JPS5954918A - Manufacture of code plate of shaft encoder - Google Patents

Manufacture of code plate of shaft encoder

Info

Publication number
JPS5954918A
JPS5954918A JP16398682A JP16398682A JPS5954918A JP S5954918 A JPS5954918 A JP S5954918A JP 16398682 A JP16398682 A JP 16398682A JP 16398682 A JP16398682 A JP 16398682A JP S5954918 A JPS5954918 A JP S5954918A
Authority
JP
Japan
Prior art keywords
slit
disk
center
rotary shaft
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16398682A
Other languages
Japanese (ja)
Inventor
Koji Hagino
萩野 弘司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Advanced Motor Corp
Original Assignee
Nidec Servo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Servo Corp filed Critical Nidec Servo Corp
Priority to JP16398682A priority Critical patent/JPS5954918A/en
Publication of JPS5954918A publication Critical patent/JPS5954918A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428Error prevention
    • G01D5/24433Error prevention by mechanical means
    • G01D5/24438Special design of the sensing element or scale

Abstract

PURPOSE:To avoid the error caused by the deviation of the center when a code plate is attached to a rotary shaft, by arranging the position of a slit on the radius separated from the center of the rotary shaft by a specified distance. CONSTITUTION:An annular light shielding film 4-2 having a certain width is attached to a disk 4-1 concentrically with a central hole 4-4 of the disk 4-1. The disk 4-1 is fixed to a rotary shaft 2. Then the rotary shaft 2 is mounted to a chuck 12 of a slit machining apparatus. Under this state, a motor 10 is rotated, a pulse signal which is proportional to the motor speed, is generated by a pulse generator 11 and fed back to a control device 16, and the speed of the motor 10 is stabilized. The pulse signal is applied to a laser light emitting device 15 through a laser light emission control device 17, and the timing and output of the laser light emission are controlled. The laser light 15-1 is projected on the radius of the light shielding film 4-2 of the code plate 4. The position is separated from the center of the rotary shaft by a specified distance. At this time, intervals are provided in the pulse shaped laser light so as to have a specified relationship with the output pulses of the pulse generator. Then the light shielding film 4-2 is melted and a slit is formed.

Description

【発明の詳細な説明】 本発明はシャフトエンコーダー、特に向砿軸に、その外
周近くに一楚間隔でスリット□を設けた・−ド板と、こ
の・ニド板に設けた2 17ツトを挾んでその両側に配
設した発気装置と光−変換装置とを備え、上記回転軸9
[!麺に半セ醪回転軸に固着した円板に設けたスリット
とスリットの無い遮光部とが上記発光装置と洋電変換装
置8間を交吾に−一し1.*電率、−−置一入射する光
tmzc回転軸のリ一に伴?て断続し、回転軸0回転1
対応ゝp ′5 、Ay 、X信号を8生″″!″構成
のシャフトエンコーダ下のコード板の製造方法11 、の改良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a shaft encoder, particularly a spindle shaft, with a do plate having slits at intervals of one inch near its outer periphery, and two 17 holes provided on the nido plate. and a gas generating device and a light conversion device arranged on both sides of the rotary shaft 9.
[! A slit provided in a disc fixed to a rotating shaft and a light shielding part without a slit intersect between the light emitting device and the Western electric converter 8.1. *Electrical rate, depending on the rotational axis of the incident light tmzc? The rotation axis is 0 rotations and 1 rotation.
Supports p'5, Ay, and X signals for 8"! The present invention relates to an improvement in a method 11 for manufacturing a code plate under a shaft encoder having a configuration.

