JPS60112067U - electron gun - Google Patents

electron gun

Info

Publication number
JPS60112067U
JPS60112067U JP20521983U JP20521983U JPS60112067U JP S60112067 U JPS60112067 U JP S60112067U JP 20521983 U JP20521983 U JP 20521983U JP 20521983 U JP20521983 U JP 20521983U JP S60112067 U JPS60112067 U JP S60112067U
Authority
JP
Japan
Prior art keywords
electron beam
high voltage
voltage cable
block
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20521983U
Other languages
Japanese (ja)
Other versions
JPH0228602Y2 (en
Inventor
修 中村
Original Assignee
株式会社エービーティ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エービーティ filed Critical 株式会社エービーティ
Priority to JP20521983U priority Critical patent/JPS60112067U/en
Publication of JPS60112067U publication Critical patent/JPS60112067U/en
Application granted granted Critical
Publication of JPH0228602Y2 publication Critical patent/JPH0228602Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の多段加速方式を採用した電子銃を示す断
面図、第２図は本考案の一実施例に係る電子銃の構造を
示す断面図である。 １・・・密閉容器、２・・・真空容器、３・・・高圧ケ
ーブル、６・・・フィラメント、７・・・ウェーネルト
、８゜１８・・・電子線加速ブロック、８ａ乃至８ｅ、
１８ａ乃至１８ｃ・・・電極、１０・・・真空容器、Ｅ
・・・電子線発生ブロック。FIG. 1 is a sectional view showing an electron gun employing a conventional multi-stage acceleration method, and FIG. 2 is a sectional view showing the structure of an electron gun according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Airtight container, 2... Vacuum container, 3... High voltage cable, 6... Filament, 7... Wehnelt, 8°18... Electron beam acceleration block, 8a to 8e,
18a to 18c...electrode, 10...vacuum container, E
...Electron beam generation block.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 高圧ケーブルを支持する密閉容器と、密閉容器内で当該
密閉容器に固定支持された真空容器と、真空容器内に配
置され且つ高圧ケーブルに接続されたフィラメント及び
ウェーネルトによって構成された電子線発生ブロックと
、電子線発生ブロックから射出された電子線を加速する
電極を複数を有する電子線加速ブ爾ツクとを備え、上記
電子線発生ブ冶ツクと電子線加速ブロックとは互いに結
合してサブアセンブリ化される一方、このサブアセンブ
リは真空容器及び高圧ケーブルには着脱自在に取付けら
れていることを特徴とする電子銃。A sealed container that supports a high voltage cable, a vacuum container that is fixedly supported within the sealed container, and an electron beam generation block that is arranged in the vacuum container and is configured by a filament and Wehnelt that is connected to the high voltage cable. , an electron beam acceleration block having a plurality of electrodes for accelerating the electron beam emitted from the electron beam generation block, and the electron beam generation block and the electron beam acceleration block are combined with each other to form a subassembly. and the subassembly is detachably attached to the vacuum vessel and the high voltage cable.
JP20521983U 1983-12-29 1983-12-29 electron gun Granted JPS60112067U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20521983U JPS60112067U (en) 1983-12-29 1983-12-29 electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20521983U JPS60112067U (en) 1983-12-29 1983-12-29 electron gun

Publications (2)

Publication Number Publication Date
JPS60112067U true JPS60112067U (en) 1985-07-29
JPH0228602Y2 JPH0228602Y2 (en) 1990-07-31

Family

ID=30767592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20521983U Granted JPS60112067U (en) 1983-12-29 1983-12-29 electron gun

Country Status (1)

Country Link
JP (1) JPS60112067U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012004012A (en) * 2010-06-18 2012-01-05 Nachi Fujikoshi Corp Gas cluster ion beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989097A (en) * 1972-12-29 1974-08-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989097A (en) * 1972-12-29 1974-08-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012004012A (en) * 2010-06-18 2012-01-05 Nachi Fujikoshi Corp Gas cluster ion beam device

Also Published As

Publication number Publication date
JPH0228602Y2 (en) 1990-07-31

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