JPS60107726A - Deflecting arm device - Google Patents

Deflecting arm device

Info

Publication number
JPS60107726A
JPS60107726A JP58215623A JP21562383A JPS60107726A JP S60107726 A JPS60107726 A JP S60107726A JP 58215623 A JP58215623 A JP 58215623A JP 21562383 A JP21562383 A JP 21562383A JP S60107726 A JPS60107726 A JP S60107726A
Authority
JP
Japan
Prior art keywords
piezoelectric element
voltage
deflection
piezoelectric
deflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58215623A
Other languages
Japanese (ja)
Inventor
Motoyasu Momoki
百木 元康
Kaname Abe
阿部 要
Hideo Adachi
日出夫 安達
Hiroyuki Yamamoto
博之 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP58215623A priority Critical patent/JPS60107726A/en
Publication of JPS60107726A publication Critical patent/JPS60107726A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00Head arrangements not specific to the method of recording or reproducing
    • G11B21/02Driving or moving of heads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end

Landscapes

  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To suppress positively an unnecessary vibration by sticking an intermediate part of a supporting member roughly orthogonal to a displacement direction and a longitudinal direction, in the vicinity of the tip part of a bimorph piezoelectric element, fixing both end parts to a substrate through the second piezoelectric element, and impressing a voltage corresponding to a deflecting voltage. CONSTITUTION:The first piezoelectric element 20 is displaced in accordance with an impressed deflecting voltage, and simultaneously, a voltage corresponding to the deflecting voltage is impressed to terminals 31, 32 and 33, 34, too, and a voltage by which the polarizing direction in the second piezoelectric elements 29, 30 is promoted in the deflecting direction of the tip part of the first piezoelectric element 20 is impressed. As a result, the second piezoelectric elements 29, 30 expand and contract in the deflecting direction of the first piezoelectric element 20, a displacement quantity of the second piezoelectric elements 29, 30 is added to a deflection quantity of the first piezoelectric element 20 and the deflection quantity is increased, and an unnecessary vibration of the first piezoelectric element 20 is suppressed by an elastic force of the second piezoelectric elements 29, 30.

Description

【発明の詳細な説明】 技術分野 本発明はVTR(ヒデオテープレコーダ)の録再用ヘッ
ド等を支持する偏向アーム装設に関する。
DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a deflection arm installation for supporting a recording/reproducing head of a VTR (video tape recorder).

従 来 技 術 ヘリカルスキャン型VTR等に於て、磁気テープの映像
トラックに記録された情報を正確に再生するためにはビ
デオヘッドは常に再生すべき映像トラック上の中心位置
を走査することが必要となる。このため、映像トランク
に対するビデオヘッドの走査位置を検出し、この検出結
果によって補正信号を生成し、これをビデオヘッドを炭
位可能に支持する偏向アーム装置へ供給することにより
ビデオヘッドの適正走査位置を維持するようにしたいわ
ゆるトラッキング制御手法は秘々提案されている。
Prior Art In a helical scan type VTR, etc., in order to accurately reproduce the information recorded on the video track of a magnetic tape, the video head must always scan the center position on the video track to be reproduced. becomes. For this purpose, the scanning position of the video head with respect to the video trunk is detected, a correction signal is generated based on the detection result, and this is supplied to a deflection arm device that supports the video head so that the video head can be positioned properly. A so-called tracking control method that maintains this has been secretly proposed.

