JPS60106244U - 回転円盤押え機構 - Google Patents

回転円盤押え機構

Info

Publication number
JPS60106244U
JPS60106244U JP20105783U JP20105783U JPS60106244U JP S60106244 U JPS60106244 U JP S60106244U JP 20105783 U JP20105783 U JP 20105783U JP 20105783 U JP20105783 U JP 20105783U JP S60106244 U JPS60106244 U JP S60106244U
Authority
JP
Japan
Prior art keywords
presser foot
holding mechanism
disc holding
turntable
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20105783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222837Y2 (en, 2012
Inventor
金田　一政
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemi Con Corp
Original Assignee
Nippon Chemi Con Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemi Con Corp filed Critical Nippon Chemi Con Corp
Priority to JP20105783U priority Critical patent/JPS60106244U/ja
Publication of JPS60106244U publication Critical patent/JPS60106244U/ja
Application granted granted Critical
Publication of JPH0222837Y2 publication Critical patent/JPH0222837Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP20105783U 1983-12-26 1983-12-26 回転円盤押え機構 Granted JPS60106244U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20105783U JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20105783U JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Publications (2)

Publication Number Publication Date
JPS60106244U true JPS60106244U (ja) 1985-07-19
JPH0222837Y2 JPH0222837Y2 (en, 2012) 1990-06-20

Family

ID=30762486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20105783U Granted JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Country Status (1)

Country Link
JP (1) JPS60106244U (en, 2012)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6836135B2 (en) 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7176705B2 (en) 2004-06-07 2007-02-13 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors

Also Published As

Publication number Publication date
JPH0222837Y2 (en, 2012) 1990-06-20

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