JPS5961270U - メツキ用蒸着鍋の異物除去装置 - Google Patents

メツキ用蒸着鍋の異物除去装置

Info

Publication number
JPS5961270U
JPS5961270U JP15633082U JP15633082U JPS5961270U JP S5961270 U JPS5961270 U JP S5961270U JP 15633082 U JP15633082 U JP 15633082U JP 15633082 U JP15633082 U JP 15633082U JP S5961270 U JPS5961270 U JP S5961270U
Authority
JP
Japan
Prior art keywords
foreign matter
plating
matter removal
removal device
evaporation pot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15633082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS623386Y2 (enExample
Inventor
田口　俊夫
哲義 和田
中村　義満
文屋　栄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP15633082U priority Critical patent/JPS5961270U/ja
Publication of JPS5961270U publication Critical patent/JPS5961270U/ja
Application granted granted Critical
Publication of JPS623386Y2 publication Critical patent/JPS623386Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15633082U 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置 Granted JPS5961270U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15633082U JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15633082U JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Publications (2)

Publication Number Publication Date
JPS5961270U true JPS5961270U (ja) 1984-04-21
JPS623386Y2 JPS623386Y2 (enExample) 1987-01-26

Family

ID=30344992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15633082U Granted JPS5961270U (ja) 1982-10-18 1982-10-18 メツキ用蒸着鍋の異物除去装置

Country Status (1)

Country Link
JP (1) JPS5961270U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3323488A (en) * 1962-12-21 1967-06-06 Nat Res Corp Vapor coating apparatus employing crucible scraping means

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3323488A (en) * 1962-12-21 1967-06-06 Nat Res Corp Vapor coating apparatus employing crucible scraping means

Also Published As

Publication number Publication date
JPS623386Y2 (enExample) 1987-01-26

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