JPS5991645A - Electron beam address type optical bulb and method of producing same - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a light valve and a method of manufacturing the same, and more particularly to an electron beam addressed liquid crystal optical converter and a method of manufacturing the same.

Background Art and Problems There are many applications where it is desirable to modulate light to reproduce images based on information provided in the form of electrical signals.

Examples of these are video projection devices that project television images, computer-generated data, or graphics onto a screen.

Projection devices using interactive light valve technology can be classified into two categories as follows.

+1) The light modulator is coupled to an addressing device by a photoconductive element. (2) The light modulator is directly addressed, usually by an electron beam or laser. One of the first types is the IEBE Trans, Elec.
, ,Dev, Vol.

1! D-22, NO, 9, 1975, p. 775, J.
“PhoLoactiva” in the work of Greenberg et al.
ted BirefringentLiquid C
crystal Light Valve for
Co1or Symbology Display
J and Opt, fEng, 11o1.1? , N
o, 4. 1978, p. 371-, ``^pplication of Liquid'' in the work of BIeha et al.
Crystal Light Valve to
Real-Time Optical Data Pro
Liquid crystal light valves referred to in cesslng J. In the above device, an electric field is applied between the reflective liquid crystal cells by a photoconductive element whose negative side is excited by light irradiation. This modulates and reflects incident light from the other side. However, this type of device uses complex layered and optical structures, and in practical liquid crystal cells, the thickness, switching speed, and contrast ratio are unsatisfactory for certain applications.

The second example optical modulator is 10 SID Symposium
m DigesL.

Vol, lO, 1979, page 20, T. True, rR
ecenL^dvances (n illgh Br
lightness and old gh Re5olutio
nColor Light Valv@Project
Oil Mall that mentions or J! U.S. Patent No. 3,626,084 (issue date: 1971) for elements, walls, etc.
l-DeformographjcS (December 7, 2017)
Deformographic mirror element developed for storage Display TubeJ, first process
edfngs Vol, 19+No, 1. 1978, page 1 ■, 1'La5er A in the work of Dewey et al.
ddressed Liquid Crystal P
rojectionDisplaysJ and 5PIE,
Vol, 200. 1979 tn, g of H, Smith et al. 1-Ultra old gh Re5olut
ionGraphic Data Tera+1nal
The thermally addressable smectic liquid crystal light valve described in J.
Westinghouse 5cientific P
aper, 74-IG? -Mirro-PL (US
481), November 1974 R, l-mass etc. I The Mirror MatrixTube
, :＾Novel Light Valve for
ProjectionDisplaVSJ +＾ppH
ed Physics LetLers+νo1.26
゜No. 7. 1975, page 391, 6. Guldberg et al. 1゛^n AAllmlnu / 5102/
5llicon 'on 5aphire t,tg
htValve Matrlx for Project
tion DisplaysJ % and 11 SID
Digest, Vol. 11, 1980, p. 299, rDeformable by Bornbeck et al.
Mirror ProjectionDispla31
The mirror matrix element described in J and Proc, o
f the IBEB, vol, 6+ No, 7+
G, Marie and J, Donji Sun, I, 1973
Single Crystal Ferroelectr
ics and Their Application
+n LightValve Display De
This is the Pockels effect element mentioned in J. vices J.

]-The second type of device described has various drawbacks. Oil films, deformographic mirrors, thermal addressing, and matrix mirror elements all require Schlieren optics, which not only complicate the structure but also have low optical efficiency. Further, each of these elements and the Pockels effect element are C reflection type elements. Oil thin film devices that write images on oil thin films using electron beams require high maintenance costs and complicated structures due to the deterioration of the oil film and cathode caused by the electron beams. Deformographic, thermal address and matrix mira
- Both single elements are storage elements (and use a modulation medium with a limited switching speed, which limits their use for other applications. does not have a low-frequency spatial response and frequently fails due to the flexibility of the thin film.Thermally dressed devices have low sensitivity.The Pockels effect device, which modulates the ζ light written on a KDP crystal by an electron beam, , is complex and requires a cooling system,
Its resolution is limited by the dimensions of the crystal used.

