JPS5961530U - 半導体装置の熱処理炉の加熱装置 - Google Patents

半導体装置の熱処理炉の加熱装置

Info

Publication number
JPS5961530U
JPS5961530U JP15602982U JP15602982U JPS5961530U JP S5961530 U JPS5961530 U JP S5961530U JP 15602982 U JP15602982 U JP 15602982U JP 15602982 U JP15602982 U JP 15602982U JP S5961530 U JPS5961530 U JP S5961530U
Authority
JP
Japan
Prior art keywords
heat treatment
semiconductor devices
heating equipment
treatment furnaces
treatment furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15602982U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219961Y2 (mo
Inventor
鈴木　増雄
茂 武田
古門　竜彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP15602982U priority Critical patent/JPS5961530U/ja
Publication of JPS5961530U publication Critical patent/JPS5961530U/ja
Application granted granted Critical
Publication of JPH0219961Y2 publication Critical patent/JPH0219961Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP15602982U 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置 Granted JPS5961530U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15602982U JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15602982U JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Publications (2)

Publication Number Publication Date
JPS5961530U true JPS5961530U (ja) 1984-04-23
JPH0219961Y2 JPH0219961Y2 (mo) 1990-05-31

Family

ID=30344415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15602982U Granted JPS5961530U (ja) 1982-10-15 1982-10-15 半導体装置の熱処理炉の加熱装置

Country Status (1)

Country Link
JP (1) JPS5961530U (mo)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021121008A (ja) * 2020-01-31 2021-08-19 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437256U (mo) * 1977-08-17 1979-03-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437256U (mo) * 1977-08-17 1979-03-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021121008A (ja) * 2020-01-31 2021-08-19 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置

Also Published As

Publication number Publication date
JPH0219961Y2 (mo) 1990-05-31

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