本発明のシー?7+−エンコー一”、−のコー、ド板、
の製造方法は、少なくとも、冴望党稀9品拷秤盆が不透
明である円板ケ回転軸に固定し、上記円板’;兜、;、
Hだ回転軸を原動轡と畔原動機の回転数をiするバ、ル
ス発電轡、件を有すリリーによって駆動し、上記円板の
不透明部分に上、記円板を回転せしめなからレー、ザー
光を間歇的に照′jM:′、′、シて、こ□の照射され
mll上記不明明部分−か、し、□該し−ザー光の、発
晃夕猪ミングとその強さを上記駆動装置に設けたバ、ル
ス、発電機、の出力によって制御する↓うにしたことを
特徴とする。
Sea of the present invention? 7+-enco 1", - code, do board,
The manufacturing method includes at least fixing an opaque disk to a rotating shaft, and fixing the above-mentioned disk ';helmet;
A rotating shaft H is driven by a lily having a rotation speed i of a motive wheel and a movable motor; Intermittently irradiated with laser light. It is characterized in that it is controlled by the output of a bus, a pulse, or a generator provided in the drive device.

以下図面によって従来及び本発明方法の実施例を説明す
る。、:、、、、。
Embodiments of the conventional method and the method of the present invention will be described below with reference to the drawings. , :,,,,.

第1図、(a)は従来よシ実施されているシャツトーン
・−多°−(以下b・−ダーと称す\鼠)”Q’ ””
”””構成例を示す断面図で、1は本体クーシング、2
は回転軸、3はこの同勢−2を支承する軸受、4は上記
回転軸2に取り将ける。コード板、5はこのコード板4
を回転軸2に一体的に固着するためのハブ、6は上記コ
ード板4の一方の側に配置し乍発光装置、7は他方の側
に配置した固定スリッ□ト板、18は同じくす変換装置
、9はこの先電変換製置?出力をパルス波形顛、変堺、
する電子、装置で今そ。
Fig. 1 (a) shows the conventionally practiced shirt tone -multi°- (hereinafter referred to as b-dar\\)"Q'"
``'''' is a sectional view showing an example of the configuration, 1 is the main body cushioning, 2 is the sectional view showing the configuration example.
3 is a rotating shaft, 3 is a bearing for supporting this force-2, and 4 is connected to the rotating shaft 2. Code board, 5 is this code board 4
6 is a light-emitting device placed on one side of the code plate 4, 7 is a fixed slit plate placed on the other side, and 18 is a conversion device. Is the device 9 installed by the electric conversion company? Change the output pulse waveform,
Electronics and equipment are now available.

第1図(b) ? (e)はコード板4の詳細を示す平
面図、及び一部の平面図である。第1図(b) 、 (
e)に於て4−1は透明なガラス若しくはプラスチック
で構成した薄い円板で、該円板4−1の外周附近にはあ
る幅で円板と同心的に不透明の遮光膜4−2を一様に付
着され、更に遮光膜4−2には一定ピッチでスリット4
−3が設けてあシ、スリット部の幅Bと遮光部の幅すと
が同じとな、1.・、・M、・”−IL> 7 (c)
K y L、fi″、’/’r7’t−”7’:j−f
−1ば向帳軸2の回転位置を計測する装置として使・7
%さ、れる。例えばコード板4に設けら1れたスリーッ
ト4−3の数をれとする莞、回転軸″2が1回転(36
0度)する時に電子装置9よシ発するパルスはn個であ
り、1個のパルスと隣接するパルスとの間隔は回転軸2
の1回転の聾を示し3鼎イn、c W 〕の位!検出突
可竺とをや。従って極めて精密な位置を制御する装置ち
るいは計測する装置に於て駆動、軸の、1回臀を男に細
分化してその位置を1pltBする装置々、して、エン
コーダーが使用される。
Figure 1 (b)? (e) is a plan view showing details of the code plate 4 and a partial plan view. Figure 1(b), (
In e), 4-1 is a thin disk made of transparent glass or plastic, and near the outer periphery of the disk 4-1, an opaque light-shielding film 4-2 of a certain width is provided concentrically with the disk. The light shielding film 4-2 has slits 4 at a constant pitch.
-3 is provided, and the width B of the slit part and the width of the light shielding part are the same, 1.・,・M,・”−IL>7 (c)
K y L, fi'','/'r7't-”7':j-f
-1 Used as a device to measure the rotational position of the bidirectional book shaft 2.
%sa,reru. For example, if the number of slits 4-3 provided in the cord plate 4 is determined, the rotating shaft ``2'' rotates once (36
0 degrees), the number of pulses emitted by the electronic device 9 is n, and the interval between one pulse and an adjacent pulse is equal to the rotation axis 2.
Shows the deafness of 1 rotation of 3 in, c W ] place! Detection is possible. Therefore, encoders are used in devices that control or measure extremely precise positions, such as devices that drive and axis the buttocks into small pieces and measure the position by 1 pltB.