Liquid crystals are well suited for image projection devices because of their selectively controlled light modulation properties. However, one limitation of its use for that purpose is the lack of a satisfactory addressing mechanism. As cathode ray tube (CRT) technology advances rapidly, it is preferable to directly address the liquid crystal cell with an electron beam. fact,
The reflective liquid crystal CRT television display device is Proc.
of the 181! E.

Vol, 56. No. 12. 1968 No. 2146
As explained by J. Panraarte on page. but,
In this case, since the electron beam is coupled to the liquid crystal cell by multiple metal pins, there are various problems including low resolution and crosstalk between the pins. In addition, electron beam scanning of the liquid crystal for information storage is based on IEEE! Tr
ans, ont! lee, Dev,, si o1. H
D-15. No. 11+ 1968 No. 896) ff
by J. Hansen and R. Schneebarb.
id Crystal Media for l1le
ctron Beam Recording J. However, since the device disclosed herein uses a cholesteric liquid crystal, the response time is slow, a commercial electric field is required for switching, and the sensitivity is low. Furthermore, the possibility of using liquid crystals for electron beam addressed direct-view storage displays was discovered in 1973 at 5103ymposium Digest.
1 on page 102 of Technical Papers. rBi-stab by Chan and W. Pennebaker
le Storage Tube Witb ACCo
nLrolledDisplay J.

However, none of the above-mentioned references satisfactorily project images that change at high speed, as in the case of television, without using complex optical systems.

It is not possible to provide a fast transmitting light modulation element. Accordingly, there was a need for the development of such devices.

OBJECTS OF THE INVENTION Accordingly, a principal object of the present invention is to provide a new and improved electron beam addressed liquid crystal bulb and method of manufacturing the same.

Another object of the invention is to provide a light valve in which light is modulated as it passes through the valve.

Yet another object of the present invention is to provide a light valve suitable for high speed write and refresh applications.

Another object of the present invention is to provide an image projection system using the light valve described above.

Still another object of the present invention is to provide a method for producing the above-mentioned optical pulp, which yields an isostatic liquid crystal cell.

These and other objects will be readily understood by those skilled in the art upon reading the following description, together with the structure and advantages, taken in conjunction with the accompanying drawings.

SUMMARY OF THE INVENTION The present invention overcomes the above-mentioned drawbacks of conventional devices used for image projection by modulating the transmitted light and providing a liquid crystal light valve that is directly addressable by scanning an electron beam as in the case of a CRT. The light valve of the present invention, which can overcome the above-mentioned needs, can project commercially variable images with a simple transmission optical system, and has better resolution, contrast and sensitivity, and is more reliable than conventional devices. It is also an object to provide a structure for a projection system using a CRT having a window through which light passes for modulation and then projecting onto a screen. The invention further provides a method of manufacturing such a light valve.

The light stained nematic (TN) liquid crystal cell of the present invention is manufactured by disposing a suitable liquid crystal in a sandwich-like manner between transparent electrodes and a transparent face plate having a transparent target plate. Here, the center of the cell becomes a window, and the light passing through it is modulated. A writing electron gun is used to direct a narrow electron beam to a selected area of the target plate, changing the target surface potential at that location.Furthermore, one or more radiation beams are used to provide a broad and focused beam to the target. A collector is placed near the periphery of the target plate to capture the secondary electrons from the target and the irradiated electrons repelled by the target. This collector potential is maintained at a voltage slightly lower than the first crossover voltage of the secondary electron emission characteristic curve of the target to enable writing and fast refresh of the target by the writing electron gun.Writing By placing the electron gun, irradiation electron gun, and collector outside the predetermined field of view of the liquid crystal cell window,
When light is transmitted to the target plate through the cell,
~To be able to modulate together.

A projection device can be constructed using a CRT having a writing electron gun, an illumination beam, a collector, and a liquid crystal cell.

