JPS5956283A - Bubble generator of contiguous disc bubble element - Google Patents

Bubble generator of contiguous disc bubble element

Info

Publication number
JPS5956283A
JPS5956283A JP57166251A JP16625182A JPS5956283A JP S5956283 A JPS5956283 A JP S5956283A JP 57166251 A JP57166251 A JP 57166251A JP 16625182 A JP16625182 A JP 16625182A JP S5956283 A JPS5956283 A JP S5956283A
Authority
JP
Japan
Prior art keywords
bubble
transfer path
conductor
layer
spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57166251A
Other languages
Japanese (ja)
Inventor
Susumu Asata
麻多 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57166251A priority Critical patent/JPS5956283A/en
Publication of JPS5956283A publication Critical patent/JPS5956283A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)

Abstract

PURPOSE:To improve the bubble generation characteristic, by changing the distance between the center of the thickness of a conductor layer and the surface of a bubble holding layer on the bubble transfer path side and the opposite side of boundaries near a bubble transfer path to allow a magnetic field due to a conductor current to exist locally practically. CONSTITUTION:Though shapes of a bubble transfer path and a conductor pattern 13 are the same as conventional those, spacing between the conductor layer and the bubble holding layer is changed on an inside 31 and an outside 32 near the bubble transfer path 12. The position for changing the spacing is about 2-3- fold length 33 of the bubble diameter distant from the end of the bubble transfer path 12. Since bubbles exist stably near the transfer path within this length 33 by the effect of the distortion generated by ion implantation, the magnetic field due to the conductor current is allowed to exist locally near the transfer path end also, and thus, bubble are generated more efficiently.

Description

【発明の詳細な説明】 本発明は、コンティギュアス・ディスク・バブル素子の
バブル発生器に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a bubble generator for a continuous disk bubble device.

従来、バブル素子にはバブル保持層の上に軟(み導体パ
ターンをJLいに間隙を設けて面内磁場回転によりバブ
ルを++g送させる方法が採用されてきた。
Conventionally, a method has been adopted for bubble devices in which a soft conductor pattern is provided on a bubble retaining layer with a gap so that bubbles are transported by ++g by in-plane magnetic field rotation.

しかし、前記のパターンの間隙をよ、バブル密度の低下
、バブルの高速度転送に対する障害そし7てパターン微
細前二[の限界という点で好ましくなt・つた。これに
対し、米国特許第制28329号公報に蕪間隙のパター
ンを用いてバブルを転送させる素子が提示され、般近急
速に開発が進められてきた。
However, this method is undesirable in terms of the gaps in the pattern, a reduction in bubble density, an obstacle to high-speed transfer of bubbles, and limitations on pattern fineness. In response, US Pat. No. 28,329 proposed an element that transfers bubbles using a pattern of gaps, and its development has been rapidly progressing in recent years.

そとではパターンはイオン注入法で形成されている。そ
の素子は転送パターンが円を連らねた形状であったこと
から、その後に開発された形状のものも含めて二1ンテ
ィギュアス・ディスク(,1;J、 下CDと略称する
)末PとFlわれて1ハる。
On the other hand, the pattern is formed by ion implantation. Since the transfer pattern of that element had a shape of a series of circles, it became known as the 21st Intense Disc (21; I got caught and got 1 hit.

CI)素子のバブルの発生器としては、バブル保持層の
上にバブル))へ牛用の導体パターンを直接あるいはス
ペー・すを介して設けたものがiil常用いられている
。この導体パターンによるバブルイ、ジ生方法ハ、従来
のハ=77ff・f・パターン・バブル零−トの騙合、
バブル発生時・訃やバブル発生器)74の安7a化にパ
ーマロイ・パターンの磁化からの磁界金利用しているの
に対し、CD素子の場合イオン注入領域の磁化からの磁
界を利用しているのが、基本的には、電流による局部磁
界でバブル保持層の磁化反転を行うものである。C1)
素子は従来素子より大容逗であることに特徴がある。従
って、CD素子のバブル発生器はバブル発生効率が良く
、即ち低消費電力で、かつ、出来る限り誤動作が少ない
ことが要求される。
As a bubble generator for a CI) element, one in which a conductor pattern for bubbles is provided directly or via a space on a bubble retaining layer is commonly used. This conductor pattern is used to generate bubbles, the method of generating bubbles, and the deception of the conventional pattern bubble zero.
When a bubble occurs, the magnetic field from the magnetization of the permalloy pattern is used to stabilize the 74 (bubble generator), whereas in the case of a CD element, the magnetic field from the magnetization of the ion-implanted region is used. Basically, the magnetization of the bubble retention layer is reversed using a local magnetic field generated by an electric current. C1)
The element is characterized by a larger capacity than conventional elements. Therefore, the bubble generator for the CD element is required to have high bubble generation efficiency, that is, low power consumption, and to have as few malfunctions as possible.