エンコーダーの分解性能はコード板に設けるスリットの
数が基本となるので高分解性能のエンコーダーには極め
て多数のスリットを設けてあり、このスリットを正確に
等ピッチで設けることとスリット部の幅8と遮光部の幅
すとを等しく設ける事が重要な事で、精度の高いエンコ
ーダーを製造するにはこのコード板に設けたスリットと
一光部とを等ピッチで設ける事が最も重要な事項となる
。   ″ 従来のコード板の製造方法に於ては第2図(a)に示す
ように、ガラス又はシラスチックスの透明円板4−1に
ニッ□ケルクローム等の谷金をスパッタリングその他の
手段である幅に円心的に付着させ七形成した遮光膜4−
2の上に耐赫性の感光レジストを塗布した後に、第1 
” !V”(b) ; ’(c)に□示した遮光膜4−
      ′ 当す6部分、8交亙よ配設ヶゎえパ、し原図門よ晶感光
レジ・トの上に投影し露光した後、酸で処理す之。この
結果スリット4−3の部分の遮光膜が藩■て透明にi、
スリット4−3を設けた・−ド[4カニ完成子る。
The decomposition performance of an encoder is basically determined by the number of slits provided on the code plate, so an encoder with high decomposition performance has an extremely large number of slits. It is important to provide the same width of the light shielding part, and in order to manufacture a highly accurate encoder, the most important thing is to provide the slits on the code plate and the light part at the same pitch. . ``In the conventional method for manufacturing a code plate, as shown in FIG. 2(a), a metal plate such as nickel chrome is applied to a transparent disk 4-1 made of glass or silastics by sputtering or other means. A light-shielding film 4- formed by being attached circularly to the width.
After applying a dye-resistant photoresist on 2.
"!V"(b);'The light shielding film 4- shown in (c)
' The corresponding 6 sections and 8 intersections were arranged, the original map was projected onto a crystal photoresist, exposed, and then treated with acid. As a result, the light-shielding film at the slit 4-3 becomes transparent.
A slit 4-3 was provided for the completion of the 4 crabs.

熱しながら上記の方法ではバタン原図を感光レジストを
塗布しfc遮光膜4−2(7)上に投□影する際にスリ
ット4−3を配設し屋内と円板4′−1の中心に設けた
穴4−4との中心赫ニーさ□せるように細心の注意をも
って作業□を行うQ′要があるがこれを完全に一致させ
ることは困難で両者の間の芯ずれはある程度は生じ、発
生パルスの、。
In the above method while heating, a slit 4-3 is provided when applying a photoresist to the original pattern of the baton and projecting it onto the FC light-shielding film 4-2 (7). It is necessary to perform the work with great care so that the center knee of the hole 4-4 is aligned with the hole 4-4, but it is difficult to match this completely, and there will be some misalignment between the two. , of the generated pulse.

タイミ、ンでに誤チを生スる・ 又コード板4を回転軸2に取シ付はソ朽は第。Time, I'm going to give you a false dick. Also, when attaching the cord plate 4 to the rotating shaft 2, there is no need to worry about corrosion.

2図(b)に示すように回転軸2の一方の端部にボス5
−1を固着し、スリツ、トを−けたコード板4を回転軸
に嵌合し、ボス5−2でコード板4を回転軸2に固着し
一体的に回転−!号よ2にす11す る。
As shown in Figure 2(b), a boss 5 is attached to one end of the rotating shaft 2.
-1 is fixed, and the code plate 4 with slits and grooves is fitted onto the rotating shaft, and the code plate 4 is fixed to the rotating shaft 2 with the boss 5-2 and rotates as one unit. Number 2 is 11.