The face plate of this liquid crystal cell serves as the face plate of a CRT. A light entrance window is provided at the rear of the CRT to transmit the incident light and output it through the liquid crystal cell. A polarizer is placed in front of the light entrance window and in front of the faceplate, and a liquid crystal cell is used to modulate the intensity of the light by changing the polarization of the light that passes through it. A lens system is used to guide light from a light source through a CRT and to project emerging light.

A light valve can be fabricated by hand that becomes an isostatic (balanced) liquid crystal cell. The face plate is 1
Indium oxide on the surface! Lead 1- is formed to serve as a transparent electrode and serves as the inlet and outlet of the face plate. The outlet connects to the collector chamber.

The target plate is placed on and attached to the periphery of the faceplate, with one peripheral spacer separating the target plate from the electrode. The space around and within the cell is evacuated, and then completely degassed liquid crystal is forced in through the inlet until the cell is completely filled, at which point the population is sealed.

Then increase the pressure on the outside of the target plate to remove the target
is substantially parallel to the faceplate to seal the outlet. Nematic liquid crystals with birefringence, low dielectric anisotropy, and low viscosity at room temperature have been found to be particularly suitable.

Embodiment First, referring to FIG. 1, an electron beam addressed type liquid crystal light valve is constructed by directing a narrow electron beam to a liquid crystal cell (LL) having a front surface (12) and a rear surface (14).
) to a selected position and change the potential at that point; and an irradiation gun (18) with one or more shots that guides electrons broadly and unfocused over the entire back surface (14) of the liquid crystal cell aψ. ) and a collector electrode (20) disposed near the periphery of the back surface (14) of the liquid crystal cell panel to collect secondary electrons emitted from the cell back surface (14) and repelled irradiation electrons. The write electron gun (16), the irradiation gun (18), and the collector electrode (20) are housed at least partially in a substantially evacuated space along the back surface (14) of the liquid crystal cell frame, and are further arranged along the dashed line of the liquid crystal cell Qfl. It is arranged outside the predetermined visual field window indicated by (22). As a result, the light is transmitted into the liquid crystal cell Ql without any hindrance and is modulated.As a result, the light enters the cell window from the back surface (14) of the cell αφ and exits from the front surface (12).

The liquid crystal cell (II itself) has a transparent face plate 1 (24), preferably made of glass, which forms the front surface (12) of the liquid crystal cell aψ. The transparent electrode (26) is preferably formed by depositing a thin film of indium tin oxide (ITO) on the surface (28) using conventional techniques. In addition, a transparent electrode (26) is attached to the target plate (30) of the heavy body on the face plate.
The back or outer surface of the target plate (30) becomes the back surface (14) of the liquid crystal cell frame. Here, the constant intervals are determined by spacers (32). The gap between the transparent face plate electrode (26) and the target plate (30) is not filled with nematic liquid crystal (34). The liquid crystal (34) is prevented from leaking by covering the outer periphery of the cell (35) with a sealant (35) of epoxy compound or other suitable material. Electrode (26) and target plate (3
Both surfaces of 0) are in contact with the liquid crystal (34), and are subjected to appropriate treatment to form a "C-parallel (uniform) boundary alignment. In a nematic liquid crystal, the alignment on both sides is at right angles, resulting in a 90° twist. This surface array can be formed by conventional methods of vacuum depositing a transparent thin film, preferably silicon monoxide (Sin), at an angle of about 5° to the surface.

It has been found that float glass is preferable as the face plate (24), and as the target plate, a thin layer of transparent galvanic material such as mica, polyimide or glass is preferable, but other materials may also be used. The material of the target & (30) must be selected or treated so that the secondary electron emission ratio (δ) is 1 or more, preferably sufficiently larger than l, when bombarded by the writing electron beam. be. Spacer (32) Ll, polyester commercially available as Mylar, a trademark of Dupont 1.
Preferably, it is formed by film or glass lift.

