JPS5992192A - Laser working device - Google Patents

Abstract

PURPOSE:To prevent the contamination of the window of a vacuum vessel by gushing material, vapor, etc. in a device for performing laser working by disposing a movable transparent plate-like body between said window and an object to be worked. CONSTITUTION:A laser beam 2 emitted from a laser source 1 irradiates through the window glass 3 provided on the wall 4 of a vacuum vessel on an object 5 to be worked disposed in the vacuum vessel, whereby laser working is progressed. A rectangular glass plate 6 is supported by a support rod 11 between the glass 3 and the object 5 so that the glass plate can be longitudinally moved on rolls 12. The transparent plate-like body 6 made of glass is slightly shifted and is used in the succeeding laser working when it is contaminated by the spatters deposited and stuck thereon by the laser working.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention removes ejected matter and steam generated during laser processing in a vacuum system by depositing it on a transparent plate that is easily movable and preventing it from adhering to the laser beam. The present invention relates to a laser processing apparatus in which a window of a vacuum vessel through which the light passes through is prevented from being contaminated by the above-mentioned ejected matter and vapor deposition and adhesion.

A laser beam is irradiated onto the workpiece in a vacuum system to heat and
Melting/cutting 14/[・When performing laser processing such as welding (”
, a part of the laser beam irradiation part of the processing object melts and scatters in the vacuum system as spatter such as ejecta and steam, and the -L of the processing object and the nearby '1'lJ body. The laser source is placed outside the vacuum chamber to prevent spatter from depositing on the lens or mirror of the laser source, and the laser beam is directed into the vacuum chamber through a transparent material such as glass installed in the window of the vacuum chamber. A method was devised to irradiate the placed workpiece, but in this case, if sputter was deposited on the window of the vacuum container, it would contaminate the window glass and reduce the transmittance of the laser beam.
Efficiency decreases, and in the end, satisfactory machining becomes impossible.

Therefore, in order to solve the problem of the above-mentioned sputter deposition curve on the window glass when laser processing the processing object in a vacuum container, a transparent viscous substance is flowed down on the surface of the window glass facing the processing object. There is a method in which the spatter is allowed to adhere to the film and then flows down (hereinafter referred to as the flow-down method), or a roll film is attached to the inner surface of the window glass and the spatter is deposited on the roll film by winding the roll film. A method of removing it (hereinafter referred to as the roll film method) has been devised.

In the case of the above-mentioned flow F method, it is necessary to use a large amount of a $) viscous liquid, such as silicone oil, and in order to reduce the loss, the viscous liquid must be used in order to reduce the loss.
',1 Use 4 requires filters, pumps, etc., which makes the equipment complicated and large, and it is difficult to maintain a constant liquid volume and create a thin, uniform liquid film in a vacuum. requires very precise technology, and the influence of the environmental conditions within the vacuum system on the liquid film naturally causes fluctuations in the transmittance of the laser beam, which tends to disturb the finish of laser processing. If the filter of the viscous material pipe is used properly, problems such as the filter becoming obsolete due to spattered particles and the viscous liquid gradually becoming colored during circulation and causing a decrease in laser beam transmittance can be avoided. It's difficult. Furthermore, flowing down a large amount of liquid is especially disadvantageous when processing conditions require a high vacuum, such as when laser processing a high-performance dual bottle.

On the other hand, in the case of the roll film method described above, it is necessary to install equipment for stretching, moving, and winding the roll film inside the vacuum container, which is also complicated and large.
(Required, the film can only be used once and costs 1 yen.)
Therefore, it is inevitable to become unemployed. In addition, if the film has wrinkles, the cleanliness of the laser beam will be disturbed in different places, causing non-uniformity and uneven laser processing.If there is a pinhole in the film, the sputter that has passed through it will be Problems such as vapor deposition on transparent window glass also occur. Another disadvantage of the roll film method is that the temperature conditions for processing are limited to a narrow range, since it is not possible to apply a laser force of 1000 ml at a temperature above the softening point of the film.

Both the alkaline flow method and the roll film method have their own drawbacks, so a technology that can avoid these drawbacks and perform laser processing precisely, with relatively simple and compact equipment, and at low cost is needed. has been strongly desired. As a result of intensive research in order to solve this persistent technical problem, the inventor of the present invention has solved the above problem and has facilitated laser processing even in a high vacuum and at relatively low temperature. We have succeeded in designing two devices that can perform laser processing, and have completed the present invention.