一転軸i6−ド契4を固着す号に当って憾コード板に設
けられたそり7 ) 4−3を配設した円の中心と回転
軸の中心が一致するよう調整できるように第2図0♀、
士う、にコード板の中/9穴4−4の内径φ下4を回転
軸2の外径φ−2′より少し大きくシ乏・十!!ア説明
した7リツト4−3の円と中心穴4−4との芯ず什、を
も吸、収できるようにするが、このデート板のスリット
a、−a、を設けた円り、−転軸2との中心を一致さ、
When fixing the single rotation shaft i6-dore 4, the sled provided on the cord plate 7) 4-3 can be adjusted so that the center of the circle in which the rotary shaft is arranged coincides with the center of the rotary shaft. 0♀,
Please make sure that the inner diameter φ of the middle/9 hole 4-4 on the cord plate is slightly larger than the outer diameter φ-2' of the rotating shaft 2. ! A. It is possible to absorb and absorb the misalignment between the circle of 7 liters 4-3 and the center hole 4-4 as explained above, but the circle with the slits a, -a of this date plate, - Align the center with rotation axis 2,
.

せ6作業h n 門−s is、拡大鏡0下で行2手作
業7゜7 b、、多く!間を必要札・製造”′トを著し
く高くする原因の1つとなっている。
Se6 work h n gate-s is, line 2 manual work under magnifying glass 0 7° 7 b,, many! This is one of the reasons why the time required for issuing notes and producing them is extremely high.

尚スリット4−3を配設した円の中心と回転軸2の中心
とのずれがどのようk・出力ぶル玄のiイiングに影響
するかを例示子ると次の通シである二□スリット4−3
を配設しえ円の直径を60φとし、配設したスリットめ
数を50:個とするとスリットめ幅と遮光膜の幅は、6
0X3.i4X O,’ 01 # ’1.881mと
’4h。□とのスリガト幅が中心を見る角度θをスリッ
ト1門とスリットを配となる。ところが回転軸2の中心
とスリットの円の中心が今仮りに0.01 rnAnず
れたとす為とスリットを配設した内の内周と嚢際の回転
中心あの半径は30±0.01とな名から半槌が最大時
30±0.0iとなづた時のスリット幅が中心を見る時
の角θ′は 一〇’ −−# 0.0626457・・曲(2)とな
シ(1)と(2)との差       □0.0626
666−0.0626457 = 0.0000209
と(1)との比は      □ □0:o ’o 602 d 9÷0.0626□66
6= 0.00033□35  □左な名tnlJ−を
中心め位置が0.01%すれたととに一シ扶リットのビ
ツヂ眩差め最大値か0.033−に藩ることを示しても
木。  □ このスリットを配設しに円め中心と回転軸の中心とめず
tt整o、o・1rIVm程度にすることは通常の工作
技術+祷られる最嵐の結果と考えてよいから例えスリ□
ヅド4」3番遮光膜上に投影する時に2リツ) 4” 
−flを設け:た円が完全に真円であシ、しかも亥すッ
1を投けるビッヂが完全に等ピッチであったとしても、
この円め中心と回転軸め中心がすれてい不ため出力パル
スのピッ≠に上記の上りな一差を垂じてし唖う1゜本発
明は上記のような従来技術によるコード板の製造方法を
改良した(のである。□  □第3図は本発明によるコ
ード板メ製造方法を□実施するのに用いるスリット加工
装置を示し、10は速度を精密に制御できる電動機、1
1は電動機1′0に直結され九パルス発電機、12は電
動機ioの回転軸と晶−ド被40回転軸2とを連結する
チャック、15はレーザー発光器、16は電動機10の
速度制御脚装置、17はレーザー発光器15のレーザー
発光を制御する装置である。
The following is an example of how the deviation between the center of the circle in which the slit 4-3 is arranged and the center of the rotating shaft 2 affects the output power. 2□Slit 4-3
If the diameter of the circle is 60φ and the number of slits is 50, then the width of the slit and the width of the light shielding film are 6.
0X3. i4X O,' 01 # '1.881m and '4h. The width of the slit with □ is the angle θ when looking at the center, and the angle θ is one slit and one slit apart. However, if the center of the rotation axis 2 and the center of the circle of the slit are shifted by 0.01 rnAn, the radius of the center of rotation between the inner periphery of the slit and the side of the capsule will be 30±0.01. From the name, when the slit width is 30±0.0i at its maximum, the angle θ' when looking at the center is 10'--# 0.0626457... Song (2) and Nashi (1 ) and (2) □0.0626
666-0.0626457 = 0.0000209
The ratio between and (1) is □ □0:o 'o 602 d 9÷0.0626□66
6 = 0.00033□35 □Even if the left name tnlJ- is shifted by 0.01% from the center position, the maximum value of the bit-of-light difference or 0.033- is shown. wood. □ Placing this slit so that it is aligned with the center of the circle and the center of the rotation axis so that it is about tt o, o・1rIVm can be considered to be the result of normal machining technology + the best storm, so even if it is a slit □
4" (2 liters when projecting onto No. 3 light-shielding film) 4"
- fl is provided: Even if the circle is a perfect circle and the bitches that can throw the ``Rainbow 1'' are perfectly even pitched,
Since the center of the rounding and the center of the rotation axis do not cross each other, the above-mentioned upward difference is added to the pitch of the output pulse. □ □ Fig. 3 shows a slitting device used to carry out the cord plate manufacturing method □ of the present invention, and 10 is an electric motor whose speed can be precisely controlled;
1 is a nine-pulse generator that is directly connected to the electric motor 1'0; 12 is a chuck that connects the rotating shaft of the electric motor io and the crystal shaft 40 rotating shaft 2; 15 is a laser emitter; and 16 is a speed control leg of the electric motor 10. A device 17 is a device for controlling laser emission from the laser emitter 15.

