JPS60101369U - 電子線装置等用試料装置 - Google Patents

電子線装置等用試料装置

Info

Publication number
JPS60101369U
JPS60101369U JP19480383U JP19480383U JPS60101369U JP S60101369 U JPS60101369 U JP S60101369U JP 19480383 U JP19480383 U JP 19480383U JP 19480383 U JP19480383 U JP 19480383U JP S60101369 U JPS60101369 U JP S60101369U
Authority
JP
Japan
Prior art keywords
equipment
electron beam
sample
vacuum casing
moving plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19480383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125475Y2 (enrdf_load_stackoverflow
Inventor
馬場　靖孝
上村　英助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP19480383U priority Critical patent/JPS60101369U/ja
Publication of JPS60101369U publication Critical patent/JPS60101369U/ja
Application granted granted Critical
Publication of JPH0125475Y2 publication Critical patent/JPH0125475Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP19480383U 1983-12-16 1983-12-16 電子線装置等用試料装置 Granted JPS60101369U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19480383U JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19480383U JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Publications (2)

Publication Number Publication Date
JPS60101369U true JPS60101369U (ja) 1985-07-10
JPH0125475Y2 JPH0125475Y2 (enrdf_load_stackoverflow) 1989-07-31

Family

ID=30418600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19480383U Granted JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Country Status (1)

Country Link
JP (1) JPS60101369U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462658U (enrdf_load_stackoverflow) * 1977-10-12 1979-05-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462658U (enrdf_load_stackoverflow) * 1977-10-12 1979-05-02

Also Published As

Publication number Publication date
JPH0125475Y2 (enrdf_load_stackoverflow) 1989-07-31

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