JPS5986955U - 研磨装置 - Google Patents

研磨装置

Info

Publication number
JPS5986955U
JPS5986955U JP16803383U JP16803383U JPS5986955U JP S5986955 U JPS5986955 U JP S5986955U JP 16803383 U JP16803383 U JP 16803383U JP 16803383 U JP16803383 U JP 16803383U JP S5986955 U JPS5986955 U JP S5986955U
Authority
JP
Japan
Prior art keywords
polishing
shaft
tank
transmission mechanism
rotation transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16803383U
Other languages
English (en)
Other versions
JPS6040303Y2 (ja
Inventor
大野　家建
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1983168033U priority Critical patent/JPS6040303Y2/ja
Publication of JPS5986955U publication Critical patent/JPS5986955U/ja
Application granted granted Critical
Publication of JPS6040303Y2 publication Critical patent/JPS6040303Y2/ja
Expired legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
図面は本考案研磨装置の実施例を示すもので、　　　　
　′第１図は第一の実施例を示す断面図、第２図は同要
部の拡大平面図、第３図は第二の実施例を示縦断面図ミ
第４図は第三の実施例を示す縦断面図、第５図は同要部
平面図、第６図は第四の実施例を示す縦断面図である。 １・・・研磨槽、２・・・弾性マウント、３・・・架台
、４・・・ベース、５ａ、　　５ｂ・・・シャフト、６
ａ、　　６ｂ・・・アンバランスウェイト、７．１１・
・・ｆｉＡ車、１０・・・カップリング、１２．１３・
・・ベルトまたはプーリー、１４・・・フレキシブルジ
ヨイント。

Claims (2)

    【実用新案登録請求の範囲】
  1. （１）環状の研磨槽を振動せしめ、研磨槽内の被研摩磨
    物及び研磨材を振動、摺動及び流動して研磨する研磨装
    置に於いて研磨検測に設けられ、シャフトにアンバラン
    スウェイトを軸着して成る発振装置を１個又は複数個配
    設すると共に、該発振装置を研磨槽外の非振動部に設け
    たモータと回動伝達機構を介して連結して成る振動研磨
    装置。
  2. （２）　　前記回動伝達機構がベルト又はチェ７等の無
    ・端連続体か或はフレキシブルジヨイント等のフレキシ
    ブルな連結軸から成る実用新案登録請求の範囲第１項記
    載の研磨装置。
JP1983168033U 1983-10-30 1983-10-30 研磨装置 Expired JPS6040303Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983168033U JPS6040303Y2 (ja) 1983-10-30 1983-10-30 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983168033U JPS6040303Y2 (ja) 1983-10-30 1983-10-30 研磨装置

Publications (2)

Publication Number Publication Date
JPS5986955U true JPS5986955U (ja) 1984-06-12
JPS6040303Y2 JPS6040303Y2 (ja) 1985-12-04

Family

ID=30367461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983168033U Expired JPS6040303Y2 (ja) 1983-10-30 1983-10-30 研磨装置

Country Status (1)

Country Link
JP (1) JPS6040303Y2 (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873873A (ja) * 1971-12-30 1973-10-05
JPS5217599U (ja) * 1975-07-25 1977-02-07
JPS53141995A (en) * 1977-05-14 1978-12-11 Walther Carl Kurt Vibration poltshing box
JPS5412795U (ja) * 1977-06-27 1979-01-27
JPS5421017U (ja) * 1977-07-12 1979-02-10
JPS5535908A (en) * 1978-09-04 1980-03-13 Yamada Kikai Kogyo Kk Power transmission that connect each vibromotive body of vibration table device and vibromotive tuning device
JPS5547043A (en) * 1978-09-30 1980-04-02 Minoru Kuroda Vibrator driving mechanism

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217599B2 (ja) * 1972-11-29 1977-05-17
JPS5421017B2 (ja) * 1974-04-22 1979-07-27

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4873873A (ja) * 1971-12-30 1973-10-05
JPS5217599U (ja) * 1975-07-25 1977-02-07
JPS53141995A (en) * 1977-05-14 1978-12-11 Walther Carl Kurt Vibration poltshing box
JPS5412795U (ja) * 1977-06-27 1979-01-27
JPS5421017U (ja) * 1977-07-12 1979-02-10
JPS5535908A (en) * 1978-09-04 1980-03-13 Yamada Kikai Kogyo Kk Power transmission that connect each vibromotive body of vibration table device and vibromotive tuning device
JPS5547043A (en) * 1978-09-30 1980-04-02 Minoru Kuroda Vibrator driving mechanism

Also Published As

Publication number Publication date
JPS6040303Y2 (ja) 1985-12-04

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