JPS599789U - 静電吸着板の電極構造 - Google Patents

静電吸着板の電極構造

Info

Publication number
JPS599789U
JPS599789U JP10426682U JP10426682U JPS599789U JP S599789 U JPS599789 U JP S599789U JP 10426682 U JP10426682 U JP 10426682U JP 10426682 U JP10426682 U JP 10426682U JP S599789 U JPS599789 U JP S599789U
Authority
JP
Japan
Prior art keywords
comb
adsorption plate
electrode structure
electrostatic adsorption
shaped electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10426682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0134558Y2 (enrdf_load_stackoverflow
Inventor
秀夫 山田
若月　延雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taihei Chemicals Ltd
Original Assignee
Taihei Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taihei Chemicals Ltd filed Critical Taihei Chemicals Ltd
Priority to JP10426682U priority Critical patent/JPS599789U/ja
Publication of JPS599789U publication Critical patent/JPS599789U/ja
Application granted granted Critical
Publication of JPH0134558Y2 publication Critical patent/JPH0134558Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP10426682U 1982-07-09 1982-07-09 静電吸着板の電極構造 Granted JPS599789U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10426682U JPS599789U (ja) 1982-07-09 1982-07-09 静電吸着板の電極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10426682U JPS599789U (ja) 1982-07-09 1982-07-09 静電吸着板の電極構造

Publications (2)

Publication Number Publication Date
JPS599789U true JPS599789U (ja) 1984-01-21
JPH0134558Y2 JPH0134558Y2 (enrdf_load_stackoverflow) 1989-10-20

Family

ID=30244896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10426682U Granted JPS599789U (ja) 1982-07-09 1982-07-09 静電吸着板の電極構造

Country Status (1)

Country Link
JP (1) JPS599789U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0134558Y2 (enrdf_load_stackoverflow) 1989-10-20

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