JPS5972726U - 拡散治具のマザ−ボ−ト - Google Patents

拡散治具のマザ−ボ−ト

Info

Publication number
JPS5972726U
JPS5972726U JP16915782U JP16915782U JPS5972726U JP S5972726 U JPS5972726 U JP S5972726U JP 16915782 U JP16915782 U JP 16915782U JP 16915782 U JP16915782 U JP 16915782U JP S5972726 U JPS5972726 U JP S5972726U
Authority
JP
Japan
Prior art keywords
frame side
rear frame
motherboard
diffusion jig
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16915782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236279Y2 (enrdf_load_stackoverflow
Inventor
臣二 関家
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tecnisco Ltd
Original Assignee
Tecnisco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tecnisco Ltd filed Critical Tecnisco Ltd
Priority to JP16915782U priority Critical patent/JPS5972726U/ja
Priority to EP83107498A priority patent/EP0100539A3/en
Priority to KR1019830003575A priority patent/KR920001025B1/ko
Publication of JPS5972726U publication Critical patent/JPS5972726U/ja
Application granted granted Critical
Publication of JPS6236279Y2 publication Critical patent/JPS6236279Y2/ja
Granted legal-status Critical Current

Links

JP16915782U 1982-07-30 1982-11-08 拡散治具のマザ−ボ−ト Granted JPS5972726U (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16915782U JPS5972726U (ja) 1982-11-08 1982-11-08 拡散治具のマザ−ボ−ト
EP83107498A EP0100539A3 (en) 1982-07-30 1983-07-29 Assembled device for supporting semiconductor wafers or the like
KR1019830003575A KR920001025B1 (ko) 1982-07-30 1983-07-30 반도체 웨이퍼 지지용 조립장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16915782U JPS5972726U (ja) 1982-11-08 1982-11-08 拡散治具のマザ−ボ−ト

Publications (2)

Publication Number Publication Date
JPS5972726U true JPS5972726U (ja) 1984-05-17
JPS6236279Y2 JPS6236279Y2 (enrdf_load_stackoverflow) 1987-09-16

Family

ID=30369619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16915782U Granted JPS5972726U (ja) 1982-07-30 1982-11-08 拡散治具のマザ−ボ−ト

Country Status (1)

Country Link
JP (1) JPS5972726U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878349A (ja) * 1994-08-31 1996-03-22 Shinetsu Quartz Prod Co Ltd シリコンウエハ熱処理用組合せ治具とその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0878349A (ja) * 1994-08-31 1996-03-22 Shinetsu Quartz Prod Co Ltd シリコンウエハ熱処理用組合せ治具とその製造方法

Also Published As

Publication number Publication date
JPS6236279Y2 (enrdf_load_stackoverflow) 1987-09-16

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