JPS5997840A - Polishing machine - Google Patents

Abstract

PURPOSE:To permit the fine polishing work to obtain an arbitrary unflat or nonspherical surface from by forming grooves on the outer peripheral part of a surface plate along the direction of sliding of a work, thus permitting the finishing of the work within a prescribed accuracy in each flat and spherical degree. CONSTITUTION:Grooves 17 are formed on the outer peripheral surface of a surface plate 2 along the directions X and Y of sliding of a work. The width W of the groove 17 is increased gradually larger in the outer peripheral part of the surface plate. The larger polishing pressure can be applied onto the outer peripheral part of the work by forming the above-described groove 17, so the abrasion distance can be successively reduced on more outer peripheral part of the work, and the slack on the outer periphery of the work can be prevented, and the flatness can be improved.

Description

Detailed Description of the Invention +5 [Field of Application of the Invention] The present invention relates to a polishing apparatus that improves the flatness, asphericity, etc. of a workpiece in polishing processes such as lapping.

[Prior art]

An example of a conventional X-Y sliding wrap device is shown in Figure 1.

show. Lissajous figure between workpiece 1 and surface plate 20.

Give relative motion as expressed by 3, surface plate surface.

The workpiece is polished using a pre-applied lapping agent.

Although it is processed, even if the surface plate is flat.

- The polished surface is not flat and is generally used during work.

It has a convex shape with 6 parts sticking out. In other words, the outer circumference of the workpiece has a sagging shape, so the flatness is 0.1 pm.

During high-precision polishing processing where order is an issue.

It was a topic. 1゜ [Object of the Invention] The object of the present invention is to solve the above-mentioned drawbacks of the prior art, and to provide a polishing device that improves the transferability of the cross-sectional shape of the workpiece to the precision of the surface plate, and improves the flatness or asphericity of the workpiece. It's about doing.

5 [Summary of the Invention] The amount of polishing per unit area of the polished surface of a workpiece is proportional to the product of the polishing pressure acting on that point and the polishing distance of that point. By the way, at the outer periphery of the workpiece.

Stress concentration due to polishing pressure acts, and the polishing pressure shows a distribution that gradually increases rapidly from the center of the workpiece to the outer part, and it is physically impossible to eliminate this.

Therefore, the polishing efficiency of the outer circumference of the workpiece is inevitably high.

This will cause dripping around the workpiece. In the present invention:

In order to improve this, the above-mentioned polishing distance is changed between the central part and the outer periphery of the workpiece. 6 [Embodiments of the Invention] The following describes an XY sliding wrap device to which the present invention is applied.

1, and also to give the resurge melon motion 3.

The movement mechanism is shown in Figure 3. Here, the workpiece 1 is fixed to a holder 4 via a spherical bearing 5.

A polishing load PO is applied by a rod 6. .

Therefore, the workpiece can always be polished following the surface of the surface plate. Also, the rod 6 is a bearing 7 and an arm.

8. Driven by an eccentric shaft 10 via a bearing 9.

The eccentric shaft 10 rotates while being eccentric from the center axis of the rotating disk 11 by an amount e relative to the central axis of the rotating disk 11 which is rotationally driven by the motor 14.

With such a link mechanism, the workpiece 1 reciprocates on one axis along the arm 80 guide surface (not shown). If this is taken as the X axis, by providing a similar drive mechanism in the direction orthogonal to this, the workpiece can be moved in an XY reciprocating manner with respect to the surface plate, and two surge figures can be drawn. Of course,
.

Move the surface plate in XY motion without moving the workpiece.

The same is true.　　　　　　　　　　　　　.

In such an XY sliding lapping device, stress concentration due to polishing pressure acts on the outer periphery of the workpiece, as shown in FIG.

As shown in (1), the cross-sectional shape of the workpiece is narrow at the periphery.

It is processed into a convex shape. However, Figure 2.

For moving the workpiece from one end to the other, as shown.

Set the distance 12 longer than the length to of the surface plate, and measure the workpiece.

Given the amount of protrusion, the response at the outer periphery of the surface plate.

The concentration of force extends to the center of the workpiece, and the workpiece again.

In the peripheral area, the time that is not used for polishing increases.

Since the grinding distance is reduced from the central part, it is possible to improve the sagging around the workpiece, and conversely, the workpiece is machined into a middle gate shape as shown in FIG. 4(2).

The relationship between the ratio of the amount of workpiece protrusion from the surface plate to the workpiece diameter α0 and the maximum waviness (sag amount) of the cross-sectional shape of the workpiece excluding the workpiece outer circumferential width C is shown as follows, for example: It will look like Figure 5. sand.

In other words, if you choose the amount of protrusion appropriately, the flatness can be improved.

In theory, it is best to reduce the amount of dripping to almost 0.

However, this is possible due to changes in the amount of protrusion.

The change in sluggishness is steep, and the difference in the figure.

This is because there are variations within the area shown by the scratches.

It is very difficult to reduce the flatness to 0. especially,.

Cast iron, which is a relatively hard material with hardness in rough polishing.

Finish polishing is better than using a surface plate such as 545C.

The surface plate is circular because it uses a surface plate made of soft material such as tin.

The wear on the edges has increased, causing a large amount of protrusion.

The changes to the measurements become increasingly large.

In this way, be sure to perform final polishing to improve the surface roughness.

Since there is a process of polishing, the shape accuracy can be improved by rough polishing.

Even if the shape is good, the shape accuracy deteriorates due to final polishing. Put it away.

The present invention aims to improve the wear of the peripheral part of the soft surface plate, especially in this final polishing, as shown in FIG. It is characterized by having a groove 17 in the part, and the moving distance J2 from one end of the workpiece to the other end is less than or equal to the surface plate length lO (t!2≦1!0).
It is characterized by Here, the width W of the groove 17 is shown in the same figure.

