JPS60116232U - Solution injection type crystal growth jig - Google Patents
Solution injection type crystal growth jigInfo
- Publication number
- JPS60116232U JPS60116232U JP224884U JP224884U JPS60116232U JP S60116232 U JPS60116232 U JP S60116232U JP 224884 U JP224884 U JP 224884U JP 224884 U JP224884 U JP 224884U JP S60116232 U JPS60116232 U JP S60116232U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- crystal growth
- tank
- solution
- small hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す断面因、第２ 図は
第１図のＡ−Ａ’断面図、第３図は第１図のＢ−Ｂ’断
面図である。
１・・・エビ成長用Ｇａ、、 ２・・・溶槽、３・・・
ベース部、４・・・スライドシャッター、５・・・空間
部、６・・・オーバシード支持板、７・・・分離板、８
・・・スライダー、９・・・オーバシード、１０・・・
半導体成長基板、１１・・・成長槽、１２・・・通路、
１３・・・支切板、１４・・・ガス抜き孔。FIG. 1 is a sectional view showing one embodiment of the present invention, FIG. 2 is a sectional view taken along line AA' in FIG. 1, and FIG. 3 is a sectional view taken along line BB' in FIG. 1... Ga for shrimp growth, 2... Melting tank, 3...
Base part, 4... Slide shutter, 5... Space part, 6... Overseed support plate, 7... Separation plate, 8
...Slider, 9...Overseed, 10...
Semiconductor growth substrate, 11... growth tank, 12... passage,
13... Split plate, 14... Gas vent hole.
Claims (1)
と、溶槽から溶液を導いて成長に必要な液部を形成する
複数の成長槽と、各成長槽でエビ成長を行なわせるため
に結晶成長基板を移動させて該基板を各成長槽にセット
するスライダーとよりなる結晶成長用高純度黒鉛治具に
おいて、前記各溶槽の底部に小孔を穿設するとともに、
該小孔を開閉するとともに、該小孔を開閉するシャッタ
ーを設け、かつ各溶槽の小孔からの溶液を収納する空間
部を形成し、該空間部と前記成長槽とを通路で連通し、
さらに空間部から成長槽に溶液を圧入させるピストンを
前記シャッターに連動させたことを特徴とする溶液圧入
式結晶成長治具。There are multiple melt tanks that temporarily store the solution used for crystal growth, multiple growth tanks that lead the solution from the melt tanks to form the liquid part necessary for crystal growth, and shrimp growth in each growth tank. In a high-purity graphite jig for crystal growth comprising a slider for moving a crystal growth substrate and setting the substrate in each growth tank, a small hole is bored at the bottom of each melt tank, and
A shutter is provided to open and close the small hole and a shutter is provided to open and close the small hole, and a space is formed to accommodate the solution from the small hole of each melt tank, and the space is communicated with the growth tank through a passage. ,
A solution press-in type crystal growth jig, further comprising a piston that presses the solution into the growth tank from the space and is linked to the shutter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP224884U JPS60116232U (en) | 1984-01-11 | 1984-01-11 | Solution injection type crystal growth jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP224884U JPS60116232U (en) | 1984-01-11 | 1984-01-11 | Solution injection type crystal growth jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60116232U true JPS60116232U (en) | 1985-08-06 |
Family
ID=30475743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP224884U Pending JPS60116232U (en) | 1984-01-11 | 1984-01-11 | Solution injection type crystal growth jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60116232U (en) |
-
1984
- 1984-01-11 JP JP224884U patent/JPS60116232U/en active Pending
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