JPS5999405A - Manufacture of color separation filter - Google Patents
Manufacture of color separation filterInfo
- Publication number
- JPS5999405A JPS5999405A JP57208830A JP20883082A JPS5999405A JP S5999405 A JPS5999405 A JP S5999405A JP 57208830 A JP57208830 A JP 57208830A JP 20883082 A JP20883082 A JP 20883082A JP S5999405 A JPS5999405 A JP S5999405A
- Authority
- JP
- Japan
- Prior art keywords
- color separation
- cutting
- separation filter
- transparent support
- cutting line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000926 separation method Methods 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000005520 cutting process Methods 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims 1
- 238000012790 confirmation Methods 0.000 abstract description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052804 chromium Inorganic materials 0.000 abstract description 3
- 239000011651 chromium Substances 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 3
- 239000011347 resin Substances 0.000 abstract description 3
- 229920005989 resin Polymers 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000000980 acid dye Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は固体カラーカメラ、単管式カラーカメラ等に用
いる色分離フィルターの作製法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a color separation filter for use in solid-state color cameras, single-tube color cameras, and the like.
色分離フィルターはガラス等の透明支持体上に多数個の
着色画像部を形成し、次いで単一の色分離フィルター基
板の大きさに切断して単体の色分離フィルターを作製し
ている。Color separation filters are produced by forming a large number of colored image areas on a transparent support such as glass, and then cutting the substrate into the size of a single color separation filter substrate to produce a single color separation filter.
色分離フィルターは固体カラーカメラや単管式カラーカ
メラ等に用いられるが、特Ｃ：固体カラーカメラ用フィ
ルターの場合は第１図に示す如く、カラー固体撮像素子
はパツケニジングされた固体撮像素子（１）に色分離フ
ィルター（２）を正確に位置合せした後、接着剤（３）
により貼り合せて作製される。尚、図において（５）は
ポンディングパッド部、（６）はワイヤ、（７）はリー
ドフレームを示す。この場合、色分離フィルターζ二つ
ｌ、）では色分離フィルター基板の寸法及び色分離フィ
ルター基板の端部から着色画像部までの寸法が高精度で
あることが必要とされる。つまり、切断精度が悪いと固
体撮像素子のポンプイングツ勺ッド部に色分離フィルタ
一部が接触し、正確Ｃ二位置合せ及び貼り合せが行なえ
ない場合がある。Color separation filters are used in solid-state color cameras, single-tube color cameras, etc., but in the case of special C: filters for solid-state color cameras, as shown in Figure 1, color solid-state image sensors are packaged solid-state image sensors (1 ) After accurately aligning the color separation filter (2) with the adhesive (3)
It is manufactured by bonding. In the figure, (5) shows a bonding pad part, (6) shows a wire, and (7) shows a lead frame. In this case, in the color separation filter ζ2l,), the dimensions of the color separation filter substrate and the dimension from the end of the color separation filter substrate to the colored image area are required to be highly accurate. In other words, if the cutting precision is poor, a portion of the color separation filter may come into contact with the pumping pin of the solid-state image sensor, and accurate C2 positioning and bonding may not be possible.
今後更に色分−離フイルタ一部とポンプイングツ曵ット
部の間の距離が小さくなる傾向にあるため、より一層色
分離フィルターの切断精度を向上させることが要望され
る。Since the distance between a part of the color separation filter and the pumping part is likely to become smaller in the future, it is desired to further improve the cutting accuracy of the color separation filter.
又、従来は色分離フィルターチップの寸法、及び色分離
フィルターチップの基板端部から着色画像部までの寸法
を個別に測定し、切断精度の良否を求めていた。Furthermore, in the past, the dimensions of the color separation filter chip and the dimension from the substrate edge to the colored image area of the color separation filter chip were individually measured to determine the quality of cutting accuracy.
本発明者は蒸上の欠点を解消すべく研究の結果、着色画
像部の形成と共に透明支持体の切断線の近接部に切断精
度確認マークを入れ、次いで透明支持体を単一の色分離
フィルターの大きさに切断した後、切断精度確認マーク
に対する切断線の位置を観察することにより切断精度の
し
適否の判定が容易となることを見≠出し、かかる知見に
もとづいて本発明を完成したものである。As a result of research to eliminate the drawbacks of vaporization, the present inventor added a cutting precision confirmation mark near the cutting line of the transparent support while forming a colored image area, and then cut the transparent support into a single color separation filter. It was discovered that it is easy to determine whether the cutting accuracy is appropriate or not by observing the position of the cutting line relative to the cutting accuracy confirmation mark after cutting to a size of It is.