第1図は従来のCD素子バブル発生器の一例の概略平面
図である。バブル11はバブル転送路12の端において
導体パターン13の電流(…界により発生される。第2
図は導体パターンを槓切る線14上での概略断面図であ
る。バブル発生器の導体層13がバブル保持層21の上
にスペーサ22を介して設けられている。バブル発生に
必要な電流は導体パターン形状や導体層13とバブル保
持層21とのスペーシング23等を与えた場合、バブル
材料やイオン注入東件で決まる下限値がある。また、電
流を流しすぎると、電流磁界が十分局在化されていない
場合、不要バブルの発生等の誤動作が生じやすくなる。
FIG. 1 is a schematic plan view of an example of a conventional CD element bubble generator. The bubble 11 is generated by the current (... field) of the conductor pattern 13 at the end of the bubble transfer path 12.
The figure is a schematic cross-sectional view taken along a line 14 that cuts through the conductor pattern. The conductor layer 13 of the bubble generator is provided on the bubble retaining layer 21 with a spacer 22 interposed therebetween. The current required for bubble generation has a lower limit determined by the bubble material and ion implantation conditions, given the conductor pattern shape, the spacing 23 between the conductor layer 13 and the bubble retaining layer 21, etc. Furthermore, if too much current is passed, malfunctions such as generation of unnecessary bubbles are likely to occur if the current magnetic field is not sufficiently localized.

即ち、電流の上限値がある。例えば導体パターンとして
は、第1図のようなヘアピン状導体パターンが通常用い
られているが、導体パターンの狭部15で、不要バブル
か発生することが多い。従って、電流は適切な値に設定
する必要があるが、バブル緊子製造工4..iの簡単化
のだめ、発生器の導体層は、他のゲートやセンス等の機
能部の導体層と同層に作ることと関連し、て、多少特性
の悪い動作電流領域で、発生器を動作させなければなら
ない。従って、一般的に知られている株に温度変化によ
る動作領域の変化のため、誤動作が生じやすくなる。例
えば低温ではバブル発生に必要な最/h電流が増加する
点、また高温では不要バブルの発生が多くなる点が問題
であった。
That is, there is an upper limit value for the current. For example, a hairpin-shaped conductor pattern as shown in FIG. 1 is usually used as the conductor pattern, but unnecessary bubbles often occur in the narrow portion 15 of the conductor pattern. Therefore, it is necessary to set the current to an appropriate value. .. Due to the simplification of i, the conductor layer of the generator is made in the same layer as the conductor layers of other functional parts such as gates and senses, so the generator cannot be operated in an operating current region with somewhat poor characteristics. I have to let it happen. Therefore, malfunctions are likely to occur in commonly known strains due to changes in the operating range due to temperature changes. For example, there have been problems in that at low temperatures, the current required for bubble generation increases per hour, and at high temperatures, unnecessary bubbles are generated in large numbers.

本発明の目的は、このようなバブル発生器のバブル発生
電流の増加の問題と、電流値の太き−ときの不要バブル
発生の誤動作のi7U題に苅し、発生器導体による磁界
を従来より実質的に局在化ぜせることで、特性の改善を
行なったバブル発生器を提供することである@ 本発明によれば、イオン注入法を用いてバブル転送路が
形成されたバブル保持層の上にバブル発生用の2h8体
層を設けたCD素子のバブル発生器において、前記導体
層の膜厚中心と前記バブル保持層の表面との距離を前記
バブル転送路の近傍を境と17で前記バブル転送路側と
その反対側とで変化させることを特徴とするCDi子の
バブル発生器が得られる。
The purpose of the present invention is to solve the problem of the increase in the bubble generation current of the bubble generator and the malfunction of unnecessary bubble generation when the current value is large, and to solve the problem that the magnetic field generated by the generator conductor is It is an object of the present invention to provide a bubble generator with improved characteristics by substantially localizing the bubbles. In a bubble generator for a CD element having a 2H8 layer for bubble generation thereon, the distance between the center of the film thickness of the conductor layer and the surface of the bubble retaining layer is set at 17 with the vicinity of the bubble transfer path as the boundary. A CDi element bubble generator is obtained, which is characterized in that it changes between the bubble transfer path side and the opposite side.

