JPS5982952U - Sample cooling device - Google Patents
Sample cooling deviceInfo
- Publication number
- JPS5982952U JPS5982952U JP17953382U JP17953382U JPS5982952U JP S5982952 U JPS5982952 U JP S5982952U JP 17953382 U JP17953382 U JP 17953382U JP 17953382 U JP17953382 U JP 17953382U JP S5982952 U JPS5982952 U JP S5982952U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- sample
- supply pipe
- cooling device
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の試料冷却装置を示す断面図、第一2図は
本考案の試料冷却装置の実施例を示す断面図である。
1・・・試料冷却装置、2・・・真空室、4・・・試料
、7・・・冷却容器、8・・・供給管、9・・・冷却管
、10・・・開閉弁。FIG. 1 is a sectional view showing a conventional sample cooling device, and FIG. 12 is a sectional view showing an embodiment of the sample cooling device of the present invention. DESCRIPTION OF SYMBOLS 1... Sample cooling device, 2... Vacuum chamber, 4... Sample, 7... Cooling container, 8... Supply pipe, 9... Cooling pipe, 10... Opening/closing valve.
Claims (1)
の冷却容器には冷却液供給用の供給管と前記試料の冷却
用の冷却管とのそれぞれの一端部が接続され、この供給
管と冷却管のそれぞれの他端部は前記真空室外に開設さ
れ、前記供給管の中間部にはこの供給管を開閉する開閉
弁が設けられていることを特徴とする試料冷却装置。A cooling container is disposed in the vacuum chamber in which the sample is housed, and one end of each of a supply pipe for supplying a cooling liquid and a cooling pipe for cooling the sample is connected to this cooling container, and the supply pipe and the cooling pipe are connected to each other. A sample cooling device characterized in that the other end of each of the cooling pipes is opened outside the vacuum chamber, and an on-off valve for opening and closing the supply pipe is provided at an intermediate part of the supply pipe.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17953382U JPS5982952U (en) | 1982-11-26 | 1982-11-26 | Sample cooling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17953382U JPS5982952U (en) | 1982-11-26 | 1982-11-26 | Sample cooling device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5982952U true JPS5982952U (en) | 1984-06-05 |
Family
ID=30389514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17953382U Pending JPS5982952U (en) | 1982-11-26 | 1982-11-26 | Sample cooling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5982952U (en) |
-
1982
- 1982-11-26 JP JP17953382U patent/JPS5982952U/en active Pending
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