即ち、本発明の要旨は透明支持体上に多数個の色分離フ
ィルターの着色画像部を形成し、次いで透明支持体を単
一の色分離フィルター基板の大きさに切断して多数の色
分離フィルターを得る色分離フィルターの作製法につい
て、着色画像部の形成と共に透明支持体の切断線の近接
部に切断精度確認マークを入れ、次いで透明支持体を単
一の色分離フィルター基板の大きさに切断した後、切断
精度確認マークに対する切断線の位置を観察することに
より、切断精度の適否を判定することを特徴とする色分
離フィルターの作製法である。That is, the gist of the present invention is to form colored image areas of a large number of color separation filters on a transparent support, and then cut the transparent support into the size of a single color separation filter substrate to form a large number of color separation filters. Regarding the method of manufacturing a color separation filter to obtain a color separation filter, a cutting accuracy confirmation mark is placed near the cutting line of the transparent support while forming a colored image area, and then the transparent support is cut into the size of a single color separation filter substrate. After that, the position of the cutting line relative to the cutting accuracy confirmation mark is observed to determine whether or not the cutting accuracy is appropriate.
以下、本発明につき図面を用いて詳細（二説明する。Hereinafter, the present invention will be explained in detail using the drawings.
ガラスなどの透明支持体上に多数個の色分離フィルター
の着色画像部を例えばポリビニルアルコール、ゼラチン
、カゼイン、グリユー等の′樹脂に感光剤として重クロ
ム酸塩を添加した感光性樹脂をパターニング化した後、
酸性染料等で着色し第１色目の着色画像を形成する。第
２色目、第３色目も同様の工程を繰り返すことζ二より
色分離フィルターの着色画像部を形成する。The colored image areas of a large number of color separation filters are patterned on a transparent support such as glass using a photosensitive resin such as polyvinyl alcohol, gelatin, casein, or griux, to which dichromate is added as a photosensitizer. rear,
It is colored with an acid dye or the like to form a colored image of the first color. By repeating the same process for the second and third colors, a colored image portion of the color separation filter is formed.
また必要に応じて、保護を目的とした透明樹脂による保
護層を形成すると共に、透明支持体の切断線の近接部に
例えば金属クロム等を）（ターニングして切断精度確認
マークを形成する。一般に色分離フィルターの画像部は
、金属クロム等ｌ二よる遮光層が必要なため、切断精度
確認マークと同一の工程で同時に形成する。クロム層の
加工は透明支持体上にスパッタ等で１０００Ａ程度成膜
後、レジスト製版後エツチングしてパターン化する。そ
の後、着色画像部を形成する。In addition, if necessary, a protective layer of transparent resin is formed for the purpose of protection, and a mark for confirming cutting accuracy is formed by turning (for example, metal chrome, etc.) near the cutting line of the transparent support. The image area of the color separation filter requires a light-shielding layer made of metal chromium, etc., so it is formed at the same time as the cutting accuracy check mark.The chromium layer is processed by sputtering on a transparent support to a thickness of about 1000A. After the film is formed, the resist is etched into a pattern after plate making.Then, a colored image area is formed.
次いで、透明支持体を単一の色分離フィルター基板の大
きさに切断した後、切断精度確認マークに対する切断線
の位置を観察することにより、切断精度の適否を判定す
る。Next, after cutting the transparent support into the size of a single color separation filter substrate, the suitability of the cutting accuracy is determined by observing the position of the cutting line relative to the cutting accuracy confirmation mark.
第２図は色分離フィルター基板の外周コーナ一部に相当
する領域に切断精度確認マークを入れた状態を示し、図
において（８）は切断線、（９）は切断精度確認マーク
、（１Ｇは着色画像部を示す。Figure 2 shows a state in which a cutting accuracy confirmation mark is placed in an area corresponding to a part of the outer circumference corner of the color separation filter substrate. In the figure, (8) is the cutting line, (9) is the cutting accuracy confirmation mark, and (1G is A colored image area is shown.
次に第３図は単一の色分離フィルター基板の大きさに切
断した後の状態を示す。ここでｔは切断精度確認マーク
を構成するラインとスペースの巾（＝５ａ−）を示し、
ＴＸ、ＴＸは色分離フィルター基板の寸法を示し、ＴＸ
、ＴＸ’ 、 ’ｒｙ、Ｔｙ／は基板端部から着色画像
部までの寸法を示す。Next, FIG. 3 shows the state after cutting into the size of a single color separation filter substrate. Here, t indicates the width (=5a-) of the line and space that constitute the cutting accuracy confirmation mark,
TX, TX indicates the dimensions of the color separation filter substrate, TX
, TX', 'ry, Ty/ indicate the dimensions from the edge of the substrate to the colored image area.
