

The width of the groove 2 has been miniaturized to about 0.7 μm to 0.8 μm, but when writing and reading records using a light beam (for example, a laser beam), the width is approaching the analytical limit of the light beam. It is not possible to narrow down the length to a size smaller than the diameter. Therefore, instead of light, electron beams (ele
Techniques using electron beams (EB) are being developed, and the electron beam can be focused down to a diameter of 500 people, making it possible to write and read high-density records. A recording medium created using such an electron beam is called an EB disk, and the present invention relates to an improvement of the EB disk.

(3) Prior Art and Problems Conventional electron beam disks emit a weak electron beam and read out the secondary electrons reflected by the detector (2). Therefore, the readout detector had to be placed in the vacuum system, which required extra volume in the vacuum system. Therefore, there is a need for an electron beam recording disk that can detect the secondary electrons without using a detector placed in such a vacuum system.

(4) Purpose of the Invention In view of the above-mentioned conventional problems, the present invention aims to provide an electron beam recording disk that can be read without an electron beam detector placed in a vacuum system. This is the purpose.

(5) Structure and object of the invention According to the invention, there is provided an electron beam recording characterized in that a conductive layer is formed on a disk substrate and a thermofusible non-conductive layer is formed on the conductive layer. This is achieved by providing a disc for

(6) Examples of the invention Embodiments of the present invention will be explained in detail below with reference to the drawings.

(3) The present inventor provided a non-conductive thin film layer on a conductive layer in the form of a disk, performed writing by removing the non-conductive thin film by electron beam irradiation, and read out the writing by using weak electron beam irradiation. The idea was to take advantage of the fact that the amount of electrons flowing to the disk differs between the writing area and the non-writing area. As the non-conductive layer, organic thin films such as cellulose acetate, vinyl chloride, PMMA, PVC, co-dione, MgF2゜SiO2, CaP21 Mgo, TeO
It was confirmed that it is effective to use an inorganic thin film such as 2+ GeO2.

In the embodiment of the present invention, as shown in the cross-sectional view of FIG. 2, aluminum (Al1) conductive N22 is deposited under vacuum as a conductive layer to a thickness of 100 μm on a glass substrate 21 with a thickness of 2 mm constituting an EB disk. After forming by vapor deposition method,
An information recording disk is prepared by forming a cellulose acetate layer 23 as a non-conductive layer, which has an insulating property and is easily melted by heat, to a thickness of 0.1 μm by a spin cord method.

Next, as shown in FIG. 3, an electron beam 24 with a spot diameter of 500 was applied to the EB disk 21 for information recording at 50 KeV in a vacuum of about 10-3 Pascal (Pa) (4) degrees. The irradiation is accelerated and the cellulose acetate layer 23 is locally melted in the irradiated area to form the opening 2.
5 was formed and information was written. The tracks and openings of the EB disk thus formed have exactly the same structure as shown in FIG. 1, but it differs from conventional optical disks in that it has a high density.

Next, a relatively weak electron beam 30 of, for example, about 1710 of the above-mentioned irradiation beam was irradiated. Since electrons flow through the An conductive layer 22 in the opening 25, the current detector 33 (the fourth one) connected to the An conductive layer 22 of the EB disk 21
(see figure), the presence or absence of current was detected and reading was performed.

In operation, the EB disk 2
1 is installed in an electron beam device 31, and current flows through the shaft of a motor 32 to a current detector 33, allowing signal reading. In Fig. 4, 34 is an electron gun, and 35 is an electron gun.
is a controller, 36 is an electronic lens, 37 is a deflector, 3
8 indicates an exhaust pump. In the prior art (5), the secondary electron detector is designated by the reference numeral 39 and is arranged as shown by the dotted line. Since the illustrated device is well known, detailed description thereof will be omitted.

(7) Effects of the Invention As explained in detail above, according to the present invention, it is possible to provide an electron beam recording disk that can be used in a device without an electron beam detector in a vacuum device, and such a disk has excellent storage performance. It has the advantage of being superior.

In the above examples, the conductive layer was made of Δβ layer and the non-conductive layer was made of cellulose acetate, but the scope of the present invention is not limited to that case, and other conductive materials and thermosoluble materials may be used. This also applies to cases where non-conductive materials are used.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a partial cross section of an optical disk, FIG. 2 is a partial cross section of an EB disk according to the present invention, and FIG. 3 is a partial cross section of the EB disk of FIG. 2 after EB irradiation. FIG. 4 is a sectional view of the device for reading (6) the disk shown in FIG. 2l-EB disk, 22-61 layer, 23-cellulose acetate layer, 24-FB, 25-opening (7)

Claims (1)

[Claims] 1. A disk for electron beam recording, comprising a conductive layer formed on a disk substrate and a heat-soluble non-conductive layer formed on the conductive layer.