JPS5984292U - Power supply for turbo molecular pump - Google Patents
Power supply for turbo molecular pumpInfo
- Publication number
- JPS5984292U JPS5984292U JP17973482U JP17973482U JPS5984292U JP S5984292 U JPS5984292 U JP S5984292U JP 17973482 U JP17973482 U JP 17973482U JP 17973482 U JP17973482 U JP 17973482U JP S5984292 U JPS5984292 U JP S5984292U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- turbo molecular
- molecular pump
- supplied
- alternating current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Ac Motors In General (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案に係るターボ分子ポンプ用パワーサプラ
イを示す概略図。第２図及び第３図は本考案に係るター
ボ分子ポンプ用パワーサプライを使用した実施例を示す
概略図。
２・・・コンバータ、８・・・バッチＩＪ−１１０・・
・ターボ分子ポンプ。FIG. 1 is a schematic diagram showing a power supply for a turbomolecular pump according to the present invention. 2 and 3 are schematic diagrams showing an embodiment using the power supply for a turbomolecular pump according to the present invention. 2...Converter, 8...Batch IJ-110...
・Turbo molecular pump.
Claims (1)
変換制御を行なうのに使用されるパワーサプライに於い
て、−次側３にバッテリー８を接続可能に構成し、且つ
該接続するバッテリー８より供給される直流電流を交流
電流に変換すべくコンバータ２を設けて、該コンバータ
２によって変換された交流電流を周波数変換しそ二次側
１５よりターボ分子ポンプ１０へ供給可能に構成してな
ることを特徴とするターボ分子ポンプ用パワーサ −プ
ライ。In the power supply used to perform frequency conversion control of alternating current supplied to the turbo molecular pump 10, a battery 8 can be connected to the negative side 3, and the power supply is supplied from the connected battery 8. A converter 2 is provided to convert a direct current to an alternating current, and the alternating current converted by the converter 2 is frequency-converted and can be supplied from the secondary side 15 to the turbo molecular pump 10. Power supply for turbo molecular pumps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17973482U JPS5984292U (en) | 1982-11-27 | 1982-11-27 | Power supply for turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17973482U JPS5984292U (en) | 1982-11-27 | 1982-11-27 | Power supply for turbo molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5984292U true JPS5984292U (en) | 1984-06-07 |
Family
ID=30389894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17973482U Pending JPS5984292U (en) | 1982-11-27 | 1982-11-27 | Power supply for turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5984292U (en) |
-
1982
- 1982-11-27 JP JP17973482U patent/JPS5984292U/en active Pending
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