なお、導体パターンを用いた従来のバブル発生器のうち
、アイ・イー・イー・イー・トランザクシηンズ・オン
・マグネティクス(II弓ED Tralls。
Incidentally, among conventional bubble generators using conductor patterns, the IE Transactions on Magnetics (II Bow ED Tralls).

+’vla gn、 ) if> fvla g−9巻
(1973年)第489uに記載されている様にバブル
保持層にグループを設けて導体パターンを形成したもの
が知られ−Cいる。
+'vlagn, ) if> fvla g-9 (1973), No. 489u, there is a known structure in which conductor patterns are formed by providing groups in the bubble retaining layer.

このバブル発生器は、導体層に段差があるど推定される
が、導体層の膜厚中心とバブル保持層表面とのにJ離は
一足であり、本発明のバブル発生器とは構造的に異なる
ものである。従って、誤動作を抑える効果、動作甫1流
を低減する効果はない。
It is assumed that this bubble generator has a step in the conductor layer, but the distance between the center of the thickness of the conductor layer and the surface of the bubble retaining layer is one foot, and the bubble generator of the present invention is structurally different. They are different. Therefore, there is no effect of suppressing malfunctions or reducing the number of malfunctions.

また、本発明の様に発生器近傍1c分いて、導体層とバ
ブル保持層との距離を部分的に変更するだめの磁気バブ
ル素子製造に係るフォトマスクは、例えばパーマロイと
のスルーホール形、rRfIJのマスタ等と共用できる
等のだめ、マスタ枚へや1コ縁が従来より稲に複雑化す
ることはない。
Further, as in the present invention, a photomask for manufacturing a magnetic bubble element that partially changes the distance between the conductor layer and the bubble holding layer in the vicinity of the generator is, for example, a through-hole type made of permalloy, rRfIJ Since it can be shared with other masters, etc., the connection between the master and one pieces is not more complicated than before.

以下、本発明について実施例を用い′W′細に説明する
Hereinafter, the present invention will be explained in detail using examples.

実施例1゜ 第3図は本発明のバブル発生器の一実施例を示す概略平
面図である。バブル転送路12と導体パターン13の形
状は、従来と同じであるが、バブル転送路12の近傍の
内側31と外側32とで、導体層とバブル保持l−9と
のスペーシングを変化させであることが特徴である。ス
ペーシングを変化させる位置は、バブル1臥送路12の
端X111らバブル径の約2・〜3倍の距離3;3の近
イヴjである。バブルはとの1陀33以内の転送路jf
〔傍でイオン注入によって生じだnkの効果により安定
に存在するとと九ら、導体?tt流による磁界もこの転
送路嬶近傍に局在化させるととにより、Jり効率的にバ
ブルを発生させろことが出来る。
Embodiment 1 FIG. 3 is a schematic plan view showing an embodiment of the bubble generator of the present invention. The shapes of the bubble transfer path 12 and the conductor pattern 13 are the same as in the conventional case, but the spacing between the conductor layer and the bubble holding l-9 can be changed between the inner side 31 and the outer side 32 near the bubble transfer path 12. It is characterized by one thing. The position where the spacing is changed is a distance 3:3 from the end X111 of the bubble 1 feeding path 12, which is about 2.about.3 times the bubble diameter. Bubble is transfer route within 133 jf
[Is it a conductor that exists stably due to the nk effect caused by ion implantation? By localizing the magnetic field caused by the tt flow near the transfer path, bubbles can be generated more efficiently.

第4図は導体パターン13を横切る線14上での概略断
面図である。導体hI中心とノくプル保持層表面とのス
ペーシング23がバブル転送龜の内側31で、外側32
に比べ小さくする様、スペーサ22を加工しである。;
44因の左すなわち32側Q′)ス′く一シングは、他
の礪能部の導体のスペーシンク′共通のものである。こ
のときヘアピン状導体の折曲り部周辺でスペーシングを
小さくする様、スペーサ22をエツチングして博くし、
;8S4図の+?iaを形成した。
FIG. 4 is a schematic cross-sectional view taken along a line 14 that crosses the conductor pattern 13. The spacing 23 between the center of the conductor hI and the surface of the nopull retaining layer is the inner side 31 and the outer side 32 of the bubble transfer head.
The spacer 22 is processed to be smaller than the . ;
The left or 32nd side Q') spacing of the 44th factor is common to the spacing of the conductors of the other functional parts. At this time, the spacer 22 is etched and widened to reduce the spacing around the bend of the hairpin-shaped conductor.
;8S4 figure +? ia was formed.