本発明方法に於ては先づ爾3図:に示fように円板4−
1にある幅の環状の遮光膜4−2を円 ・板4−1の中
心穴4−4と同、心的に付着させ、この円板4−1を回
転軸2にボス5−1と5−2によって一体的に固着する
。この際に円板の穴4−4と回転軸2との間には少しの
隙間゛があっても差支えない。
In the method of the present invention, the disk 4-
Attach an annular light-shielding film 4-2 with a width equal to 1 in the same manner as the center hole 4-4 of the circular plate 4-1, and attach this circular plate 4-1 to the rotation shaft 2 with the boss 5-1. 5-2, it is fixed integrally. At this time, there may be no problem even if there is a slight gap between the hole 4-4 in the disk and the rotating shaft 2.

次に円板4−1を固着した回転軸2をスリット加工装置
のチャック12に装着する。この状態で電動機10を速
度制御装装置16を介しである速度で回転せしめ、パル
ス発電機11よ多発生した電動機の速度に比例したパル
ス信号を制御装置16に帰還して電動・機1oの速度を
一定。
Next, the rotating shaft 2 to which the disk 4-1 is fixed is mounted on the chuck 12 of the slitting device. In this state, the electric motor 10 is rotated at a certain speed via the speed control device 16, and a pulse signal proportional to the speed of the electric motor generated by the pulse generator 11 is returned to the control device 16 to speed up the electric motor 1o. constant.

させると共に、このパルス信号をレーザー些光を制御r
る装置17を介してレーザー発光器15に加えてレーザ
ー光発光のタイミング履その出力を制御し、レーザー発
光器15よシ発したレーザー光15−1をコード板4の
遮光膜4−2上に回転軸2め中心よシ一定の半径上に上
記パルス発電機の:出力パルスと一定の関係を持った間
隔でパルス状に投、射して上記遮光膜のソニー−光が尚
りた部分、φ畔光M4−2を溶かしてスリットを形、成
せしめる。
At the same time, this pulse signal is used to control the laser beam.
In addition to the laser emitter 15, the output of the laser light is controlled through a device 17 that controls the timing and output of laser light emission, and the laser light 15-1 emitted by the laser emitter 15 is directed onto the light shielding film 4-2 of the code plate 4. The part of the light-shielding film where the Sony light falls is projected in a pulsed manner at intervals having a certain relationship with the output pulses of the pulse generator on a certain radius from the second center of the rotation axis. Melt the φ-beam light M4-2 to form a slit.