In the assembled cell Ql, the molecules of the nematic liquid crystal (34) are such that plane-polarized light passing through the cell is rotated by 90° in the absence of an external electric field. Liquid crystal (3
Applying a voltage between regions of 4) aligns the molecular axes of the liquid crystal molecules in that region parallel to the electric field, reducing the angle of polarized light passing through that region of the cell. The liquid crystal (34) thus modulates the light by shifting its polarization. If enough voltage is applied, the polarized light passing through this switched cell region remains unchanged.

C is a commercially available nematic liquid crystal suitable for cell Ql, and E
, Merck's Ne+watlc Phase 113
2TNC, (mixture of phenyl cyclohexane single compound 3 and biphenyl cyclohexane single substance 1) and BD
HChe+w! cal E7 (4-cyano-4'-n-
pentabiphenyl, 4-cyano-4/J, -benthyl-p-terphenyl, eutectic mixture of 4-cyano-4'-n-heptyl-biphenyl and 4-cyano-4'-n-octoxyvininyl) be. Ideally, nematic liquid crystals should have crystalline birefringence (ie Δn > 0.15), low dielectric anisotropy, and low viscosity at room temperature.

Materials with such properties are preferred because they minimize the write beam current required to switch cells at the speeds required for standard black and white television display.

The four liquid crystal bodies having such a combination of physical and electrical properties are the liquid crystal bodies (
Inventors: Rohart, Hubbard and Jason C. Ryan). for example,
Δn〉0-16+ E // <13+ 6.1 <
A preferred nematic liquid crystal with a viscosity of <40 at 6 and 20'C is [15
There is a mixture of E, Merck's 81103 eutectic mixture and E, Merck's 51544 with a weight ratio of 20%.

The write gun (16) can be fabricated in a variety of ways suitable for CRTs and is well known in the display art and will not be described in detail. Similarly, the irradiation gun (18) can also take on a variety of configurations and is well known in the convex CRT display art and will not be described further.

The collector structure of the light valve is of particular importance since its main purpose is to collect the irradiated electrons or secondary emitted electrons from the back surface (14) of the galvanic target (30). . It also simultaneously allows light to be transmitted unhindered through the liquid crystal cell O1 and places a potential image on the target plate (30) (14). As shown in Figure 1, the central axis of the collector is the face plate (2
It is preferable to form a conductive ring (2o) extending from 4) and disposed around the liquid crystal cell Ql. The target 4N (30) in the cell frame is annular. This places the collector electrode (2o) outside the field of view of the cell window represented by the dashed line (22) and makes the electric field associated with the collector (2o) around the cell ul sufficiently uniform.

To explain the operation, the back surface (14) of the target plate (30)
) is normally maintained at the same potential Vfg as the cathode of irradiation (18). The reason is that the irradiation gun is constantly
This is to irradiate the back surface (14) of 30) with an electron cloud. A region on the back side having the same potential as Vfg repels the irradiation gun electrons. However, a region having a positive potential with respect to Vfg attracts irradiated electrons, and excess free electrons are sewn to the collector (20) so that the region reaches vrg. Target board (3
0) acts as a capacitor in the same way as the liquid crystal (24), so that its polarization switching effect depends on the voltage across a particular region of the liquid crystal Vfg, the potential Vfp of the transparent faceplate electrode (26) and the liquid crystal in that region. It is a function of the capacitance of the target plate (30) relative to the capacitance of the body. Typically, the irradiation gun cathode is electrically connected to a transparent electrode (26), which is usually connected to the transparent mold 81 (26) and the target (30) (7) with a backbone of 1 kl (
14) is at the same potential Vfg and maintains the liquid crystal (34) in an unswitched, unbiased state. However, it may be desired to bias the cell aψ, in which case there is no interconnection between the gun cathode and the electrode (26).