第41菌の(1〜造の場合、従来よりも/(プルを発生
させるだめの最小tulAL、に減少でき、従来よりも
発生効率が良く、(即ち低消費電力に)出来る。
In the case of the 41st bacterium (1 to 1), the minimum tulAL required to generate pull can be reduced to /(minimum tulAL for generating pull) compared to the conventional method, and the generation efficiency can be improved (that is, lower power consumption) than the conventional method.

また、チップ1島1&上昇によりノ々プル発生電流値が
動作領域の上限11111 Kずれても、従来より電流
磁界を局在化させ(いることにより、不要)ぐプルの発
生が少なく出来る。
Furthermore, even if the no-pull generated current value deviates from the upper limit of the operating range by 11111 K due to the rise of the chip 1 island 1&, the generation of pulls can be reduced by localizing the current magnetic field (which is unnecessary) than in the past.

従りて、素トの動作J:)温度範囲も広くシ:る。Therefore, the actual operating temperature range is also wide.

なお、スペーサ22をM<Lだ部分におい−Cスペーサ
22が全く存在せず、バブル保持層21と導体パターン
13が直接液していてもよい。
In addition, in the part where M<L of the spacer 22, the -C spacer 22 may not exist at all, and the bubble retaining layer 21 and the conductor pattern 13 may be in direct contact with each other.

実施例12゜ 第5図は、本発明のバブル発生器の他の一実施例を示す
概略断面図である。この場合、スペーサ22の膜厚は不
変で、従来と同じであるが、転送路12近傍の内側31
で外側32に比べ、導体層の膜厚が小さいことが特徴で
ある。
Embodiment 12 FIG. 5 is a schematic sectional view showing another embodiment of the bubble generator of the present invention. In this case, the film thickness of the spacer 22 remains unchanged and is the same as the conventional one, but the inner side 31 near the transfer path 12
It is characterized in that the thickness of the conductor layer is smaller than that of the outer side 32.

すなわち、導体層中心とバブル保持層表面とのスペーシ
ング23が、導体折曲り部周辺で小さいことによυ導体
磁界が導体折曲り部で従来より大きく、かつ、より局在
化されており、バブル発生特性の改善に実施例1と同様
な効果が得られる。
That is, since the spacing 23 between the center of the conductor layer and the surface of the bubble retaining layer is small around the conductor bend, the υ conductor magnetic field is larger and more localized at the conductor bend than before. The same effect as in Example 1 can be obtained in improving the bubble generation characteristics.

また、本実施例の導体中の亀流蕾JWは、バブル発生部
分以外では小さくでき、導体抵抗による電力消費軽減に
対しても効果がある。また、本実施例はスペーサ22が
全くない場合でも効果がある。
Further, the turtle flow buds JW in the conductor of this embodiment can be made small in areas other than the bubble generation portion, which is also effective in reducing power consumption due to conductor resistance. Further, this embodiment is effective even when there is no spacer 22 at all.

実施例3゜ 第6図は、本発明のバブル発生器の他の一実施例を示す
概略断面図である。
Embodiment 3 FIG. 6 is a schematic sectional view showing another embodiment of the bubble generator of the present invention.

この場合、実施例とは逆に導体中心とノくプル保持層表
面とのスペーシング23を転送路12の近傍の内側31
で、外側32ニ比べ、大きくしである点が特徴である。
In this case, contrary to the embodiment, the spacing 23 between the center of the conductor and the surface of the nopull holding layer is adjusted to the inner side 31 near the transfer path 12.
It is characterized by being larger than the outer 32 ni.

よく使われている様にCD素子はイオン注入歪みを用い
ているため、導体/ぐターンによる歪みも、材料特性や
イオン注入条件によりバブル発生器特性に影響してくる
。第6図は実施例1と違って導体パターンによる歪みが
バブル発生器特性を悪化させる(例えばバブルがトラッ
プされるエラー)材料特性の場合の実施例である。
Since the CD element, which is commonly used, uses ion implantation strain, the strain caused by the conductor/gutter also affects the bubble generator characteristics depending on the material properties and ion implantation conditions. FIG. 6 shows an embodiment in which, unlike the first embodiment, distortion caused by the conductor pattern deteriorates the bubble generator characteristics (for example, an error in which bubbles are trapped) due to material characteristics.

この場合、導体電流のバブル発生、位置の磁界はスペー
シング増加により、やや広がりを持ち弱まるが、導体中
による面内磁化層カ・らの(磁界の乱れが弱まることに
より実質的に磁界が局在して働き誤動作の少ないバブル
発生特性が得られる。
In this case, the conductor current bubbles occur and the magnetic field at the position expands and weakens due to the increase in spacing, but due to the weakening of disturbances in the magnetic field caused by the in-plane magnetization layer in the conductor, the magnetic field is essentially localized. Bubble generation characteristics with less malfunction can be obtained.

