JPS5956737U - Vertical diffusion jig - Google Patents

Vertical diffusion jig

Info

Publication number
JPS5956737U
JPS5956737U JP15217482U JP15217482U JPS5956737U JP S5956737 U JPS5956737 U JP S5956737U JP 15217482 U JP15217482 U JP 15217482U JP 15217482 U JP15217482 U JP 15217482U JP S5956737 U JPS5956737 U JP S5956737U
Authority
JP
Japan
Prior art keywords
wafer support
vertical diffusion
diffusion jig
support column
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15217482U
Other languages
Japanese (ja)
Inventor
臣二 関家
Original Assignee
株式会社テクニスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社テクニスコ filed Critical 株式会社テクニスコ
Priority to JP15217482U priority Critical patent/JPS5956737U/en
Priority to EP83107498A priority patent/EP0100539A3/en
Priority to KR1019830003575A priority patent/KR920001025B1/en
Publication of JPS5956737U publication Critical patent/JPS5956737U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は従来の横型拡散治具、第３図５　−以
降は本願考案に係り、第３図は斜視図、第４図はその平
面図、第５図はウェーハ支持柱の背面図、第６図は他の
実施例を示す平面図、第７図はそのウェーハ支持柱の斜
視図。 ６・・・座台、６ａ・・・台足、７・・・ウェーハ支持
杵嵌合部、８・・・ウェーハ支持柱、８ａ・・・切欠部
、９・・・ウェーハ支承溝、１０・・・楔、Ｐ、Ｐ′・
・・ウエーノ１．１１・・・座台、１２・・・ウェーハ
支持杵嵌合部、１３・・・ウェーハ支持柱、１４・・・
ウェーハ支承溝、１５・・・切欠部、１６・・・楔。Figures 1 and 2 are of a conventional horizontal diffusion jig, Figure 3 is a perspective view, Figure 4 is a plan view, and Figure 5 is a wafer support column. FIG. 6 is a rear view, FIG. 6 is a plan view showing another embodiment, and FIG. 7 is a perspective view of the wafer support column. 6... Seat, 6a... Pedestal foot, 7... Wafer support punch fitting portion, 8... Wafer support column, 8a... Notch, 9... Wafer support groove, 10...・・Wedge, P, P′・
...Ueno 1.11...Seat, 12...Wafer support punch fitting part, 13...Wafer support column, 14...
Wafer support groove, 15... Notch, 16... Wedge.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）座台に複数個のウェーハ支持柱を一定の間隔をお
いて並列状にかつ着脱自在に直立装設すると共に、該各
ウェー／”％支持柱にはその各対向側面に上下方向に並
列する複数個のウェーハ支承溝を刻設して成ることを特
徴とする竪型拡散治具。(1) A plurality of wafer support columns are installed upright on the pedestal in a parallel manner at regular intervals and detachably, and each wafer support column has a vertical direction on each opposing side surface. A vertical diffusion jig characterized by being formed by carving a plurality of parallel wafer support grooves. （２）前記複数個のウェーハ支承溝はウェー／’％支持
柱の側面の一方から他側面へ上下方向の傾斜をさせて形
成して成ることを特徴とする実用新案登録請求の範囲第
１項記載の竪型拡散治具。(2) The plurality of wafer support grooves are formed so as to be inclined vertically from one side surface to the other side surface of the wafer support column. Vertical diffusion jig as described. （３）　　前記ウェーハ支持柱は薄板状にすると共にそ
のウェーハ支承溝は板広面側端部から板広面中央部方向
へ傾斜させて刻設して成ることを特徴曖 とする実用新案登録請求の範囲第１項記載の竪型拡散治
具。(3) The scope of the utility model registration claim is characterized in that the wafer support column is formed into a thin plate, and the wafer support groove is carved so as to be inclined from the edge of the wide side of the plate toward the center of the wide side of the plate. The vertical diffusion jig according to item 1.
JP15217482U 1982-07-30 1982-10-08 Vertical diffusion jig Pending JPS5956737U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15217482U JPS5956737U (en) 1982-10-08 1982-10-08 Vertical diffusion jig
EP83107498A EP0100539A3 (en) 1982-07-30 1983-07-29 Assembled device for supporting semiconductor wafers or the like
KR1019830003575A KR920001025B1 (en) 1982-07-30 1983-07-30 Assembled device for supporting semiconductor wafers or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15217482U JPS5956737U (en) 1982-10-08 1982-10-08 Vertical diffusion jig

Publications (1)

Publication Number Publication Date
JPS5956737U true JPS5956737U (en) 1984-04-13

Family

ID=30337016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15217482U Pending JPS5956737U (en) 1982-07-30 1982-10-08 Vertical diffusion jig

Country Status (1)

Country Link
JP (1) JPS5956737U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig

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