The cathode of the writing electron gun (16) operates at a very high negative potential Vwg with respect to the cathode potential Vfg of the irradiation gun (18), the typical value of this potential being approximately 4.5 kV °ζ, so that the writing beam reaches the target. When the back surface is impacted, more secondary electrons than the incident beam are emitted (see the secondary electron emission characteristic curve in Figure 2). Therefore, the target region where the electron beam from the writing electron gun (16) reaches 4k'' becomes a positive potential and is capacitively coupled to the corresponding region of the liquid crystal, thereby switching that region.

Since the target plate material is dielectric, a collector must be placed in its vicinity to provide a return path for the writing and firing guns. In order to perform this function, the collector must be positive with respect to the cathodes of the write and emit guns. However, instead of stabilizing the region bombarded by the blind electron gun to the collector potential Veal, the irradiation gun (1
In order to return to vfg by the action of 8), the collector potential is set to the first crossover voltage Vcrl of (30).
In other words, it must be lower than the lowest potential corresponding to the electron energy at which the secondary electron emission ratio δ is 1. This results in
It can be used for high speed write and refresh operations rather than as an optical pulp storage device.

Next, referring to FIG. 3, when the region of the back surface (14) of the target (30) is bombarded with the beam of the write electron gun (16), the potential of that region increases toward the collector potential Vcol, but It will never exceed this. Since the collector potential is less than Vcr1, more irradiated electrons are absorbed than emitted, and after stopping the write electron gun current in that region, it is returned to Vfg again.

In this way, the 'ζ potential image is written on the target by the writing electron gun, then erased by the irradiation gun (1 day), and further rewritten by the writing electron gun (16) if necessary. This image is capacitively coupled to the liquid crystal and modulates the light passing through it accordingly.

The above-mentioned nematic liquid crystals were arranged in a cell at intervals of 10-7 m (for practical use, 0.6 x 10"
Projection of a black and white television image with a wavelength of m was obtained with sufficient satisfaction. 14.7x 10” A and 4.4 mil (0,
Using a writing electron beam current with a width of 11 wn) and a mica target, the following results were obtained.

Display switching speed: 25rs Contrast ratio: 59:1 Resolution: 8.9 lines/11 side Writing speed: 164 cm+/w+a then 4th
Referring to the figure, the projection device using the light valve according to the invention further comprises an exhaust chamber (36) having a writing electron gun (16), an illumination gun (18) and a collector electrode (20);
Liquid crystal cell [1 (l is the front side of this chamber (36) and the back side (14
) is installed facing inward.

An entrance window (38) with a transparent material covering the aperture is preferably located at the rear of the chamber (36), and the writing electron gun (16) is moved off the central axis so as not to obstruct the field of view of the °C entrance window (38). None, the liquid crystal cell Ql can be seen from the window (38). 1st
A polarizer (40) is placed after the entrance window to polarize the light incident thereon. Additionally, a second polarizer or analyzer (42) is placed in front of the cell Ql to block all C light from passing through, but light of the selected polarity to pass through without undergoing any change in intensity. The polarizer (40) and analyzer (42) may be made from commercially available polarizing sheets.

The intensity of light passing through the analyzer (42) from a particular region of the liquid crystal cell 01 depends on the extent to which that region is switched on by the write electron gun (16). This is because the intensity of light passing through the analyzer (42) is a function of the relative polarization of the analyzer (42) and the light incident thereon. As a result, the polarization modulation by the twisted nematic liquid crystal cell is converted into intensity by the polarizer (40) and analyzer (42). The polarization direction of the analyzer (42) is
), the image brightness obtained according to the beam intensity of the writing electron gun increases, but if the polarization direction of the analyzer (4
The polarization direction of 2) is 90 degrees with respect to the polarization direction of the polarizer (40).
If the angle is set at .degree., the image brightness will decrease depending on the beam intensity of the writing electron gun.

Use the lens (44) to input light from a light source such as a lamp (46)! 5 (3B) and the window of the liquid crystal cell aψ. Using another lens (48), the image formed by the liquid crystal cell Ql was focused onto an observation screen, such as the surface of the screen (50), and was written onto the screen (50) and applied to the electron gun (16). Projects images represented by electrical signals. Although the lenses (44) and (48) are shown here as a simple optical system, a more complex optical system may be used depending on the specific use of the optical pulp.

