JPS5969476U

JPS5969476U - Photoelectron spectrometer

Info

Publication number: JPS5969476U
Application number: JP16597082U
Authority: JP
Inventors: 住友　征二
Original assignee: 株式会社島津製作所
Priority date: 1982-10-31
Filing date: 1982-10-31
Publication date: 1984-05-11

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

一面は本考案の実施例を示し、第１図は本考案　　　〜
の光電子分光分析装置のフィルタ式アナライザの概略を
示す断面図、第２図はバックグラウンドを有する光電子
スペクトルの線図、第３図はバイパススペクトルの線図
、第４図は第２図の光電子スペクトルからバラクグラウ
ンドを消去して得られた光電子スペクトルの線図である
。１・・・試料、２・・・軟Ｘ′線、３・・・光電子、４
・・・フィルタ式アナライザ、５・・・減速電場、７・
・・ローパスフィルタ、８・・・バイパスフィルタ、９
・・・検出器、Ｓ、・・・光電子スペクトル、＄２…バ
イパススペクトル、Ｂ・・・バックグラウンド。１　　　　゛第３図第４図One side shows an embodiment of the present invention, and Fig. 1 shows the embodiment of the present invention.
Figure 2 is a diagram of the photoelectron spectrum with background, Figure 3 is the diagram of the bypass spectrum, and Figure 4 is the photoelectron spectrum of Figure 2. FIG. 2 is a diagram of a photoelectron spectrum obtained by removing the background noise from the . 1... Sample, 2... Soft X' ray, 3... Photoelectron, 4
...filter type analyzer, 5...deceleration electric field, 7.
...Low pass filter, 8...Bypass filter, 9
...Detector, S, ...Photoelectron spectrum, $2...Bypass spectrum, B...Background. 1 ゛Figure 3Figure 4

Claims

[Scope of utility model registration request]

A non-dispersive filter-type analyzer is applied, and the potential of the low-pass filter of the stiff-type analyzer is set higher than the energy of the soft X-rays irradiated to the sample, and the deceleration electric field and the low-pass filter are set to the same potential. By doing this, all the photoelectrons that have passed through the deceleration electric field are guided to the detector, and the bypass spectrum is obtained by scanning while keeping the deceleration electric field and the bypass filter at the same potential, and then the potentials of the low-pass filter and the bypass filter are set to the normal A photoelectron spectrum is obtained by scanning only the decelerating electric field with the analysis potential set to A photoelectron spectrometer characterized in that the background of a photoelectron spectrum is erased by subtracting .