The present invention is based on the following method: "The laser 11λ outside the vacuum container is distributed into the container through a transparent body provided in the window of the vacuum container.
24. In a device that performs laser processing such as melting, cutting, welding, etc., the above-mentioned window of the vacuum container and the processing object are A laser processing device characterized in that a transparent plate-like body made of MJ and JAr is placed at a position intermediate between the two. ”.

The present invention will be explained using drawings showing implementation Jy.

The transparent plate-like body with the i'' dynamic structure used in the laser processing apparatus of the present invention is a transparent plate-like body that can easily transmit the laser beam, and the spatter scattered from the workpiece can be exposed to the window of the vacuum container. Anything that could obstruct the vapor deposition on the transparent body provided (the material is not limited to glass, but glass is commonly used, hereinafter referred to as window glass); There are no restrictions on its material or shape. Materials include practical glasses such as soda glass, lead glass, silica glass, borosilicate glass (for example, Pyrex glass, Vycor 'N lath, Tau Corning products), aluminosilicate glass, and laser glass. As a typical example, it is also possible to use mineral materials that are transparent to the laser beam, such as a transparent plastic plate, crystal, or transparent sintered ceramics, depending on the conditions. The shape of the movable transparent plate-like body is not particularly limited, and may be shifted to any shape depending on how it is moved. A transparent plate (4) placed between the window glass for laser beam transmission in the vacuum container and the object to be processed (t), which collides with the spatter scattered during laser processing to evaporate it and prevent adhesion. to prevent spatter from hitting the window glass,
If the spatter is deposited or undone due to use, move the transparent plate so that the 616 minutes of the evaporation or adhesion of the sputter is out of the path of the laser beam. Then, perform the following laser processing.

After removing the spatter contamination by 1≦I+), laser processing is restarted. In order to perform such operations repeatedly, the transparent plate-like body is made to have a movable structure, but other
In embodiment b, the transparent plate-like body may be continuously rotated.

Figure 1 shows a transparent plate-shaped body that can be moved in a straight line.
t L, shows an example. A laser beam 2 emitted from a laser source 1 passes through a window glass 3 provided on a wall 4 of the vacuum container and irradiates the workpiece 5 placed within the vacuum container to proceed with laser processing. Between the window glass 3 and the workpiece 5, as shown in FIG. 2, there is a structure in which a glass plate 6, which is rectangular when viewed from above, is supported by a support rod 11, and a roll 12 can be moved in the longitudinal direction. It's Nishide. When the glass transparent plate 6 gets dirty due to spatter deposition and adhesion during laser processing, it is moved slightly and used for the next laser processing, and once one glass plate has been used from end to end, it can be taken out and replaced with a new one. exchange with. In one embodiment of the present invention, when a transparent viscous substance such as silicone oil is applied to this transparent plate-like body and scattered spatter is made to collide with it, the spatter is resistant to adhesion and capture by the viscous substance, Wiping off the viscous substance after laser processing is completed removes the same amount as the viscous substance, so instead of using a new transparent plate, wipe off the waste viscous substance and reapply a clean viscous substance. You can also take one momme with it. FIG. 1 shows an example in which a rectangular glass plate is moved along a straight line in the longitudinal direction.In addition, the transparent plate can be moved in two or more directions, such as both vertical and horizontal directions. It is also possible to increase the number of times until the transparent plate is replaced. In this case, the plan view of the transparent plate-like body should be a shape close to the IE rectangle.The shape of the plate-like body may be any other shape as long as it respects its movement.

FIG. 3 shows an example in which a transparent object having a rotating opening is arranged. The laser source 1 is emitted and the sub-beam passes through the window glass 3 provided in the vacuum container Be 4 and is irradiated onto the workpiece 5 placed in the vacuum container to apply laser pressure to heJ.
L. It is exactly the same as the case in Figure 1 in that the transparent plate-like body is used by smoothing it little by little, but in this case, the transparent plate-like body is a disk or a polygonal plate and the laser beam is transmitted through the laser beam by rotating the transparent plate-like body. I'm going to have a good time.

FIGS. 4 and 5 show a disc-shaped body and a hexagonal plate-shaped body, respectively, as examples of the transparent plate-shaped body.

For example, for a hexagonal piece, an angle corresponding to one side is used for one laser pressurization, and if the angle is shifted, it can be processed 16 times.

