JPS60104709U - Collimator drive mechanism in X-ray film thickness meter - Google Patents

Collimator drive mechanism in X-ray film thickness meter

Info

Publication number
JPS60104709U
JPS60104709U JP19654683U JP19654683U JPS60104709U JP S60104709 U JPS60104709 U JP S60104709U JP 19654683 U JP19654683 U JP 19654683U JP 19654683 U JP19654683 U JP 19654683U JP S60104709 U JPS60104709 U JP S60104709U
Authority
JP
Japan
Prior art keywords
collimator
drive mechanism
film thickness
thickness meter
ray film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19654683U
Other languages
Japanese (ja)
Inventor
西村 寔
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP19654683U priority Critical patent/JPS60104709U/en
Publication of JPS60104709U publication Critical patent/JPS60104709U/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案によるX線膜厚計に於るコリメータ駆動機
構を示すもので、第1図は全体構成図、第2図は、シャ
ツタ体の平面図、第3図はコリメータ機構の平面図、第
4図は第3図の側面図である。 1はX線源、2はミラー、3はコリメータ体、4はシャ
ツタ体、5は試料、6はコリメータ孔、6aは保持体、
7が回転板、8は支軸、9はギ′ヤ、10は支軸、11
はギヤ、12はギヤ部、13はピン、14は開口部、1
5はスイッチ、15aは作動片である。
The drawings show the collimator drive mechanism in the X-ray film thickness meter according to the present invention; FIG. 1 is an overall configuration diagram, FIG. 2 is a plan view of the shirt body, and FIG. 3 is a plan view of the collimator mechanism. FIG. 4 is a side view of FIG. 3. 1 is an X-ray source, 2 is a mirror, 3 is a collimator body, 4 is a shutter body, 5 is a sample, 6 is a collimator hole, 6a is a holder,
7 is a rotating plate, 8 is a support shaft, 9 is a gear, 10 is a support shaft, 11
is a gear, 12 is a gear part, 13 is a pin, 14 is an opening, 1
5 is a switch, and 15a is an operating piece.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] X線源の下部位置に設けられ移動自在に設けられたシャ
ツタ体と、このシャツタ体に回転自在に設けられ複数の
互いに径の異なるコリメータ孔を有するコリメータ孔と
、このコリメータ体に接続された複数のギヤと、このギ
ヤに接続され前記シャツタ体の保持体に回転自在に取付
けられた回転板と、この回転板上に植立されたピンと1
、前記保持体上に同心円状に配列された複数のスイッチ
とを備え、前記コリメータ体を回転させることにより、
コリメータ体のコリメータ孔に対応した位置で前記ピン
により前記スイッチが作動するよう辷構成したX線膜厚
計に於るコリメータ駆動機構。
A movable shirtter body provided at a lower position of the X-ray source, a collimator hole rotatably provided in the shirtter body and having a plurality of collimator holes having different diameters, and a plurality of collimator holes connected to the collimator body. a gear, a rotary plate connected to the gear and rotatably attached to the holder of the shirt starter body, a pin planted on the rotary plate, and a
, a plurality of switches arranged concentrically on the holding body, and by rotating the collimator body,
A collimator drive mechanism in an X-ray film thickness meter, wherein the collimator drive mechanism is configured such that the switch is actuated by the pin at a position corresponding to a collimator hole of a collimator body.
JP19654683U 1983-12-21 1983-12-21 Collimator drive mechanism in X-ray film thickness meter Pending JPS60104709U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19654683U JPS60104709U (en) 1983-12-21 1983-12-21 Collimator drive mechanism in X-ray film thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19654683U JPS60104709U (en) 1983-12-21 1983-12-21 Collimator drive mechanism in X-ray film thickness meter

Publications (1)

Publication Number Publication Date
JPS60104709U true JPS60104709U (en) 1985-07-17

Family

ID=30754343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19654683U Pending JPS60104709U (en) 1983-12-21 1983-12-21 Collimator drive mechanism in X-ray film thickness meter

Country Status (1)

Country Link
JP (1) JPS60104709U (en)

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