JPS5954929U - ハイブリツドｉｃ等の薄板状ワ−クの保持用治具 - Google Patents

ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Info

Publication number
JPS5954929U
JPS5954929U JP15006782U JP15006782U JPS5954929U JP S5954929 U JPS5954929 U JP S5954929U JP 15006782 U JP15006782 U JP 15006782U JP 15006782 U JP15006782 U JP 15006782U JP S5954929 U JPS5954929 U JP S5954929U
Authority
JP
Japan
Prior art keywords
jig
holding
thin plate
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15006782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218039Y2 (enrdf_load_stackoverflow
Inventor
寿夫 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanwa System Engineering Co Ltd
Original Assignee
Sanwa System Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanwa System Engineering Co Ltd filed Critical Sanwa System Engineering Co Ltd
Priority to JP15006782U priority Critical patent/JPS5954929U/ja
Publication of JPS5954929U publication Critical patent/JPS5954929U/ja
Application granted granted Critical
Publication of JPS6218039Y2 publication Critical patent/JPS6218039Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Packaging Frangible Articles (AREA)
JP15006782U 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具 Granted JPS5954929U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15006782U JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15006782U JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Publications (2)

Publication Number Publication Date
JPS5954929U true JPS5954929U (ja) 1984-04-10
JPS6218039Y2 JPS6218039Y2 (enrdf_load_stackoverflow) 1987-05-09

Family

ID=30332937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15006782U Granted JPS5954929U (ja) 1982-10-02 1982-10-02 ハイブリツドｉｃ等の薄板状ワ−クの保持用治具

Country Status (1)

Country Link
JP (1) JPS5954929U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017149740A1 (ja) * 2016-03-03 2017-09-08 コアテクノロジー株式会社 薄膜形成装置に用いる基盤トレイ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017149740A1 (ja) * 2016-03-03 2017-09-08 コアテクノロジー株式会社 薄膜形成装置に用いる基盤トレイ
JPWO2017149740A1 (ja) * 2016-03-03 2018-12-06 コアテクノロジー株式会社 薄膜形成装置に用いる基盤トレイ
US11174554B2 (en) 2016-03-03 2021-11-16 Core Technology, Inc. Substrate tray for use in thin-film formation device

Also Published As

Publication number Publication date
JPS6218039Y2 (enrdf_load_stackoverflow) 1987-05-09

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