It has been found that an example of the structure of a suitable optical pulp is as shown in FIG. 5. The method for manufacturing the float glass or other transparent face plate (52) is to first form an indium tin oxide (ITO) layer on one surface using conventional techniques to form a transparent electrode (54), and then to form a transparent electrode (54) (not shown). Also ITO electrode (
A thin transparent alignment film of silicon monoxide is formed on the surface of 54). This alignment film has static pi, P
hys, Left.

Vol. 21. No. 4 Silicon monoxide may be deposited by storm vapor deposition at an angle of 5 from the plate surface to form 'ζ' or 'ζ' using a conventional process as described in J. Janning, p. 173, 1972. An artificial aperture (56) and an exit aperture (58) are formed in the faceplate. Person exit pipe (60) and (
62) is connected to each opening of the face plate (52) and sealed tightly.゛Glass vacuum ampoule or chamber (64
) to the other end of the outlet tube (62). In this configuration, the faceplate is horizontal and the target plate (66) is placed on the transparent ITO electrode (54) and rests on the outer peripheral spacer (68), and the periphery is covered with an epoxy compound or other suitable encapsulant. (70) makes the face plate (52
) is fixed. The target plate (66) has a transparent silicon oxide alignment film on its inner surface and is oriented at a 90° angle with respect to the alignment film on the electrode (54).

Thereafter, the space between the target plate (66) and the transparent electrode (54) is filled with liquid crystal. This first includes a face plate (52), a target plate (66), and an artificial tube (6).
0), evacuate the area around and inside the outlet tube (62) and ampoule (64). Next, place the free end of the artificial tube (60) into the completely degassed liquid crystal material, increase the pressure of the liquid crystal material, and insert it into the cell through the inlet tube (60). It fills the gap between the plates (66) and passes through the outlet tube (62) into the 'ζ ampoule (64). Face plate (52) and target plate (6
6) Once the gap between them is completely filled, the inlet tube (60) is cut out at the desired point (72) using conventional techniques. Target board (6
6) to increase the pressure on the outer surface of the target plate (66) so that it rests properly on the outer circumferential spacer (68) and is substantially parallel to the faceplate. Subsequently, the outlet pipe (62) is cut off at an appropriate position (74) to seal the liquid crystal inside the cell. Using a completely degassed liquid crystal and carrying out the process described above, isostatic (equilibrium)
A liquid crystal cell is made, and the structure is stabilized with CC uniform plate separation in high vacuum.

A suitable jig (76) for filling the cell with liquid crystal is shown in FIG. Thread the artificial tube (60) onto the top (77) of the jig with the cap (7B), washer (80) and elastic
It is attached in a sealed manner with a ring (82), and the artificial tube extends in the C1 direction through an upper chamber (84) and an upper chamber (86) at the top of the jig.

Once the cell and surrounding space are evacuated, the liquid crystal (92
The lower part (88) of the jig holding the container (90) of Covering the boat (94) installed in the
) is provided for pressure sealing and inserts the inlet tube (60) into the liquid crystal body (92). Increasing the pressure of the liquid crystal (92) introduces gas into the upper chamber (84) through the inlet boat (100), causing the liquid crystal to enter the inlet tube (60). Preferably, this gas is an inert gas and has low solubility in the liquid crystal (92). Therefore, argon is most suitable, but other gases may also be used.

Initial evacuation of the cell and surrounding space is performed by placing the assembly into the Pelger 2 and evacuating it. Once the cell is filled with liquid crystal, the pressure within the Pelger is increased and the pressure on the outer surface of the target plate (66) is increased as previously described.

Once the liquid crystal cell has been constructed, it is assembled with a suitable structure having write and illumination channels and collector electrodes, but is mounted and operated with a valve in a vacuum, such as in a CRT.