従来におけるこの種のトラッキング制御に用いる上記偏
向アーム装Wtはバイモルフ圧電素子を利用したものが
代表的であり、この−詞を第1図に示し概要を説明する
。パイモル7圧′喝素子は一苅の電気的に分極されたH
−、奄セラミック素子奈積層結合したもので、このセラ
ミック素子に夫々偏量電圧を印加することによりその長
手方向曲動υ゛しめるものであり、曲動の方向及び変位
量は印加電圧の極性及び大きさによって決定される。第
1図に於て、このようなバイモルフ圧電素子を91号1
で示す。このバイモルフ圧電素子1は上下一対の圧7u
セラミック素子2.3を有し、この各セラミック素子2
及び3の上下面に夫々電極4.5、及び6、Tを何服し
てhJ層結合する。各セラミック素子2及び3の分極方
向は同一方向に一致する。そして、このバイモルフ圧′
也素子1の後端部をVTRの回転ドラム内の支持台8に
固定するとともに、他方先端部には不図示のビデオヘッ
ドを装態する。よって、上下端に位置する′t4L極4
.7、及び中間に位置するli 4i5+ 5.6が各
同一極性になるよう端子9.10に所定の偏向電圧を印
加すれば、バイモルフ圧電素子1の先端部は同図中矢印
へ方向へ変位し、以てビデオヘッドも変位せしめられ6
17述したトラッキング制岬を行うことができる。
The conventional deflection arm device Wt used in this type of tracking control is typically one that utilizes a bimorph piezoelectric element, which is shown in FIG. 1 and will be briefly explained. The Pymol 7 pressure element is one electrically polarized H
-, A ceramic element is laminated and bonded, and bending in the longitudinal direction υ゛ is caused by applying an uneven voltage to each ceramic element, and the direction of bending and the amount of displacement are determined by the polarity of the applied voltage and the amount of displacement. Determined by size. In Figure 1, such a bimorph piezoelectric element is
Indicated by This bimorph piezoelectric element 1 has a pair of upper and lower pressures of 7u.
a ceramic element 2.3, each ceramic element 2.
Electrodes 4, 5, 6, and T are disposed on the upper and lower surfaces of electrodes 4, 5, and 3, respectively, and bonded to the hJ layer. The polarization directions of each ceramic element 2 and 3 correspond to the same direction. And this bimorph pressure′
The rear end of the element 1 is fixed to a support base 8 in a rotating drum of a VTR, and a video head (not shown) is installed at the other end. Therefore, 't4L pole 4 located at the upper and lower ends
.. If a predetermined deflection voltage is applied to the terminal 9.10 so that 7 and li 4i5+ 5.6 located in the middle have the same polarity, the tip of the bimorph piezoelectric element 1 will be displaced in the direction of the arrow in the figure. , the video head is also displaced6.
The tracking system described in 17 can be performed.

ところで、バイモルフ圧電素子1に印加される偏向電圧
は第2図αに示す如きν1り白状波電圧(VH)をはじ
め、その他矩形波電圧、と角波電圧等が用いられる。こ
のような偏向電圧(VH)がバイモルフ圧電素子1に印
加されると同素子1は当該足圧の大きさに応答するとと
もに、第2図すに示す如く正規の偏向電圧とは異なる偏
向(h)、つまり無J4jム振動(W)の発生を伴う。
Incidentally, as the deflection voltage applied to the bimorph piezoelectric element 1, a ν1 white wave voltage (VH) as shown in FIG. 2 α, a rectangular wave voltage, a square wave voltage, etc. are used. When such a deflection voltage (VH) is applied to the bimorph piezoelectric element 1, the bimorph piezoelectric element 1 responds to the magnitude of the foot pressure and, as shown in FIG. ), that is, accompanied by the occurrence of non-J4j vibration (W).

この振動(w)はバイモルフ圧電素子1の材質構漬や形
状によって決まる固有の共振周波数(fど)で次式7式
% tニバイモルフ庄゛1「素子の厚み ノ:バイモル7圧電素子の長さ E:圧電セラミック素子のヤン グV\ ρ】圧電セラミック素子の密度 このような無用な振!l!1l(W)はビデオヘッドの
ドラッギング1b1]御を阻害し、適切な走査位1θを
51:め、画像品質を態化するものであり、除去、若し
くは6J能な限り減おされることか必要である。
This vibration (w) is a unique resonance frequency (f, etc.) determined by the material structure and shape of the bimorph piezoelectric element 1, and is expressed by the following formula (7). E: The Young V\ρ of the piezoelectric ceramic element. Such unnecessary vibration!l!1l (W) obstructs the video head's dragging 1b1] control and prevents the proper scanning position 1θ from 51: , which improves image quality, and should be removed or reduced as much as possible.

