JPS60117101A - Shape detector - Google Patents

Abstract

PURPOSE:To obtain high-accuracy light-interrupting lines quickly, by vertically irradiating a beam of light from above a specimen and arranging its reflected light into parallel beams of light and picking up is image of them with a plurality of TV cameras. CONSTITUTION:A flat pack 23 is installed on a high-density mounting substrate 22 which is mounted on a table 21 which is free to move in the XY direction S. A laser spot irradiating part 25 is set on a table 26 free to move in the B direction. By the movement of the table 26, the laser spot scans the substrate 22 and reads. The reflected laser beam assumes parallel beams with an objective lens 29. The parallel beams are brought to a focus with an eye-piece 30. The laser beam is reflected with a total-reflection mirror 31 and it is irradiated into a plurality of TV cameras 32-34. By changing the angles of mirror 31 and lens 30, the moving laser beam is kept always incident on the cameras 32-34. Thus, as a plurality of TV cameras share the image pick up range, high-accuracy light-interrupting lines can be obtained quickly.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a shape detection device, and particularly to a shape detection device suitable for detecting a bonding state between a lead and a substrate pad of a flat pack component.

[Background of the invention]

2. Description of the Related Art Conventionally, there is a shape detection device shown in FIG. 1 that detects the bonding state between a lead of a flat pack component and a pad of a board. As shown in the figure, a laser beam sent from a laser light source 1 is applied to a reflecting mirror 4 via convex lenses 2 and 3, and the laser beam reflected by the mirror 4 is passed through a convex lens 51 and a reflecting mirror 6 to a printed circuit board 8. The laser beam is irradiated perpendicularly to the lead terminal 7a of the flat pack component 7 soldered on the pad of the laser beam, and the laser beam reflected in the oblique direction is taken in through the reflecting mirror 9, the convex lens 5, the mirror 4, the convex lens 3, the mirror 10, The light is guided through a convex lens 11 to a second sensor 12 to detect the connection state of the lead terminal 7a.

In the shape detection device having the above structure, the scanning of the laser beam and the capture of the reflected light are performed by moving the mirror 4 to the scanner 13.
The laser beam is swung as shown by arrow A, and the output of the -order sensor 12 is converted into a scanner angle, thereby electrically reproducing the optical cutting line of the laser beam. However, in the conventional method described above, the accuracy of the scanner angle is extremely important;
If there is an error in this, naturally a strong light section line cannot be obtained, and high-speed and high precision control of the scanner angle is not easy, resulting in a disadvantage that a strong light section line cannot be obtained.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a shape detection device that can obtain optical cutting lines with high precision and at high speed.

[Summary of the invention]

The gist of the present invention is to irradiate a laser beam spot-like on the object to be detected from vertically above, capture the reflected light from the object to be detected from diagonally above, convert the captured reflected light into parallel light, and The point is that parallel light rays are captured onto a plurality of television cameras via a total reflection mirror and an eyepiece and images are obtained to obtain a video signal.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 2 is a diagram showing a schematic configuration of the optical system of the shape detection device according to the present invention. In the figure, a table 21 moving in the This is to position it in a determined position. A laser spot irradiation port 25 is fixed to a table 26, and a fiber 25' is connected to a laser oscillator (not shown).
The laser beam guided by the laser beam is spot irradiated vertically onto the leads of the flat pack component 23 and the high-density mounting board 22. The table 26 has a structure that allows it to freely move left and right as shown by arrow B by rotation of a shaft 28 that is directly connected to the rotation axis of a motor 27. By rotating the motor 27 clockwise and counterclockwise, the laser spot scans the leads 24 and the high-density mounting board 22. The reflected light of the laser spot is imaged from diagonally above the high-density mounting board 22, and the reflected light from the leads 24 and the high-density mounting board 22 is converted into parallel light by the objective lens 29, and is then taken to the next eyepiece. The lens 30 focuses the image. The eyepiece lens 30 and the television camera 32, 33.
A total reflection mirror 31 is provided between the mirrors 34 and 34, and the total reflection mirror 31 and the eyepiece are moved in unison.

Even if the laser spot irradiated from the laser irradiation port 25 moves over a wide range on the leads 24 and the high-density mounting board 22, it can be imaged by the three television cameras 32, 33 and 34. Note that the number of television cameras is not limited to three; the greater the number, the better the resolution. Note that the objective lens 29, the eyepiece lens 30, and the total reflection mirror 31 are all provided on the table 26.

In FIG. 2, when the laser spora 1 from the laser spot irradiation port 25 is scanned from diagonally lower right to diagonally upper left, the real image of the reflected light moves from left to right on total reflection mirror 31. By moving the eyepiece lens 30 and a total reflection mirror 31 that moves integrally therewith on the same optical axis, the reflected light is focused on the television cameras 32, 33, and 34.