下表は第６図示の色分離フ゛イルターの切断精度確認マ
ークを観察した結果から色分離フィルター寸法及び画像
部とフィルタ一端部間の寸法を算出した結果を示す。The table below shows the results of calculating the dimensions of the color separation filter and the dimension between the image area and one end of the filter based on the results of observing the cutting accuracy confirmation mark of the color separation filter shown in FIG.
第１表二色分離フィルター寸法及び画像部とフば切断精
度の適否の判定を極めて容易に行なうことができるのみ
ならず、切断精度確認マークを着色画像部の形成過程に
おいて入れるので工程数を増やすこともない。Table 1 Two-color separation filter dimensions and image areas and flaps Not only can it be extremely easy to judge the suitability of the cutting accuracy, but the cutting accuracy confirmation mark is added during the process of forming the colored image area, which increases the number of steps. Not at all.
第１図は固体撮像素子受光面上に色分離フィルターを貼
合せたのち、固体撮像素子からリードフレームへの導通
を行ない、パッケージングした素子全体の断面図、第２
図は切断前の色分離フィルターの平面図、第３図は切断
後の色分離フィルターの平面図テある。
（８）・・・・・・・・・・旧旧・・切断線（９）・・
・・・・・・・・・・・・・・・・切断精度確認マーク
００・・・・・・・・・・・・・・・・・・着色画像部
特許出願人 大日本印刷株式会社
代理人 弁理士 小 西 淳 美
第１図Figure 1 is a cross-sectional view of the entire device packaged after a color separation filter is pasted on the light-receiving surface of the solid-state image sensor, and conduction is established from the solid-state image sensor to the lead frame.
The figure is a plan view of the color separation filter before cutting, and FIG. 3 is a plan view of the color separation filter after cutting. (8)... Old and old Cutting line (9)...
・・・・・・・・・・・・・・・Cutting accuracy confirmation mark 00・・・・・・・・・・・・・・・Colored image section patent applicant Dai Nippon Printing Co., Ltd. Agent Patent Attorney Atsumi Konishi Figure 1
Claims (1)
を形成し、次いで透明支持体を単一の色分離フィルター
基板の大きさに切断して多数の色分離フィルターを得る
色分離フィルターの作製法において、着色画像部の形成
と共に透明支持体の切断線の近接部Ｃ二切断精度確認マ
ークを入れ、次いで透明支持体を単一の色分離フィルタ
ー基板の大きさに切断した後、切断精度確認マークに対
する切断線の位置を観察することにより４、切断精度の
適否を判定することを特徴とする色分離フィルターの作
製法。Preparation of a color separation filter in which colored image areas of a large number of color separation filters are formed on a transparent support, and then the transparent support is cut into the size of a single color separation filter substrate to obtain a large number of color separation filters. In the method, when a colored image area is formed, a cutting accuracy check mark is placed on the transparent support near the cutting line C. Then, after cutting the transparent support into the size of a single color separation filter substrate, the cutting accuracy is checked. 4. A method for producing a color separation filter, characterized in that the suitability of cutting accuracy is determined by observing the position of the cutting line with respect to the mark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208830A JPS5999405A (en) | 1982-11-29 | 1982-11-29 | Manufacture of color separation filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57208830A JPS5999405A (en) | 1982-11-29 | 1982-11-29 | Manufacture of color separation filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5999405A true JPS5999405A (en) | 1984-06-08 |
Family
ID=16562811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57208830A Pending JPS5999405A (en) | 1982-11-29 | 1982-11-29 | Manufacture of color separation filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5999405A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6464254A (en) * | 1987-09-03 | 1989-03-10 | Toshiba Corp | Solid-state image sensor and manufacture thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425226A (en) * | 1977-07-27 | 1979-02-26 | Kobe Steel Ltd | Method of treating waste gas from pickling process |
| JPS572008A (en) * | 1980-06-06 | 1982-01-07 | Canon Inc | Color filter composite body |
-
1982
- 1982-11-29 JP JP57208830A patent/JPS5999405A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425226A (en) * | 1977-07-27 | 1979-02-26 | Kobe Steel Ltd | Method of treating waste gas from pickling process |
| JPS572008A (en) * | 1980-06-06 | 1982-01-07 | Canon Inc | Color filter composite body |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6464254A (en) * | 1987-09-03 | 1989-03-10 | Toshiba Corp | Solid-state image sensor and manufacture thereof |
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