目的 本発明はル1かる点に鑑み、従来の偏向アーりる偏向ア
ーム配・置の無用ろ振動を除去、ないしは1及的に減衰
しその応答性を向上ゼしめるとともに、′帛に止ケ16
、且つ精度の良い偏11JJを行うことができる偏向ア
ーム装置t1.をtf5供するにある。
Purpose: In view of the above, the present invention eliminates or temporarily attenuates the unnecessary filter vibrations of the conventional deflection arm arrangement and arrangement, improves its responsiveness, and also improves its responsiveness. 16
, and a deflection arm device t1. which can perform deflection 11JJ with high precision. It is in the tf5 offering.

8a 要 本発明は以上の目的を達成するため、第1圧I′1几ソ
(子となるバイモルフ11−′准素子の後VJ都を基体
にし1定するとともに先端1都を目由端とし印加した偏
向電圧に対応して当該先端部を弐位さゼる偏向アーム装
面に1岡月jし、その主要構成とするところは上記バイ
モルフ71 Tij J(。
8a Essentially, in order to achieve the above object, the present invention uses the first pressure I'1 as the base (after the child bimorph 11-' quasi-element, with the VJ capital as the base and the tip as the end). The main component is the above-mentioned Bimorph 71 Tij J (1), which is equipped with a deflection arm that bends its tip in an upright position in response to the applied deflection voltage.

子の先端バIX近傍にこの圧電素子の変位方向及び長手
方向に略IH交する支持部4>1の中間部を固着し、こ
の支持部拐の両端部を第2圧′1(L素子を介して前記
基板に固定し、当P/、第2圧7rε素子に前記偏向′
#B圧に対応する’(tl圧を印加することにより無用
な振動を積極的に抑圧したことを特徴とする。
The middle part of the support part 4>1 which is approximately IH intersecting with the displacement direction and the longitudinal direction of this piezoelectric element is fixed near the tip bar IX of the element, and both ends of this support part are connected with a second pressure '1' (the L element is is fixed to the substrate through the P/, and the deflection '
It is characterized by actively suppressing unnecessary vibrations by applying the tl pressure corresponding to the #B pressure.

実 施 例 以下には本発明をさらに具体化した好11りな実施例を
挙+j図++nを参照して詳述する。
EMBODIMENTS Below, 11 preferred embodiments further embodying the present invention will be described in detail with reference to Figures +j and +n.

第3図は本発明に係る偏向アーム装置とLの斜視図、第
4図は同装置のi″II+分側11.11図である。
FIG. 3 is a perspective view of the deflection arm device and L according to the present invention, and FIG. 4 is a 11.11 view of the i''II+ minute side of the same device.

先ず、全14.面構成について説明する。20はバイモ
ルフ圧電素子で第1圧也素子となる。
First, all 14. The surface configuration will be explained. A bimorph piezoelectric element 20 serves as a first piezoelectric element.

この第1圧電素子2.0は一苅のI’J−、准セラミッ
ク素子21.22を上下に貼り合せたもので各素子21
.22の各上下面にGλ1z11Aの知キML 極’i
: (q設り、 テアF) 、各′IM 41(Lは’
twit子23及び24から所定の偏向′1に圧が印加
される。
This first piezoelectric element 2.0 is made by laminating I'J-, quasi-ceramic elements 21 and 22 vertically.
.. Gλ1z11A knowledge ML pole'i on each upper and lower surface of 22
: (Q setting, Thea F), each 'IM 41 (L is'
Pressure is applied from the twit elements 23 and 24 to a predetermined deflection '1.

この第1 FE tlf、索子20は第1し1のバイモ
ルフ圧+I)、素子1と全く同じである。
In this first FE tlf, the strand 20 has the first bimorph pressure +I), which is exactly the same as the element 1.

