JPS5984533A - Feeding mechanism of wire - Google Patents
Feeding mechanism of wireInfo
- Publication number
- JPS5984533A JPS5984533A JP57194715A JP19471582A JPS5984533A JP S5984533 A JPS5984533 A JP S5984533A JP 57194715 A JP57194715 A JP 57194715A JP 19471582 A JP19471582 A JP 19471582A JP S5984533 A JPS5984533 A JP S5984533A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- spool
- back tension
- bonding
- loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はワイヤ供給機構、特に、半導体組立過程でワイ
ヤボンディング用のワイヤを供給するためのワイヤ供給
機構に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a wire supply mechanism, and more particularly to a wire supply mechanism for supplying wire for wire bonding in a semiconductor assembly process.
従来、この種のワイヤ供給機構としては、金線の如きワ
イヤの供給を第1図に示すような機構によシ行なってい
る。このワイヤ供給機構では、ワイヤ1はスプール2に
巻かれておシ、ワイヤ1をスプール2から巻き出した後
、クランパ3を経てキャピラリ4に供給してワイヤボン
ディングを行なう。その場合、ワイヤ1がワイヤ接触板
5と接触することによシスプール駆動モータ6でスプー
ル2を駆動し、スプール2からのワイヤ10巻出し、供
給を行なっている。Conventionally, as a wire supply mechanism of this type, a mechanism as shown in FIG. 1 has been used to supply a wire such as a gold wire. In this wire supply mechanism, the wire 1 is wound around a spool 2, and after the wire 1 is unwound from the spool 2, it is supplied to a capillary 4 via a clamper 3 to perform wire bonding. In this case, when the wire 1 comes into contact with the wire contact plate 5, the spool drive motor 6 drives the spool 2, and the wire 10 is unwound and supplied from the spool 2.
ところが、この従来機構においては、ワイヤ1の供給時
にスプール2自体がバックテンシBン状態となシ、ワイ
ヤ1がスプール2から円滑に供給されないことがある。However, in this conventional mechanism, the spool 2 itself is not in a back tension state when the wire 1 is being supplied, and the wire 1 may not be smoothly supplied from the spool 2.
その結果、ワイヤボンディング後のワイヤループ高さが
不均一となシ、たとえばワイヤルーズの低いものが発生
すると、ワイヤがベレット取付用のタブまたはペレット
の端縁部に接触してショートまたは半ショーF状態とな
る。いわゆるタブショート不良が生じ、信頼度の低下を
来たすという問題点がある。As a result, if the height of the wire loop after wire bonding is uneven, for example, if the wire is loose, the wire may come into contact with the pellet attachment tab or the edge of the pellet, resulting in a short or half-show F. state. There is a problem in that so-called tab short-circuit defects occur, resulting in a decrease in reliability.
本発明の目的は、前記した従来技術の問題点を解決し、
ワイヤループを均一に保ち、常に安定したワイヤボンデ
ィングを行なうことのできるワイヤ供給機構を提供する
ことにある。The purpose of the present invention is to solve the problems of the prior art described above,
It is an object of the present invention to provide a wire feeding mechanism capable of keeping wire loops uniform and always performing stable wire bonding.
以下、本発明を図面に示す一実施例にしたがって詳MK
説明する。Hereinafter, details of the MK according to an embodiment of the present invention shown in the drawings will be explained.
explain.
第2図は本発明によるワイヤ供給機構の一実施例を示す
概略的説明図であシ、第1図の従来例と対応する部分に
は同一符号が付されている。FIG. 2 is a schematic explanatory diagram showing an embodiment of the wire supply mechanism according to the present invention, and parts corresponding to those of the conventional example shown in FIG. 1 are given the same reference numerals.
この実施例において、スプール2とワイヤ接触板5との
間には、ワイヤ1をワイヤ接触板5の方向に引っ張るバ
ックテンション除去部材7が設けられている。このバッ
クテンシm>除去部材7はたとえばピアノ線の先端をル
ープ状とし、このループにワイヤ、lを挿通したものよ
F)4る。In this embodiment, a back tension removing member 7 is provided between the spool 2 and the wire contact plate 5 to pull the wire 1 in the direction of the wire contact plate 5. The back tension m>removal member 7 is made of, for example, a piece of piano wire with a looped tip and a wire 1 inserted into the loop.
本実施例では、パックテンシジン除去部材7の働きによ
シ、スプール2がバックテン・イ冒ン状態になることが
排除され、ワイヤ1がキャビ2す4からペレットのポン
ディングパッドまたはリードフレーム等の導電部(図示
せず)にボンディングされる度に、ワイヤ1がワイヤ接
触板5に接触する。それにより、スプール駆動モータ6
が作動し、スプール2をワイヤ巻出し方向に駆動するの
で、ワイヤ1は1ワイヤずつ常に円滑に供給される。In this embodiment, the action of the pack tensidin removal member 7 prevents the spool 2 from becoming exposed to the back ten, and the wire 1 is removed from the cavity 24 to the pellet's pounding pad or lead frame. Each time the wire 1 is bonded to a conductive part (not shown) such as the wire 1, the wire 1 contacts the wire contact plate 5. Thereby, the spool drive motor 6
operates and drives the spool 2 in the wire unwinding direction, so that the wire 1 is always smoothly supplied one wire at a time.