In FIG. 6, a transparent plate-like body 6 rotating around a rotation axis 13 is shown.
In other words, this figure shows an example in which a transparent viscous substance remover and applicator are arranged so as to slide downwards on a transparent plate. The figure only shows the viscous substance remover, but hidden behind it is the viscous substance applicator. The viscous substance removal tool should be something that can wipe off the viscous substance, such as a brush or mop-like item, and that does not cause any risk of scratching the surface of the curved plate. For example, there are no particular limitations on the material, shape, etc. Static electricity is likely to be generated due to friction during wiping, so
It is a good idea to take measures against static electricity, such as applying antistatic treatment or having the device come in contact with conductive wires that lead static electricity to the outside.

For coating the viscous substance, any known coating method or device such as a capillary or roll may be used, and there are no particular restrictions on the material, shape, structure, etc. of the device. Of course, it is also possible to manually remove and apply the viscous substance. Spatter directly collides with the surface of the transparent plate that faces the object to be processed during laser processing, so it goes without saying that treatment should be focused on this surface. Since it may get wet and get wet, the viscous substance may be coated and removed from both sides as needed.

Figures 3 and 6 show an example in which a rotatable transparent plate is taken parallel to the laser beam transmitting window glass. An example was shown in which it was taken at an angle with a bar. As long as it does not cause any inconvenience to the transmitted irradiation of the laser beam, it may be possible to make the entire device more compact by tilting it in this way in relation to other equipment in the device. There is no problem even if it is installed at an angle.

In addition, Fig. 1 and Fig. 7 show an example in which the laser beam is emitted vertically (11), but it is also possible to emit the laser beam in the horizontal direction. A practical example of beam horizontal irradiation is made small.

1, 3, and 6 to 81glJj show an embodiment in which a gate valve 7 is installed at a position surrounding the laser beam 2 emitted to the horn 11 target 5. Although the gate valve is not essential for the apparatus 1 of the present invention, it is advantageous in limiting the suction space of the vacuum suction system and maintaining the ultimate high vacuum, especially when performing laser processing in a high vacuum. , can often be used effectively.

When this gate valve is provided, a removable sputter attachment plate 1o can be attached using this gate valve as a support. The sputter deposition plate is made to deposit and resist spatter by colliding with the spatter scattered during laser processing, and is used for a certain period of time during laser processing to prevent spatter from being deposited in multiple places.
When it wears off, take it out and replace it with a clean one. It is also advantageous to attach the sputter deposition plate around the viscous material remover, as shown in FIGS. 6-8. As long as it does not obstruct the laser beam entrance path, a removable sputter attaching plate may be attached as appropriate near the transparent plate, increasing the chance of collision with spatter, capturing the spatter with this attached sign, and attaching it to the vacuum vessel. The purpose of this is to make the window glass green so that spatter does not reach it, and even if there is spatter that escapes M capture by the movable transparent plate, the transparent plate assists in completely eliminating the spatter. The object of the present invention can be achieved by trapping and removing the particles.

A metal plate is generally used as the sputter deposition plate.

Rust occurs 1. Any metal plate that does not melt or soften can be used without any particular restrictions, but in short, it is a tool for removing cloth, and metal plates such as impermeable steel or aluminum plates are usually used. The surface of the sputter-deposited plate on which sputter has been deposited can be cleaned from time to time by polishing or physical/chemical cleaning, and can be reused. The sputter-applied plate may be molded into various shapes such as flat, cylindrical, and negative, and the material, shape, radius, etc. may be determined as appropriate depending on the specifications of the laser processing device. In addition, a viscous substance is applied to the sputter attachment plate, and the spatter that has adhered to the viscous substance during laser processing is wiped clean after the laser processing is completed, and the viscous substance tube is reapplied and used repeatedly as a sputter attachment plate. It can also be used as jin.

The dimensions of each part of the laser processing device of the present invention include the processing target,
It should be determined as appropriate depending on the purpose of processing, etc., and the 19th set is not particularly applicable. For example, the distance from the point to the workpiece, the distance from the movable transparent plate-like body to the workpiece II! l
i, etc. should be selected depending on temperature conditions, vacuum conditions, etc., which vary depending on the purpose of processing.