一方、25はVTRの回転ドラム内に固定した基体であ
り、全゛体を高さの低い直方体状になし、口iJ (]
11中間部を切欠いて四部26を形成しである。以て、
上記第1圧電素子20の後端部の下面を基体25の後側
中1hl 614に固定し、この固定部分よりロリ側の
第1圧1;C素子20が変位するβ、・コ、支障がない
よう上記四部26が機能する。
On the other hand, 25 is a base fixed within the rotating drum of the VTR, and the entire body is shaped like a rectangular parallelepiped with a low height.
The middle part of 11 is cut out to form four parts 26. Therefore,
The lower surface of the rear end of the first piezoelectric element 20 is fixed to the middle 1hl 614 of the rear side of the base body 25, and the first pressure 1 on the lower side from this fixed part; The four parts 26 function to prevent this.

また、給1圧′[(L素子20の先端i:zの上面には
iす方へ突出したフェライト等で形成したビデオヘッド
2Tを固着するとともに、第1圧電素子20の先端部近
傍の下面には長方形板状の支持部材28の中間部を固着
する(第4図)。この支持部相28の特に長手方向は第
1圧1M、素子20の変位方向(上下方向)及び長手方
向(ail後方向)に対しは!直父するように設ける。
In addition, a video head 2T made of ferrite or the like is fixed to the upper surface of the tip i:z of the L element 20 and protrudes in the i direction, and the lower surface near the tip of the first piezoelectric element 20 is fixed to the upper surface of the tip i:z of the L element 20. The middle part of a rectangular plate-shaped support member 28 is fixed to the support member 28 (FIG. 4).The support member 28 is under a first pressure of 1M, particularly in the longitudinal direction, and in the displacement direction (vertical direction) and longitudinal direction (ail direction) of the element 20. For the backward direction), it is set up so that it is the direct father.

さらに支持部祠28の両端部下mtには第2圧電素子2
9、−30の一端向を電極を介して固着するとともに、
第2圧電素子29.30の他端面は電極を介して罰記基
鉢25上に同着し、この第2圧電累子29.30の分極
軸は熟1圧電素子20の変位方向と一致する。以って、
支持部拐28の両端部は第2圧電素子29.30を介し
て基体25上に固定されることになる。この第2圧電紫
子29.30は例えば第1圧電素子2oにおける圧電セ
ラミック素子を利用でき、又鋲数素子を積層して積層体
信造として形成し変位量を大きくとれるように゛しても
よい。また、支持部材28は中間部を第1圧1L素子2
oに、両端部を第2圧電素子29.30に固−・冬して
いるが、支持部材28の一端を第1圧電素子20に、他
端を第2圧電素子29、又は3゜に固着し片持支持して
もよい。なお、棺3図に於て@2圧電素子29及び3o
に付設した電極には夫々引出線を介して端子31.32
及び33.34を設け、電圧を印加できるようにする。
Furthermore, a second piezoelectric element 2 is provided under both ends of the support part shrine 28.
9, one end direction of -30 is fixed via an electrode,
The other end surface of the second piezoelectric element 29.30 is attached to the punishment base 25 via the electrode, and the polarization axis of the second piezoelectric element 29.30 coincides with the displacement direction of the first piezoelectric element 20. . Therefore,
Both ends of the support member 28 will be fixed onto the base body 25 via second piezoelectric elements 29,30. The second piezoelectric element 29, 30 can be made of, for example, the piezoelectric ceramic element of the first piezoelectric element 2o, or it can be formed as a laminate structure by laminating several rivet elements so that a large amount of displacement can be obtained. good. Further, the support member 28 has an intermediate portion connected to the first pressure 1L element 2.
In this case, both ends of the support member 28 are fixed to the second piezoelectric element 29 and 30, and one end of the support member 28 is fixed to the first piezoelectric element 20 and the other end is fixed to the second piezoelectric element 29 or 3°. It may also be supported cantilevered. In addition, in the coffin 3 diagram, @2 piezoelectric elements 29 and 3o
The electrodes attached to the terminals are connected to terminals 31 and 32 through lead wires, respectively.
and 33 and 34 are provided so that a voltage can be applied.