なお、スペーサ22は転送路の内側31にのみ存在し、
外側32には全く存在しなくてもよい。
Note that the spacer 22 exists only on the inside 31 of the transfer path,
There may be none on the outside 32.

以上説明した様に本発明によれば、従来のC,D素子バ
ブル発生器に比べ、導体電流による磁界を実質的に局在
化させることで、バブル発生特性の良いバブル発生器を
提供することが出来、ノクブノ1)素子の大容量化を達
成できるという効果がある。
As explained above, according to the present invention, compared to conventional C and D element bubble generators, it is possible to provide a bubble generator with better bubble generation characteristics by substantially localizing the magnetic field caused by conductor current. 1) It is possible to achieve the effect of increasing the capacity of the device.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のCD素子のバブル発生器を示す概略平面
図、第2図は第1図の線14における概略断面図、第3
図は実施例1の概略平面図、第4図は実施例1の概略断
面図、第5図は実施例2の概略断面図、81¥6図は実
施例3の概略断面図である。 図中の番号はそれぞれ以下のものを示す。 11・・・・・・・・・バブル、12・・・・・・・・
・バブル転送路/ぐターン、13・・・・・・・・・導
体パターン、14・・・・・・・・・導体/ぐターンの
中心線、15・・・・・・・・・ヘアピン導体狭部、2
1・・・・・・・・・ノぐプル保UN、22・・・・・
・・・・スペーサi、23・・・・・・・・・スペーシ
ング、31・・・・・・・・・スペーシング一定の領域
、32・・・・・・・・・31とスペーシングの異なる
領域、33・・・・・・・・・スペーシング変化位置と
転送路端との距ll110囁1図 築3図 囁4図
FIG. 1 is a schematic plan view showing a conventional CD element bubble generator, FIG. 2 is a schematic cross-sectional view taken along line 14 in FIG. 1, and FIG.
4 is a schematic sectional view of Embodiment 1, FIG. 5 is a schematic sectional view of Embodiment 2, and 81¥6 is a schematic sectional view of Embodiment 3. The numbers in the figure indicate the following. 11・・・・・・・・・Bubble, 12・・・・・・・・・
・Bubble transfer path/turn, 13... Conductor pattern, 14... Center line of conductor/turn, 15... Hairpin Conductor narrow part, 2
1・・・・・・・・・Nogupuruho UN, 22・・・・・・
...Spacer i, 23......Spacing, 31......Constant spacing area, 32...31 and Spacing Different areas, 33... Distance between the spacing change position and the end of the transfer path

Claims (1)

【特許請求の範囲】[Claims] イオン注入法を用いてバブル転送路が形成されたバブル
保持層の上に、バブル発生用の導体層を設けたフンディ
ギ、アス・ディスク・バブル素子のバブル発生器におい
て、前記導体層の膜厚中心と前記バブル保持層の表面と
の距離を、前記バブル転送路の近傍を境として前記バブ
ル転送路側とその反対側とで変化させることを特徴どす
るコンティギュアス・ディスク・バブル素−f−のバブ
ル発生器。
In the bubble generator of the Fundigi and AS disk bubble element, a conductor layer for bubble generation is provided on a bubble retaining layer in which a bubble transfer path is formed using an ion implantation method, and the thickness center of the conductor layer is and the surface of the bubble retaining layer is changed between the bubble transfer path side and the opposite side with the vicinity of the bubble transfer path as a boundary. bubble generator.
JP57166251A 1982-09-24 1982-09-24 Bubble generator of contiguous disc bubble element Pending JPS5956283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57166251A JPS5956283A (en) 1982-09-24 1982-09-24 Bubble generator of contiguous disc bubble element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57166251A JPS5956283A (en) 1982-09-24 1982-09-24 Bubble generator of contiguous disc bubble element

Publications (1)

Publication Number Publication Date
JPS5956283A true JPS5956283A (en) 1984-03-31

Family

ID=15827915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57166251A Pending JPS5956283A (en) 1982-09-24 1982-09-24 Bubble generator of contiguous disc bubble element

Country Status (1)

Country Link
JP (1) JPS5956283A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135477U (en) * 1991-05-31 1992-12-16 山形日本電気株式会社 IC storage magazine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04135477U (en) * 1991-05-31 1992-12-16 山形日本電気株式会社 IC storage magazine

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