JPS60104747U - penning vacuum gauge - Google Patents

penning vacuum gauge

Info

Publication number
JPS60104747U
JPS60104747U JP19762183U JP19762183U JPS60104747U JP S60104747 U JPS60104747 U JP S60104747U JP 19762183 U JP19762183 U JP 19762183U JP 19762183 U JP19762183 U JP 19762183U JP S60104747 U JPS60104747 U JP S60104747U
Authority
JP
Japan
Prior art keywords
anode
cathode
penning
voltage
vacuum gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19762183U
Other languages
Japanese (ja)
Inventor
健二 小原
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP19762183U priority Critical patent/JPS60104747U/en
Publication of JPS60104747U publication Critical patent/JPS60104747U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の一実施例を系すための図、第２図は
第１図に示した各回路よりの出力信号を例示するための
図である。 １：ペニングヘッド、１ａ：陰極、１ｂ：陽極、１−ｃ
：磁極片、２：電源、３：制御回路、４：タイマー回路
、５：切換信号発生器、６：検　　　　−比抵抗、７：
出力回路、８：サンプルホールド回路、９：表示装置。FIG. 1 is a diagram illustrating an embodiment of the present invention, and FIG. 2 is a diagram illustrating output signals from each circuit shown in FIG. 1. 1: Penning head, 1a: cathode, 1b: anode, 1-c
: Magnetic pole piece, 2: Power supply, 3: Control circuit, 4: Timer circuit, 5: Switching signal generator, 6: Detection resistivity, 7:
Output circuit, 8: sample hold circuit, 9: display device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 陰極及び陽極及び磁界印加手段から成るペニングヘッド
と、該陰極及び陽極間に電圧を印加するための電源と、
該陰極及び陽極間の放電電流を検出して表示するための
手段とを備えた装置において、該電源の出力電圧は高低
２段階に切換え得るようになっており、該電源の出力電
圧を該２段階の電圧間で周期的に切換えるための制御手
段と、該電源の出力電圧が高電圧の際の前記放電電流を
サンプリングして表示するための手段を具備しているこ
とを特徴とするペニング真空計。a penning head comprising a cathode, an anode, and a magnetic field applying means; a power source for applying a voltage between the cathode and the anode;
The device is equipped with means for detecting and displaying the discharge current between the cathode and the anode, wherein the output voltage of the power source can be switched between two levels, high and low. A Penning vacuum characterized in that it comprises control means for periodically switching between stages of voltage, and means for sampling and displaying the discharge current when the output voltage of the power supply is high. Total.
JP19762183U 1983-12-22 1983-12-22 penning vacuum gauge Pending JPS60104747U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19762183U JPS60104747U (en) 1983-12-22 1983-12-22 penning vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19762183U JPS60104747U (en) 1983-12-22 1983-12-22 penning vacuum gauge

Publications (1)

Publication Number Publication Date
JPS60104747U true JPS60104747U (en) 1985-07-17

Family

ID=30756012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19762183U Pending JPS60104747U (en) 1983-12-22 1983-12-22 penning vacuum gauge

Country Status (1)

Country Link
JP (1) JPS60104747U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015514U (en) * 1973-06-05 1975-02-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015514U (en) * 1973-06-05 1975-02-19

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