For example, when processing an object with a laser at a temperature of about 400°C, a transparent plate made of Nofylenx glass (a registered trademark of Dow Corning, borosilicate glass) is used, and the laser processing If you plan to reuse it repeatedly, such as wiping off the viscous substance applied to the inner surface and applying the viscous substance again after cleaning, it is desirable to keep it about 60 fins away from the object to be processed). Conditions such as the distance from the laser source to the object to be processed and the processing temperature can be determined through trial and error through experiments. If you are performing laser processing at a relatively low temperature, you should choose one made of soda glass, or if you are processing at a relatively high temperature, you should choose one made of borosilicate glass as mentioned above. You should choose silica glass.

As previously mentioned, the movable transparent plate-like body may be used by being continuously rotated. By continuously rotating, the snow and ivy scattered during laser processing are subjected to centrifugal force due to rotation when colliding with this transparent plate-like body, and are not given a chance to deposit on the transparent plate-like body, but are blown away to the surroundings. This is because Therefore, when a transparent plate-like body is continuously rotated, a spatter attachment plate is attached around it to capture the spatter.
It is advantageous to slide the viscous liquid application/removal tool onto the transparent JJV-shaped body and rotate it while continuously applying and removing the viscous liquid.By doing this, it can last for a considerable period of time. , laser processing can be performed without replacing the transparent wire.

[Brief explanation of the drawing]

FIG. 1 is an explanatory W "Kurama" showing an embodiment of the present invention in which a 6-light 4-fy-shaped body capable of moving in a straight line is arranged, and FIG. 2 is a plan view showing the transparent plate-shaped body. FIG. 3 is an explanatory t4j + curve diagram showing an example of the present invention in which a rotatable transparent plate-like body is arranged, and FIGS. 4 and 5 show a transparent plate-like body that can be rotated. Plan view. Figure 6 is an explanatory cross-sectional view of an embodiment of the present invention in which a rotatable transparent plate-like body is provided with a tool for applying and removing a transparent viscous substance. Similarly, a rotatable feeding plate equipped with a tool for applying and removing a transparent viscous substance is placed at a certain angle from the N1 direction to the window glass through which the laser beam passes.
? FIG. 1 is an explanatory cross-sectional view showing one embodiment of the Δ1 invention O). 8th
The figure is Fig. 6, which shows an embodiment of the present invention in which the design has been changed so that the laser beam is irradiated in the horizontal direction. 101 view for bright light. 1... Laser source 2... Laser →
r-hime 3...Window glass 4...
Vacuum vessel wall 5... Processing target 6... Movable structure σ) Transparent plate-shaped body 7... Gate valve 8.
... Viscous substance 1 Residue removal tool 9 ... Waste viscous substance 10 ... Snow ξ / Signboard with ivy 11 ...
... Support rod 12 ... Roll 13 ... Rotating shaft patent applicant Taiyo Sanso Co., Ltd. 5

Claims (1)

[Scope of Claims] (1) A laser beam is irradiated from a laser source outside the vacuum container to the workpiece placed inside the vacuum container through a transparent body provided in the window of the vacuum container to heat, melt, cut, weld, etc. 1. A laser processing device characterized in that a movable transparent plate-like body is disposed in a vacuum container at a position intermediate between the window of the vacuum container and the object to be processed. (2. A laser processing device characterized in that a transparent plate-like body movable along a straight line in at least one direction is arranged as the transparent plate-like body in claim 1. A laser processing apparatus characterized in that a rotating transparent plate-like body is disposed as the transparent plate-like body in claim 1. (4) The transparent plate-like body in claim 1 is continuous during laser processing. A laser processing device characterized by arranging a transparent plate-like body that rotates around a target. (5) As the transparent plate-like body in claims 1 to 4, at least the processing of this transparent plate-like body A laser processing device characterized in that a transparent plate-like body is coated with a transparent viscous substance that can be easily removed after laser processing on a surface facing an object. (6) Claims 1 to 4 As the transparent plate-like body in Section 1, at least on the blood facing the processing object of this transparent plate-like body, a starting tool of a transparent viscous pipe that can be easily removed after laser processing is used for laser processing + ii +. The present invention is characterized in that a transparent plate-like body having such an applicator and a remover is disposed at a position where the transparent viscous substance remover can slide and apply and remove the viscous substance. (7) In the laser processing apparatus according to claims 1 to 6, the laser beam approach path is surrounded by a game I.
A laser processing apparatus characterized in that a valve is provided and a removable sputter attachment plate is attached to the gate valve. (8) In the laser processing apparatus according to claims 1 to 7, a removable sputter attachment plate is provided in the vicinity of the transparent plate-like body used in this apparatus, within a range that does not obstruct the laser beam entrance path. A laser processing device characterized by being attached.