したがって、本実施例におけるワイヤ1のループは均一
となシ、ワイヤルーズ高さを自由自在にコントロールで
きるので、ワイヤボンダのボンディング速度がワイヤあ
た。90.4秒以下のような高速度となっても、常に確
実なワイヤ供給を行ない。Therefore, the loop of the wire 1 in this embodiment is uniform, and the wire loose height can be freely controlled, so that the bonding speed of the wire bonder can be adjusted to match the wire contact. Even at high speeds such as 90.4 seconds or less, wire is always supplied reliably.
信頼度の高いワイヤボンディングを得ることができる。Highly reliable wire bonding can be obtained.
その結果、半導体製品の品質、信頼度が向上し、またワ
イヤルーズの均一化によシワイヤ使用量が安定する。As a result, the quality and reliability of semiconductor products are improved, and the amount of shear wire used is stabilized by making loose wires more uniform.
なお、本発明は前記実施例に限定されるものではなく、
たとえばパックテンション除去部材7はピアノ線を利用
したもの以外にも様々な構造のものを用いることができ
、スプール20バツクテンシヨンを除去できる構造であ
れば、どのようなものでもよい。Note that the present invention is not limited to the above embodiments,
For example, the pack tension removing member 7 may have various structures other than one using piano wire, and may have any structure as long as it can remove the back tension of the spool 20.
以上説明したように、本発明によれば、スプールのバッ
クテンションを除去し、ワイヤルーズを均一化でき、ワ
イヤループ高さを自由自在にコントロールできるので、
常に安定したワイヤボンディングを確実に行なうことが
でき、いわゆるタプシロート不良等を防止することがで
きる。As explained above, according to the present invention, the back tension of the spool can be removed, the wire looseness can be made uniform, and the wire loop height can be freely controlled.
Stable wire bonding can always be performed reliably, and so-called tapsi rot defects and the like can be prevented.
第1図は従来のワイヤ供給機構の一例を示す概略的説明
図、
第2図は本発明によるワイヤ供給機構の一実施例を示す
概略的説明図である。
1・・・ワイ°ヤ、2・・・スプール、3・・・クラン
ハ、4゛°キャピラリ、5・・・ワイヤ接触板、6・・
・スプール駆動モータ、7・・・パックテンション除去
部材。
第 1 図
第 2 図FIG. 1 is a schematic explanatory diagram showing an example of a conventional wire supply mechanism, and FIG. 2 is a schematic explanatory diagram showing an embodiment of the wire supply mechanism according to the present invention. 1...Wire, 2...Spool, 3...Cruncher, 4゛°capillary, 5...Wire contact plate, 6...
- Spool drive motor, 7... pack tension removal member. Figure 1 Figure 2
Claims (1)
出されたワイヤと接触可能なワイヤ接触部材と、ワイヤ
が前記ワイヤ接触部材に接触した時に前記スプールを駆
動して前記スプールからワイヤを所定量だけ巻き出させ
るスプール駆動手段とを有するワイヤ供給機構において
、スプールとワイヤ接触部材との間に、該スプールのパ
ックテンションを除去するパックテンション除去手段を
設けたことを特徴とするワイヤ供給機構。 26 パックテンション除去手段が、ワイヤをワイヤ
接触部材の方向に変位させるよう該ワイヤに応力を加え
ることを特徴とする特許請求の範囲第1項記載のワイヤ
供給機構。[Claims] 1. A spool wound with a wire, a wire contact member capable of contacting the wire unwound from the spool, and a wire contact member that drives the spool when the wire comes into contact with the wire contact member. A wire supply mechanism having a spool driving means for unwinding a predetermined amount of wire from the wire, characterized in that a pack tension removing means for removing pack tension of the spool is provided between the spool and the wire contact member. Wire feeding mechanism. 26. The wire feeding mechanism of claim 1, wherein the puck tension removal means applies stress to the wire to displace the wire in the direction of the wire contacting member.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57194715A JPS5984533A (en) | 1982-11-08 | 1982-11-08 | Feeding mechanism of wire |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57194715A JPS5984533A (en) | 1982-11-08 | 1982-11-08 | Feeding mechanism of wire |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5984533A true JPS5984533A (en) | 1984-05-16 |
Family
ID=16329038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57194715A Pending JPS5984533A (en) | 1982-11-08 | 1982-11-08 | Feeding mechanism of wire |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5984533A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511068A (en) * | 1974-06-24 | 1976-01-07 | Hitachi Ltd | Bondeinguwaiyano annaisochi |
JPS58151038A (en) * | 1982-03-02 | 1983-09-08 | Mitsubishi Electric Corp | Wire bonding apparatus |
-
1982
- 1982-11-08 JP JP57194715A patent/JPS5984533A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS511068A (en) * | 1974-06-24 | 1976-01-07 | Hitachi Ltd | Bondeinguwaiyano annaisochi |
JPS58151038A (en) * | 1982-03-02 | 1983-09-08 | Mitsubishi Electric Corp | Wire bonding apparatus |
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