FIG. 3 is a block diagram showing the configuration of the control processing section of the shape detection device according to the present invention, and FIG. 4 is a time chart 1 showing its operation. A clear signal 52 is sent from the timing generator 48 to the first frame memory 44 to initialize it (see A in FIG. 4).

Next, when the drive signal 49 for the motor 27 is sent to the drive circuit 41 of the motor 27 and the motor 27 starts rotating (see the opening in FIG. 4), the television camera select signal 51. is sent from the timing generator 48 to the selector 43 to select the television camera 32 (see C in FIG. 4), and at the same time, a write signal 53 is sent from the timing generator 48 to the first frame memory 44 (see FIG. 4). (see 2), TV camera 3
2 is written to the first frame memory 44. This writing is ORed with the previous screen.

When the coverage area of the TV camera 32 ends, the TV camera select signal 51 is turned off (see E in FIG. 4).
, the write signal 53 of the first frame memory 44 is also turned off (
4), the drive signal 49 for the motor 27 is also turned off (see 1 in FIG. 4). Next, the eyepiece 30. The timing generator 48 sends an eyepiece/total reflection mirror drive signal 50 to a drive circuit 42 that integrally moves the total reflection mirror 31 and the eyepiece 30.
is moved to a position where the next television camera 33 can take an image (see H in FIG. 4). At this time, the second frame memory 4
5, a write signal 54 is sent from the timing generator 48,
After the image in the first frame memory 44 is transferred to the second frame memory 45 (see FIG. 4), the clear signal 52
from the timing generator 48 to the first frame memory 44
and initializes the first frame memory 44 (see No. 4 in FIG. 4). Thereafter, similar processing is carried out and when the imaging of the review camera 34 is completed, the timing generator 48 sends a motor drive signal 49 to the drive circuit 41 of the motor 27 to return the table 26 to its original position (see 4 in FIG. 4). . At the same time, the ocular lens/total reflection mirror drive signal 5o is sent from the timing generator 48 to the drive circuit 42, and the ocular lens 3
o and the total reflection mirror 31 are also returned to their original positions (see o in Fig. 4). Next, the conversion start signal 55 is sent from the timing generator 48 to the second frame memory 45 and the converter 4.
6 (see wa in FIG. 4), and reproduces the optical cutting line on the converter 4G. This is performed by compressing and encoding the data amount in the height direction of the optical cutting line and using each pixel as an address.

Thereafter, the timing generator 48 sends a data transfer command signal 56 to the converter 46 and the computer 47, and transfers the optical cutting line signal onto the computer 47 for determination processing (fourth
(See Figure Power).

According to the above embodiment, the laser spot irradiation port 25 for laser beam scanning, the objective lens 29 for capturing reflected light, and the eyepiece 30 . Since the optical system consisting of the total reflection mirror 31 is attached to the table 26 which can be moved at high speed and with high accuracy, the optical cutting line can be detected quickly and accurately. Furthermore, since multiple television cameras are used to share the imaging range, the resolution is also extremely high.

〔Effect of the invention〕

As explained above, the shape detection device according to the present invention is
It has the excellent effect of being able to obtain optical cutting lines with high precision and at high speed.

[Brief explanation of the drawing]

Figure 1 is a diagram showing the schematic configuration of a conventional shape detection device, Figure 2
The figure shows a schematic configuration of the optical system of the shape detection device according to the present invention, FIG. 3 is a block diagram showing the configuration of the control processing section of the shape detection device according to the present invention, and FIG. 4 explains its operation. FIG. 21...Table, 22...High density mounting board, 23
... Flat pack parts, 24 ... Lead, 25.
...Laser spot, 26...Table, 27...
Motor, 28... Shaft, 29... Objective lens, 30... Eyepiece lens, 31... Total reflection mirror, 3
2 to 34... Television camera, 41... Motor drive circuit, 42... Eyepiece lens and total reflection mirror drive circuit,
43... Selector, 44... First frame memory, 45... Second frame memory, 46... Converter, 47 Fig. 1/lL 5 Fig. 2 Fig. 3 Fig. 1 Fig. 4 Tenitor Issue No. 754 to Makimin, 56th grade

Claims (1)

[Claims] (1) An irradiation mechanism that irradiates the object to be inspected with beam light from vertically above, and an irradiation mechanism that captures the reflected light reflected by the object to be inspected from the irradiation mechanism 4a from diagonally above and converts it into parallel light. a parallel ray capturing mechanism that captures and focuses parallel rays from the reflected light capturing mechanism on a plurality of television cameras; and a parallel ray capturing mechanism that controls the irradiation device and the parallel ray capturing mechanism to direct the parallel rays of light to the plurality of television cameras. A shape detection device consisting of a control processing unit that obtains a video signal of an object to be inspected from a camera.