次に、本発明に係る偏向アーム装置6の機能について説
明する。今、第3図に於て端子23.24には所定の偏
向電圧が印加されているものとする。これ、により第1
圧邂素子20は印加された偏向電圧に対応して変位する
Next, the functions of the deflection arm device 6 according to the present invention will be explained. Now, in FIG. 3, it is assumed that a predetermined deflection voltage is applied to the terminals 23 and 24. This causes the first
The pressure element 20 is displaced in response to the applied deflection voltage.

一方、この偏向電圧の印加と同時に端子31.32、及
び33.34にも当該偏向車圧に対応した電圧が印加さ
れる。つまり、第2圧電素子29.30における分極方
向(縫位方向)が第1圧′11L素子20の先端部の偏
向方向(変位方向)に助しする如< ’tj′L圧が印
加される。これにより、第2圧*を素子29.30は第
1圧市素子20の偏向方向へ伸縮し、哨1圧電紫子20
の偏向坦に第2圧電素子29.30の変位量か加算され
偏向mkを増大することができるとともに、第1圧′t
!L素子20の無用な振動は第2圧IiJ、素子29.
30の伸縮力により抑圧することができる。
On the other hand, at the same time as this deflection voltage is applied, a voltage corresponding to the deflection vehicle pressure is also applied to the terminals 31, 32 and 33, 34. In other words, the <'tj'L pressure is applied as the polarization direction (stitching direction) in the second piezoelectric elements 29 and 30 assists the deflection direction (displacement direction) of the tip of the first pressure '11L element 20. . As a result, the second pressure* elements 29 and 30 expand and contract in the direction of deflection of the first pressure element 20, and the first piezoelectric element 20
The displacement amount of the second piezoelectric element 29, 30 is added to the deflection flatness of , so that the deflection mk can be increased, and the first pressure 't
! The unnecessary vibration of the L element 20 is caused by the second pressure IiJ, the element 29.
It can be suppressed by a stretching force of 30.

なお、第2圧71素子29.30の変位置(Δl)はΔ
lj = da @ *v(タタL、■:印加↑U圧、
dss:EE電定数)で衣わされ、例えばV=100V
とするとdasは5 U Ox I U−”m / l
’であるからΔノ=0.01μ扉となる。
In addition, the displacement position (Δl) of the second pressure 71 element 29.30 is Δ
lj = da @ *v (Tata L, ■: Applied ↑U pressure,
dss: EE electric constant), for example, V = 100V
Then, das is 5 U Ox I U-”m/l
', so Δ=0.01μ door.

この場合+111述したような私層体に形成し、例えば
50枚積層すると変位置(Δl)は0.5μmとなり十
分なる変位量を獲得することができる。
In this case, if they are formed into a single-layer structure as described above and, for example, 50 sheets are laminated, the displacement position (Δl) will be 0.5 μm, and a sufficient displacement amount can be obtained.

以上、実施例ではVTRにおけるビデオヘッドを変位す
るための偏向アーム装置として説明したが、これに限定
されず、他の各釉同様の偏向手段に適用できるものであ
る。
Although the embodiment has been described above as a deflection arm device for displacing a video head in a VTR, the present invention is not limited to this, and can be applied to other deflection means similar to each glaze.

発 明 の 効 果 このように、本発明に係る偏向アーム装置は所定の印加
電圧によって生ずる無用な振動を減衰させることができ
、偏向電圧に対する応答性を向上でき、常に正確、且つ
高精度の偏向を行うことができる。
Effects of the Invention As described above, the deflection arm device according to the present invention can attenuate unnecessary vibrations caused by a predetermined applied voltage, improve responsiveness to deflection voltage, and always provide accurate and highly accurate deflection. It can be performed.

