JPS5991731U - ウエハ−収納容器固定用箱の起立装置 - Google Patents

ウエハ−収納容器固定用箱の起立装置

Info

Publication number
JPS5991731U
JPS5991731U JP18837782U JP18837782U JPS5991731U JP S5991731 U JPS5991731 U JP S5991731U JP 18837782 U JP18837782 U JP 18837782U JP 18837782 U JP18837782 U JP 18837782U JP S5991731 U JPS5991731 U JP S5991731U
Authority
JP
Japan
Prior art keywords
storage container
box
wafer storage
fixing box
container fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18837782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221004Y2 (enrdf_load_stackoverflow
Inventor
刈田 裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP18837782U priority Critical patent/JPS5991731U/ja
Publication of JPS5991731U publication Critical patent/JPS5991731U/ja
Application granted granted Critical
Publication of JPS6221004Y2 publication Critical patent/JPS6221004Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
JP18837782U 1982-12-13 1982-12-13 ウエハ−収納容器固定用箱の起立装置 Granted JPS5991731U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18837782U JPS5991731U (ja) 1982-12-13 1982-12-13 ウエハ−収納容器固定用箱の起立装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18837782U JPS5991731U (ja) 1982-12-13 1982-12-13 ウエハ−収納容器固定用箱の起立装置

Publications (2)

Publication Number Publication Date
JPS5991731U true JPS5991731U (ja) 1984-06-21
JPS6221004Y2 JPS6221004Y2 (enrdf_load_stackoverflow) 1987-05-28

Family

ID=30406400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18837782U Granted JPS5991731U (ja) 1982-12-13 1982-12-13 ウエハ−収納容器固定用箱の起立装置

Country Status (1)

Country Link
JP (1) JPS5991731U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138242U (enrdf_load_stackoverflow) * 1985-02-16 1986-08-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138242U (enrdf_load_stackoverflow) * 1985-02-16 1986-08-27

Also Published As

Publication number Publication date
JPS6221004Y2 (enrdf_load_stackoverflow) 1987-05-28

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