As shown, the outer periphery of the surface plate can be gradually widened.

can. By providing such a groove 17, 59-
The polishing pressure exerts a large effect on the outer periphery of the wheel.

Accordingly, the polishing distance is shortened around the outer circumference of the workpiece.

This makes it possible to prevent the outer periphery of the workpiece from sagging (Fig. 4 (1)) and improve the flatness.

Also, the shoulder of the surface plate does not cause any protrusion.

Prevents wear and improves workpiece shape accuracy through polishing.

The shape of the surface plate according to the present invention is not limited to only a rectangular shape.

It can also be applied to circular shapes as shown in Figure 7.

Wear. In this case, the workpiece 1 is in the radial direction of the surface plate. It reciprocates in the 5R direction and slowly rotates in the θ direction. Furthermore, the surface plate 15 rotates in one direction, creating a relative speed between it and the workpiece. In the case of FIG. 7 as well, grooves 18 that widen toward the end are provided on the inner and outer peripheries of the surface plate, and the moving distance in the R direction is set to the surface plate width r.

It is made smaller and prevents protrusion. - The present invention is applicable not only to a flat surface plate but also to a spherical surface plate 16 as shown in FIG.

By providing a groove 19 that widens toward the end on the outer periphery of the surface plate, it is possible to similarly improve the amount of sagging of the cross-sectional shape of the workpiece with respect to the cross-sectional shape of the surface plate. .

In this way, the present invention can be applied regardless of the shape of the surface plate.

Possible, and where a grindstone is used instead of a surface plate.

It can also be applied when Also, for final polishing.

A thin, soft material on top of a hard metal surface plate 2115.16.

It can also be used by closely fixing the surface plate. .

Further, the depth d of the groove shown in FIGS. 6 to 8 is according to the present invention.

Although the groove depth was considered to be approximately the radius of the workpiece, the effect of the present invention can be obtained even if the groove depth is longer.

It is possible, for example, that the groove extends over the length of the surface plate.

It may continue.

Another example of the present invention is shown in FIG. If the drive mechanism shown in Fig. 5 were used to give the amount of workpiece movement beyond the length of the surface plate and keep it at a constant value during polishing, a workpiece cross-sectional shape of the predetermined 2( ) could be obtained with good accuracy. There may be cases where it is not possible.

That is, in the present invention, the protruding scale is actively used.

A non-planar, aspherical shape that differs from the cross-sectional shape of the surface plate.

This article relates to a method for producing a shaped workpiece. Protruding.

Depending on how the amount b (constant value) is given, the wear of the surface plate may be affected, as shown in FIG. 11.

The cross-sectional shape is different from the middle gate shape as shown in Figure 4 (2).

A convex shape remains in the center of the workpiece.

There are cases. I'm not sure how to improve this.

1. Change the measured value over time as shown in FIG. .

For example, by setting b = bosinWt, the cross-sectional shape of the workpiece is changed gently from the center to the periphery,
The ideal shape as shown in Fig. 4 (2) can be created regardless of the state of wear of the surface plate, and conversely, the central convex-periphery concave shape as shown in Fig. 11 can be created intentionally. I can do it.

In order to perform the movement shown in FIG. 9 as shown in FIG. 3, a feed motor 13 for driving the eccentric shaft 10 and a feed screw 12 are provided, and a command voltage is applied to the motor 1 to control the amount of eccentricity over time.
You can give it to 3.

Also, without using a link mechanism as shown in Fig. 3.

Directly connect the X and Y axis motors with an XY moving table.

The same is true even if a driving system is used, and furthermore, as shown in FIG.

It is also possible to perform a reciprocating movement of several degrees.

〔Effect of the invention〕 .

According to the present invention, the flatness of the work piece can be increased to 1 with a simple device configuration.
Finish the sphericity within a predetermined accuracy.

Can also have any non-planar, aspherical shape.

It is also possible to process it.　　　　　　1゜

[Brief explanation of drawings]

FIG. 1 shows a conventional XY sliding wrap device. The perspective view and FIG. 2 show a wrap having an amount of protrusion. Figure 6 shows the XY sliding wrap device. FIG. 4(n) is a partial cross-sectional view showing the movement mechanism, FIG. is a diagram showing a grooved surface plate according to the present invention,
FIGS. 9 and 10 are explanatory diagrams for explaining the protrusion amount control method according to the present invention, and FIG. 11 is a diagram showing the droop shape of workpiece 0. 1... Work, 2... Surface plate, 3... Lissajous figure, 4... Holder, 5... Spherical bearing, 6... Rod, 7.9... Bearing, 8 ...Arm, 10...Eccentric shaft, 11...Rotating disk. 12...Feed screw, 13...Feed motor, 14...
- Rotating motor 5, 15... circular surface plate, 16... spherical surface plate, 17.18. ,. 19... Groove with a widening shape on the outer periphery of the surface plate. 】0 Year 1 figure Y Year 2 figure (1) Year 3 figure Year 4 figure Year 5 figure Mosquito off flash

Claims (1)

[Claims] 1. A workpiece is slid on the outer periphery of the polishing surface of the lapping surface plate. A grinder characterized by having grooves along the directions (x, y directions) to reduce the polishing efficiency in -1 local areas outside the surface plate. Polishing device. 2. Gradually increase the width of the above groove toward the outer periphery of the surface plate. The patent claim is characterized in that: The polishing device according to scope 1. 166
The sliding vibration of the workpiece is made longer than the length of the lap surface plate.
A polishing device characterized by giving an amount of protrusion of a workpiece from a surface plate and gradually changing the amount of protrusion over time.