しかも、以上に加えて偏向社を大きくすることができ、
広汎に利用できるという技術的効果を奏する。
Moreover, in addition to the above, it is possible to enlarge the deflection company,
It has the technical effect of being widely applicable.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来例に係る偏向アーム装置ζ1の斜視図、M
’! ’1図aは同装置;イに印加する偏向′屯圧波形
図、第2図すは間装(行の偏向1心答特性図、第3図は
本発明に係る偏向アーム装置の斜視図、第4図は間装r
f4の部分側面図である。 20・・・バイモルフH:、屯素子(第11)E電素子
) 25・・・基体 28*−・支持部材 29.30・・・第2圧電氷子 VH・・0イい向1ル圧 特許出願人 オリンパス光学工業株式会社第2目) (G) (b)
FIG. 1 is a perspective view of a conventional deflection arm device ζ1, M
'! Figure 1 a is a diagram of the deflection force waveform applied to the same device; , Figure 4 shows the interior
It is a partial side view of f4. 20...Bimorph H:, ton element (element 11) E element) 25...Base 28*--Support member 29.30...Second piezoelectric ice element VH...0 direction 1 pressure Patent applicant: Olympus Optical Industry Co., Ltd. No. 2) (G) (b)

Claims (2)

【特許請求の範囲】[Claims] (1)バイモルフ圧電素子(給1圧電素子)の後端部を
基体に固定するとともに先端部を自由端とし印加した偏
向電圧に対応して前記先端部を変位させる偏向アーム装
置において、前記第1圧’M素子の先端部近傍に該第1
圧電素子の要位方向及び長手方向に略直交する支持部材
の中間部を固着し、該支持部材の両端部を第2圧電素子
を介して¥111記基板に一定し、前記第2圧電素子に
前記偏向電圧に対応する電圧を印加することを特徴とす
る偏向アーム装置。
(1) A deflection arm device in which a rear end of a bimorph piezoelectric element (feeder 1 piezoelectric element) is fixed to a base, a tip is a free end, and the tip is displaced in response to an applied deflection voltage. The first
An intermediate portion of a support member that is substantially orthogonal to the main direction and the longitudinal direction of the piezoelectric element is fixed, and both ends of the support member are fixed to the ¥111 substrate via a second piezoelectric element, and the second piezoelectric element is A deflection arm device characterized in that a voltage corresponding to the deflection voltage is applied.
(2)前記第2の圧電素子は積層した圧電素子を用いた
ことを特徴とする特′fIFi!Iv求の範囲第1項記
載の偏向アーム装置。
(2) The second piezoelectric element is characterized in that a laminated piezoelectric element is used. The deflection arm device according to item 1 of the scope of requirements for Iv.
JP58215623A 1983-11-16 1983-11-16 Deflecting arm device Pending JPS60107726A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58215623A JPS60107726A (en) 1983-11-16 1983-11-16 Deflecting arm device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58215623A JPS60107726A (en) 1983-11-16 1983-11-16 Deflecting arm device

Publications (1)

Publication Number Publication Date
JPS60107726A true JPS60107726A (en) 1985-06-13

Family

ID=16675462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58215623A Pending JPS60107726A (en) 1983-11-16 1983-11-16 Deflecting arm device

Country Status (1)

Country Link
JP (1) JPS60107726A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01126176A (en) * 1987-11-06 1989-05-18 Nec Corp Vibrator for ultrasonic motor
JPH01126177A (en) * 1987-11-06 1989-05-18 Nec Corp Vibrator for ultrasonic motor
US8011237B2 (en) * 2008-02-22 2011-09-06 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Piezoelectric module for energy harvesting, such as in a tire pressure monitoring system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01126176A (en) * 1987-11-06 1989-05-18 Nec Corp Vibrator for ultrasonic motor
JPH01126177A (en) * 1987-11-06 1989-05-18 Nec Corp Vibrator for ultrasonic motor
US8011237B2 (en) * 2008-02-22 2011-09-06 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Piezoelectric module for energy harvesting, such as in a tire pressure monitoring system

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