Alternatively, if the cell is used as a CR'I' faceplate, it is attached to the funnel (102) of the CRT before being placed in the Pelger. In this case, the pressure outside the target plate (66) can be increased by increasing the pressure within the CRT, preferably with an inert gas such as argon. The CRT is heat treated using conventional techniques to remove gases, particularly water vapor, prior to sealing. The cell is attached to the Soarnel (102) by epoxy, but other conventional adhesive means can also be used at °C, where the epoxy can withstand the short-term crystallization temperatures (e.g. on the order of 300 °C) required for CRT heat treatment. It should be selected from commercially available products.

The TN liquid crystal cell used in the light valve of the present invention is not limited to the above-mentioned cell. Other TNs that may be available
As a liquid crystal, 1888 Trans, t! lec.

Dev,, Vol, HD-28Jo, 6+ 1981
1-O by R. Hubbard and Tori, Voss, p. 723.
ptlcal-Bounce Re+++ovalan
d Turnoff-Time Reduction
n in THisted-New+atic11
There are flow assisted (flos4-assisted) cells as described in isplaysJ. In addition, others that may be used include the 4th LCD and order held in Las Vegas, Nevada, April 1, 1982;
Paper by R. Hubbard et al. submitted to the Symposium on Liquids 1-Development of Dual-F
requencyAddressableLiqui
This is a dual-frequency addressable 1'N cell made using the liquid crystal described in dCrystals J.

It should be noted here that the terms used in this specification are merely for the purpose of explaining the present invention, and are not intended to limit the invention in any way, and are not intended to exclude the use of the same or similar products. .

Effects of the Invention The present invention makes it possible to project crystal speed images such as black and white television images onto a screen by using a specific TN liquid crystal cell and both conventional CRT techniques.

Therefore, the advanced technology used in conventional storage type CRTs can be used as is, and high-speed images can be projected onto a surfaceless screen with sufficient brightness and contrast.

According to the light valve of the present invention, the resolution is not affected by the matrix electron beams or pins of the liquid crystal cell, but is determined by the evening electron beam spot size, etc., so that a "ζh resolution" can be achieved.Furthermore, by the manufacturing method of the present invention By controlling the pressure difference between the outside and the inside due to the CRT structure, a liquid crystal cell with uniform thickness and crystal quality can be easily manufactured.

[Brief explanation of the drawing]

11th! ! ! 1 is a simplified side view showing the principle of the light valve according to the present invention, FIG. 2 is a secondary electron emission ratio characteristic curve of the target used in the light valve of FIG. 1, and FIG. 3 is a graph showing the write electron gun current and the target FIG. 4 is a schematic side view of the projection device according to the present invention, and FIG. 5 is a diagram for explaining the manufacturing method of the light valve according to the present invention. (II is a liquid crystal cell, (16) is a writing electron gun, (18)
is an irradiation gun, (24) and (52) are transparent support plates (face plates), (26) and (54) are transparent electrodes, and (30). (66) is a target plate, (32) and (6B) are spacers, (34) and (92) are liquid crystal bodies, (56)
), (5B) is the population and exit.

Claims (1)

[Scope of Claims] 1. A liquid crystal cell in which a liquid crystal is filled between a transparent insulator target and a transparent support plate covered with a transparent electrode, and a writing electron gun for forming a potential image on the target of the liquid crystal cell. ,
and an irradiation gun that emits a substantially uniform electron beam to the target of the liquid crystal cell. 2. When manufacturing a liquid crystal cell for an electron beam addressed light valve, a transparent electrode is formed on the inner surface of a transparent insulating face plate, an exit for liquid crystal injection is formed on the outside of the face plate, and the transparent electrode of the face plate is formed. A transparent insulating target plate is airtightly disposed on the side with a spacer interposed therebetween, and the pressure difference between the outside of the target plate and the target plate and the tllr4 of the face plate is controlled, and the target plate L-& is attached to the face plate. A method of manufacturing an electron beam addressed type light valve, which is formed by filling the gap with the liquid crystal material in a substantially parallel manner and then closing the exit port.