JPS597037U - wet oxidation equipment - Google Patents

wet oxidation equipment

Info

Publication number
JPS597037U
JPS597037U JP9958682U JP9958682U JPS597037U JP S597037 U JPS597037 U JP S597037U JP 9958682 U JP9958682 U JP 9958682U JP 9958682 U JP9958682 U JP 9958682U JP S597037 U JPS597037 U JP S597037U
Authority
JP
Japan
Prior art keywords
wet oxidation
tube
oxidation equipment
combustion chamber
igniter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9958682U
Other languages
Japanese (ja)
Other versions
JPS6214131Y2 (en
Inventor
元 小野田
市古　育弘
Original Assignee
株式会社金門製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社金門製作所 filed Critical 株式会社金門製作所
Priority to JP9958682U priority Critical patent/JPS597037U/en
Publication of JPS597037U publication Critical patent/JPS597037U/en
Application granted granted Critical
Publication of JPS6214131Y2 publication Critical patent/JPS6214131Y2/ja
Granted legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例を示すウェット酸化装置の
縦断面図、第２図は同じく点火装置を拡大して示す縦断
面図、第３図は点火装置の他の実施例を示す縦断面図で
ある。 １・・・炉芯管、４・・・燃焼室、６・・・点火装置、
９・・・二重管、１０・・・内管、１１・・・外管、１
２・・・可燃性ガス通路、１４・・・ノズル、１５・・
・ヒータ、１６・・・ノズル。Fig. 1 is a longitudinal sectional view of a wet oxidation device showing one embodiment of this invention, Fig. 2 is a longitudinal sectional view showing an enlarged ignition device, and Fig. 3 is a longitudinal sectional view showing another embodiment of the ignition device. It is a front view. 1... Furnace core tube, 4... Combustion chamber, 6... Ignition device,
9...Double tube, 10...Inner tube, 11...Outer tube, 1
2... Flammable gas passage, 14... Nozzle, 15...
・Heater, 16... nozzle.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウェハー等に収容する炉芯管に接続する燃焼室と
、この燃焼室に設けられた点火装置とからなるウェット
酸化装置において、上記点火装置は、石英からなる二重
管で、その内管と外管との間にノズルと連通ずる可燃性
ガス通路を設けるとともに、上記内管内にその管壁によ
ってしや蔽されたヒータを設けたことを特徴とするウェ
ット酸化装置。In a wet oxidation device consisting of a combustion chamber connected to a furnace core tube housed in a semiconductor wafer, etc., and an igniter provided in this combustion chamber, the igniter is a double tube made of quartz, and the inner tube and A wet oxidation device characterized in that a combustible gas passage communicating with a nozzle is provided between the outer tube and a heater shielded by a wall of the inner tube.
JP9958682U 1982-07-01 1982-07-01 wet oxidation equipment Granted JPS597037U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9958682U JPS597037U (en) 1982-07-01 1982-07-01 wet oxidation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9958682U JPS597037U (en) 1982-07-01 1982-07-01 wet oxidation equipment

Publications (2)

Publication Number Publication Date
JPS597037U true JPS597037U (en) 1984-01-18
JPS6214131Y2 JPS6214131Y2 (en) 1987-04-10

Family

ID=30235937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9958682U Granted JPS597037U (en) 1982-07-01 1982-07-01 wet oxidation equipment

Country Status (1)

Country Link
JP (1) JPS597037U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012042068A (en) * 2010-08-13 2012-03-01 Yasuo Ishikawa Hydrogen cooker

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012042068A (en) * 2010-08-13 2012-03-01 Yasuo Ishikawa Hydrogen cooker

Also Published As

Publication number Publication date
JPS6214131Y2 (en) 1987-04-10

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