JPS5999437U - Exposure light source device that uses multiple lamps - Google Patents

Exposure light source device that uses multiple lamps

Info

Publication number
JPS5999437U
JPS5999437U JP19508082U JP19508082U JPS5999437U JP S5999437 U JPS5999437 U JP S5999437U JP 19508082 U JP19508082 U JP 19508082U JP 19508082 U JP19508082 U JP 19508082U JP S5999437 U JPS5999437 U JP S5999437U
Authority
JP
Japan
Prior art keywords
light source
source device
exposure light
uses multiple
multiple lamps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19508082U
Other languages
Japanese (ja)
Inventor
稔 池田
勝守　利夫
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP19508082U priority Critical patent/JPS5999437U/en
Publication of JPS5999437U publication Critical patent/JPS5999437U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の露光光源を示す説明図、第２図は従来の
露光光源を並べて露光する状態を示す説明図、第３図は
本考案の一実施例を示す構成図である。 １・・・水銀ランプ、３・・・蝿の目レンズ、９・・・
反射ミラー、４・・・マスク、５・・・基板。FIG. 1 is an explanatory diagram showing a conventional exposure light source, FIG. 2 is an explanatory diagram showing a state in which conventional exposure light sources are lined up for exposure, and FIG. 3 is a configuration diagram showing an embodiment of the present invention. 1...Mercury lamp, 3...Fly's eye lens, 9...
Reflection mirror, 4... mask, 5... substrate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 、　　　　　複数個の水銀ランプと、各ランプよりの光
束を各々集光する複数個の曲面鏡と、各集光照射面に□
　　　　　配置する複数個の光束を散乱させるための光
学手段とそれらを光学的に近接して配置するためのミラ
ーもしくはプリズムによる手段とからなり、上記複数個
の光束を散乱させるた−めの光学手段が、露光される物
体上の１点に対してなす角度が０．１ラジアン以下であ
ることを特徴とする複数個めランプを使用する露光光源
装置。, multiple mercury lamps, multiple curved mirrors that condense the luminous flux from each lamp, and □ on each condensing irradiation surface.
The optical means for scattering the plurality of light beams is composed of an optical means for scattering the plurality of light beams arranged and a means using a mirror or a prism for arranging them optically close to each other. An exposure light source device using a plurality of lamps, characterized in that the angle formed with respect to one point on an object to be exposed is 0.1 radian or less.
JP19508082U 1982-12-24 1982-12-24 Exposure light source device that uses multiple lamps Pending JPS5999437U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19508082U JPS5999437U (en) 1982-12-24 1982-12-24 Exposure light source device that uses multiple lamps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19508082U JPS5999437U (en) 1982-12-24 1982-12-24 Exposure light source device that uses multiple lamps

Publications (1)

Publication Number Publication Date
JPS5999437U true JPS5999437U (en) 1984-07-05

Family

ID=30419105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19508082U Pending JPS5999437U (en) 1982-12-24 1982-12-24 Exposure light source device that uses multiple lamps

Country Status (1)

Country Link
JP (1) JPS5999437U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101628A (en) * 1987-10-14 1989-04-19 Nec Corp Reducing stepper

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101628A (en) * 1987-10-14 1989-04-19 Nec Corp Reducing stepper

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