JPS5995624U - quartz boat - Google Patents

quartz boat

Info

Publication number
JPS5995624U
JPS5995624U JP19064082U JP19064082U JPS5995624U JP S5995624 U JPS5995624 U JP S5995624U JP 19064082 U JP19064082 U JP 19064082U JP 19064082 U JP19064082 U JP 19064082U JP S5995624 U JPS5995624 U JP S5995624U
Authority
JP
Japan
Prior art keywords
quartz boat
gutter
protrusion
longitudinal direction
protrusions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19064082U
Other languages
Japanese (ja)
Inventor
毛野　拓治
Original Assignee
松下電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 松下電工株式会社 filed Critical 松下電工株式会社
Priority to JP19064082U priority Critical patent/JPS5995624U/en
Publication of JPS5995624U publication Critical patent/JPS5995624U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図及び第２図はこの考案の一実施例を示す図で、第
１図は上面図、第２図はｍ１面図、第３図及び第４図は
従来例を示す図で、第３図は上面図、第４図は断面図で
ある。1 and 2 are views showing one embodiment of this invention, FIG. 1 is a top view, FIG. 3 is a top view, and FIG. 4 is a sectional view.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 樋状体１をなし、該樋状体１の底面及び長手方向両側上
縁部の対向する内面に長手方向１こ突状２を形成し、こ
れら各突状２を横切る複数の各垂直面内に底面が該突状
２の長手方向に略半円弧状をなす一組の溝３を形成して
成る石英ボード。A gutter-like body 1 is formed, and one protrusion 2 in the longitudinal direction is formed on the bottom surface and the opposing inner surfaces of the upper edges on both longitudinal sides of the gutter-like body 1, and in each of a plurality of vertical planes that cross each of these protrusions 2. A quartz board having a bottom surface formed with a set of grooves 3 having a substantially semicircular arc shape in the longitudinal direction of the protrusion 2.
JP19064082U 1982-12-16 1982-12-16 quartz boat Pending JPS5995624U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19064082U JPS5995624U (en) 1982-12-16 1982-12-16 quartz boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19064082U JPS5995624U (en) 1982-12-16 1982-12-16 quartz boat

Publications (1)

Publication Number Publication Date
JPS5995624U true JPS5995624U (en) 1984-06-28

Family

ID=30410720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19064082U Pending JPS5995624U (en) 1982-12-16 1982-12-16 quartz boat

Country Status (1)

Country Link
JP (1) JPS5995624U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624337A (en) * 1985-07-01 1987-01-10 Toshiba Ceramics Co Ltd Semiconductor wafer supporting boat
JPS6373938U (en) * 1986-10-31 1988-05-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624337A (en) * 1985-07-01 1987-01-10 Toshiba Ceramics Co Ltd Semiconductor wafer supporting boat
JPS6373938U (en) * 1986-10-31 1988-05-17

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