尚本発明方幣に、斡′?仲し−ザー光の強さと発   
  1光波形を調節し鮮、鋭な豊ツジのスリットを設け
る為に電動機の速度を高くするに従いレーザー光の強度
を強くし、持続時間を短く調節するようにする。
In addition, is there a 斡′ on the banknote of the present invention? Nakama - The strength and emission of Zah light
1. In order to adjust the light waveform and create a sharp and sharp slit, the intensity of the laser beam is increased as the speed of the electric motor is increased, and the duration is adjusted to be shorter.

上記のように本発明方法に於てはコード板4に遮光膜4
−2を付着した後回転軸2に固着し、この回転軸2を電
動機10のチャック12に装着し、回転軸2を中心に回
転させながら回転軸2゜、7.715.−オ。や撓。位
、。、ヵよ。−2□上にパルス発電機11の拍カパルス
で制御されたピッチでパルス状のレーザー光15−1を
投射して、該レーザー光で遮光膜にスリットを設ける方
法であるので、設けられたスリット、の位置は回転軸の
中心より7定の中径上に配設されているから、従来技術
のようにコード板を回転軸に取付ける際に生ずる中ノq
のずれに起因する誤差が生ずる余地はない。
As mentioned above, in the method of the present invention, the light shielding film 4 is applied to the code plate 4.
-2 is attached to the rotating shaft 2, the rotating shaft 2 is attached to the chuck 12 of the electric motor 10, and while rotating around the rotating shaft 2, the rotating shaft 2°, 7.715. -O. Ya deflection. Rank,. , Kayo. -2□ is a method of projecting a pulsed laser beam 15-1 at a pitch controlled by the pulse of the pulse generator 11, and creating a slit in the light-shielding film with the laser beam. , is located on the center diameter of 7 constants from the center of the rotating shaft, so the center notch q that occurs when attaching the code plate to the rotating shaft as in the prior art.
There is no room for errors due to misalignment.

又スリットの配設ピッチ情電動轡に直結した。Also, the pitch of the slits is directly connected to the electric car.

パルス発電機でレーザー光の発電タイミングを制御して
い、るので、電動機10の回転速度とは無関係であり、
電動機の速度変動によりスリットの配役ピッチが影響を
受けることはない。
Since the timing of laser light generation is controlled by a pulse generator, it is independent of the rotational speed of the electric motor 10.
The pitch of the slits is not affected by speed fluctuations of the electric motor.

又スリットの配設数の変更はパルス発電轡の出力パルス
をレーザー発光を制御する装置17゜によって制御する
ことで容易であシ従来技術のようにコード板のバタン毎
に高価な原版全製造する必要がなく、高精度のコード板
を安価に製造できる利点がある。
In addition, the number of slits can be easily changed by controlling the output pulse of the pulse generator using a device 17 for controlling laser emission, and unlike the prior art, an expensive original plate is manufactured every time the code plate is clicked. This has the advantage that high-precision code plates can be manufactured at low cost.

