JPS60101748U - wafer cassette - Google Patents
wafer cassetteInfo
- Publication number
- JPS60101748U JPS60101748U JP19372783U JP19372783U JPS60101748U JP S60101748 U JPS60101748 U JP S60101748U JP 19372783 U JP19372783 U JP 19372783U JP 19372783 U JP19372783 U JP 19372783U JP S60101748 U JPS60101748 U JP S60101748U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- side plates
- plate
- upper plate
- lower plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pile Receivers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハーカセットの図、第２図は本考案
の傾斜したウェハーカセットを説明する図、第３図は本
考案のウェハーカセットに使用する蝶番、第４図は傾斜
固定片、第５図は垂直固定−片１’）ｘｉ、−カ、７．
。ｉ４ウォ、２６゜仕切溝、３，４，５．６はウェハー
カセットの４面体を構成する壁面、７は蝶声の芯軸、８
は芯軸の空芯部、９はネジ、１０は傾斜固定片、１１は
垂直固定片、１２は取りつけ孔である。FIG. 1 is a diagram of a conventional wafer cassette, FIG. 2 is a diagram explaining the tilted wafer cassette of the present invention, FIG. 3 is a hinge used in the wafer cassette of the present invention, and FIG. 4 is a tilted fixing piece, Figure 5 shows the vertically fixed piece 1') xi, -f, 7.
. i4 wall, 26° partition groove, 3, 4, 5.6 are the walls forming the tetrahedron of the wafer cassette, 7 is the core axis of the butterfly voice, 8
Reference numeral denotes an empty core portion of the core shaft, 9 is a screw, 10 is an inclined fixing piece, 11 is a vertical fixing piece, and 12 is a mounting hole.
Claims (1)
対の側板と、上下の壁面を構成する上板、下板とを有し
、前記側板と上板又は下板を蝶番で結合し、前記側板を
傾斜させることによって、全体形状を変形できる様にし
たことを特徴とするウェハーカセット。 ゛1 having a plurality of #cut grooves for storing wafers and facing each other.
It has a pair of side plates, and an upper plate and a lower plate that constitute upper and lower wall surfaces, and the side plates and the upper plate or the lower plate are connected with a hinge, and the overall shape can be deformed by tilting the side plates. A wafer cassette characterized by:゛
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19372783U JPS60101748U (en) | 1983-12-15 | 1983-12-15 | wafer cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19372783U JPS60101748U (en) | 1983-12-15 | 1983-12-15 | wafer cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60101748U true JPS60101748U (en) | 1985-07-11 |
Family
ID=30416599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19372783U Pending JPS60101748U (en) | 1983-12-15 | 1983-12-15 | wafer cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60101748U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015119026A (en) * | 2013-12-18 | 2015-06-25 | 株式会社ディスコ | Wafer housing cassette |
-
1983
- 1983-12-15 JP JP19372783U patent/JPS60101748U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015119026A (en) * | 2013-12-18 | 2015-06-25 | 株式会社ディスコ | Wafer housing cassette |
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