JPS60107567U - 電子線の偏向装置 - Google Patents

電子線の偏向装置

Info

Publication number
JPS60107567U
JPS60107567U JP20329183U JP20329183U JPS60107567U JP S60107567 U JPS60107567 U JP S60107567U JP 20329183 U JP20329183 U JP 20329183U JP 20329183 U JP20329183 U JP 20329183U JP S60107567 U JPS60107567 U JP S60107567U
Authority
JP
Japan
Prior art keywords
electron beam
deflection device
signal
beam deflection
comparator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20329183U
Other languages
English (en)
Japanese (ja)
Other versions
JPH026591Y2 (enrdf_load_stackoverflow
Inventor
平田　義弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP20329183U priority Critical patent/JPS60107567U/ja
Publication of JPS60107567U publication Critical patent/JPS60107567U/ja
Application granted granted Critical
Publication of JPH026591Y2 publication Critical patent/JPH026591Y2/ja
Granted legal-status Critical Current

Links

JP20329183U 1983-12-26 1983-12-26 電子線の偏向装置 Granted JPS60107567U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20329183U JPS60107567U (ja) 1983-12-26 1983-12-26 電子線の偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20329183U JPS60107567U (ja) 1983-12-26 1983-12-26 電子線の偏向装置

Publications (2)

Publication Number Publication Date
JPS60107567U true JPS60107567U (ja) 1985-07-22
JPH026591Y2 JPH026591Y2 (enrdf_load_stackoverflow) 1990-02-16

Family

ID=30765703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20329183U Granted JPS60107567U (ja) 1983-12-26 1983-12-26 電子線の偏向装置

Country Status (1)

Country Link
JP (1) JPS60107567U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH026591Y2 (enrdf_load_stackoverflow) 1990-02-16

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