尚上記実施例に於てはコード板をガラス、プラスチック
づ等の透明な薄板に遮光膜を付着させる構造で説明した
が他の構造、例えば遮光膜を用いず極めて薄い金属板単
体で構成するととtできることは勿論で企る。
In the above embodiment, the code plate was explained as having a structure in which a light-shielding film is attached to a transparent thin plate such as glass or plastic, but other structures, such as an extremely thin metal plate without using a light-shielding film, may be used. Of course, I will try to do what I can.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(&)は従木のシャフト予/コーダーの断面図、
第、1図(b、)9.、(C)はすのコード板の平面図
及び一部の千興図、第2図(a)はそのコード板の説明
図、第2甲(荀はすの惑付賜明図、第2図(C)は=7
−)”板の中心穴の説明図、第3図、、は本発明方法を
実施するた愉の21Jツト加工装置である。 1・・・ケ・−ンング1.2・・・回転軸、3・・・軸
受、4・・・コード板1.4−1・・・円板、4−2・
・・遮光膜、4−3・・・スリ、ット、  4−4.・
・・穴、5・・・ノ1ブ、5−1.5−2・=・ボス1
.6・・・発光装置、7・・・固定スリイト板、8・・
・光電変換装置、9・・・電子装置、10・・・電動機
、11・・・パルス発tp、12・・・チャイク、15
・・・レーザー発光器、15−1・・・レーザー光、1
6・・・速度制御装置、代理人 弁理士 澤 木 誠 
Figure 1 (&) is a cross-sectional view of the subsidiary shaft pre/corder,
Figure 1 (b,) 9. , (C) A plan view of the code board of Hasu and part of the Chixing map, Figure 2 (a) is an explanatory diagram of the code board, and No. 2 Figure (C) is =7
-)" An explanatory diagram of the center hole of the plate, FIG. 3, is a 21J cutting machine for carrying out the method of the present invention. 1...King 1.2...Rotating shaft 3... Bearing, 4... Code plate 1.4-1... Disc, 4-2.
... Light-shielding film, 4-3... Slit, 4-4.・
...Hole, 5...Knob 1, 5-1.5-2...Boss 1
.. 6... Light emitting device, 7... Fixed slit plate, 8...
- Photoelectric conversion device, 9... Electronic device, 10... Electric motor, 11... Pulse generation tp, 12... Chaik, 15
... Laser emitter, 15-1 ... Laser light, 1
6...Speed control device, agent: Patent attorney Makoto Sawaki

Claims (1)

【特許請求の範囲】 少なくとも所望半径の環萩部雰が不漬晶である円板を回
転軸に固定し、上記円iを固着した回転軸を原動−と該
原動機6回シ数を検出する□ 、  □   1111
111 パルス発電機とを有する駆動装置によって駆動し、上記
円板の不透明部分に上記円板を回転せしめながらレーザ
ー光を間歇的に照射してこの照射された上記不透明部分
を溶かし、該レーザー光の発光タイミングとその強振を
上−←駆動装置に設けたパルス発電機の出力によつそ制
−するようにまたことを特徴とするシャフトエンコーダ
ーのコード板の製造方法。    ″ □
[Scope of Claims] A disk having at least a desired radius of a circular ring is fixed to a rotating shaft, and the rotating shaft to which the circle i is fixed is used as a driving force, and the number of 6 times the driving force is detected. □ , □ 1111
111 Driven by a drive device having a pulse generator, the opaque portion of the disk is intermittently irradiated with a laser beam while rotating the disk to melt the irradiated opaque portion, and the opaque portion of the disk is rotated. A method for manufacturing a code plate for a shaft encoder, characterized in that the timing of light emission and its strong vibration are controlled by the output of a pulse generator provided in a drive device. ″ □
JP16398682A 1982-09-22 1982-09-22 Manufacture of code plate of shaft encoder Pending JPS5954918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16398682A JPS5954918A (en) 1982-09-22 1982-09-22 Manufacture of code plate of shaft encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16398682A JPS5954918A (en) 1982-09-22 1982-09-22 Manufacture of code plate of shaft encoder

Publications (1)

Publication Number Publication Date
JPS5954918A true JPS5954918A (en) 1984-03-29

Family

ID=15784580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16398682A Pending JPS5954918A (en) 1982-09-22 1982-09-22 Manufacture of code plate of shaft encoder

Country Status (1)

Country Link
JP (1) JPS5954918A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61167815A (en) * 1985-01-19 1986-07-29 Nippon Soken Inc Optical rotary encoder
WO1988004030A1 (en) * 1986-11-27 1988-06-02 Fanuc Ltd Method of fixing pulse encoder to motor and pulse encoder-carrying motor
JPH04107866U (en) * 1991-02-26 1992-09-17 ミヤチテクノス株式会社 Laser oscillation device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61167815A (en) * 1985-01-19 1986-07-29 Nippon Soken Inc Optical rotary encoder
WO1988004030A1 (en) * 1986-11-27 1988-06-02 Fanuc Ltd Method of fixing pulse encoder to motor and pulse encoder-carrying motor
US4982084A (en) * 1986-11-27 1991-01-01 Fanuc Limited Method for attaching pulse encoder to motor and motor attached with same
JPH04107866U (en) * 1991-02-26 1992-09-17 ミヤチテクノス株式会社 Laser oscillation device

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