JPS60100474A - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPS60100474A
JPS60100474A JP58207231A JP20723183A JPS60100474A JP S60100474 A JPS60100474 A JP S60100474A JP 58207231 A JP58207231 A JP 58207231A JP 20723183 A JP20723183 A JP 20723183A JP S60100474 A JPS60100474 A JP S60100474A
Authority
JP
Japan
Prior art keywords
pressure
resistance
pressure sensor
width
resistance value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58207231A
Other languages
English (en)
Japanese (ja)
Other versions
JPH031839B2 (enrdf_load_stackoverflow
Inventor
Akimitsu Kawaguchi
川口　晃充
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shindengen Electric Manufacturing Co Ltd
Original Assignee
Shindengen Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shindengen Electric Manufacturing Co Ltd filed Critical Shindengen Electric Manufacturing Co Ltd
Priority to JP58207231A priority Critical patent/JPS60100474A/ja
Publication of JPS60100474A publication Critical patent/JPS60100474A/ja
Publication of JPH031839B2 publication Critical patent/JPH031839B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP58207231A 1983-11-04 1983-11-04 半導体圧力センサ Granted JPS60100474A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58207231A JPS60100474A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58207231A JPS60100474A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS60100474A true JPS60100474A (ja) 1985-06-04
JPH031839B2 JPH031839B2 (enrdf_load_stackoverflow) 1991-01-11

Family

ID=16536403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58207231A Granted JPS60100474A (ja) 1983-11-04 1983-11-04 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS60100474A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231720A (en) * 1989-04-21 1990-11-21 Nobuo Mikoushiba Field effect transistor
US5138414A (en) * 1990-08-03 1992-08-11 Nissan Motor Company, Ltd. Pressure sensitive semiconductor device with cantilevers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231720A (en) * 1989-04-21 1990-11-21 Nobuo Mikoushiba Field effect transistor
GB2231720B (en) * 1989-04-21 1993-08-11 Nobuo Mikoshiba Integrated circuit
US5138414A (en) * 1990-08-03 1992-08-11 Nissan Motor Company, Ltd. Pressure sensitive semiconductor device with cantilevers

Also Published As

Publication number Publication date
JPH031839B2 (enrdf_load_stackoverflow) 1991-01-11

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