JPS5953835A - Water-soluble photohardenable resin composition - Google Patents
Water-soluble photohardenable resin compositionInfo
- Publication number
- JPS5953835A JPS5953835A JP16412782A JP16412782A JPS5953835A JP S5953835 A JPS5953835 A JP S5953835A JP 16412782 A JP16412782 A JP 16412782A JP 16412782 A JP16412782 A JP 16412782A JP S5953835 A JPS5953835 A JP S5953835A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- water
- polymer
- glycol
- monomer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 4
- 229920000642 polymer Polymers 0.000 claims abstract description 33
- 239000000178 monomer Substances 0.000 claims abstract description 18
- 239000004480 active ingredient Substances 0.000 claims description 2
- -1 diethylene glycol aryl ether Chemical class 0.000 abstract description 25
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract description 24
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 abstract description 15
- LVHBHZANLOWSRM-UHFFFAOYSA-N itaconic acid Chemical compound OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 abstract description 8
- 150000001412 amines Chemical class 0.000 abstract description 5
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052783 alkali metal Inorganic materials 0.000 abstract description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 abstract description 4
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 abstract description 3
- 150000008044 alkali metal hydroxides Chemical class 0.000 abstract description 3
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 abstract description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 abstract 2
- 150000001340 alkali metals Chemical class 0.000 abstract 1
- 229920001577 copolymer Polymers 0.000 abstract 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 10
- 238000007664 blowing Methods 0.000 description 10
- ATVJXMYDOSMEPO-UHFFFAOYSA-N 3-prop-2-enoxyprop-1-ene Chemical compound C=CCOCC=C ATVJXMYDOSMEPO-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 229940049920 malate Drugs 0.000 description 9
- BJEPYKJPYRNKOW-UHFFFAOYSA-N malic acid Chemical compound OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 9
- 238000001035 drying Methods 0.000 description 8
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000006116 polymerization reaction Methods 0.000 description 7
- 239000002244 precipitate Substances 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 5
- 150000008065 acid anhydrides Chemical class 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000007334 copolymerization reaction Methods 0.000 description 4
- IIRDTKBZINWQAW-UHFFFAOYSA-N hexaethylene glycol Chemical compound OCCOCCOCCOCCOCCOCCO IIRDTKBZINWQAW-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 4
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WGKYSFRFMQHMOF-UHFFFAOYSA-N 3-bromo-5-methylpyridine-2-carbonitrile Chemical compound CC1=CN=C(C#N)C(Br)=C1 WGKYSFRFMQHMOF-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920000847 nonoxynol Polymers 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- MCWMYICYUGCRDY-UHFFFAOYSA-N 2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCO MCWMYICYUGCRDY-UHFFFAOYSA-N 0.000 description 2
- OWTQQPNDSWCHOV-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethanol Chemical compound OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO OWTQQPNDSWCHOV-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- WQDUMFSSJAZKTM-UHFFFAOYSA-N Sodium methoxide Chemical compound [Na+].[O-]C WQDUMFSSJAZKTM-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 150000003863 ammonium salts Chemical class 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- FUSUHKVFWTUUBE-UHFFFAOYSA-N buten-2-one Chemical compound CC(=O)C=C FUSUHKVFWTUUBE-UHFFFAOYSA-N 0.000 description 2
- DTPCFIHYWYONMD-UHFFFAOYSA-N decaethylene glycol Chemical compound OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO DTPCFIHYWYONMD-UHFFFAOYSA-N 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- FXCXOKOKILDXCL-UHFFFAOYSA-N 1-but-2-enoxybut-2-ene Chemical compound CC=CCOCC=CC FXCXOKOKILDXCL-UHFFFAOYSA-N 0.000 description 1
- YKTNISGZEGZHIS-UHFFFAOYSA-N 2-$l^{1}-oxidanyloxy-2-methylpropane Chemical group CC(C)(C)O[O] YKTNISGZEGZHIS-UHFFFAOYSA-N 0.000 description 1
- OLQFXOWPTQTLDP-UHFFFAOYSA-N 2-(2-hydroxyethoxy)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCO OLQFXOWPTQTLDP-UHFFFAOYSA-N 0.000 description 1
- RWXMAAYKJDQVTF-UHFFFAOYSA-N 2-(2-hydroxyethoxy)ethyl prop-2-enoate Chemical compound OCCOCCOC(=O)C=C RWXMAAYKJDQVTF-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N 2-Ethylhexanoic acid Chemical compound CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- MZGMQAMKOBOIDR-UHFFFAOYSA-N 2-[2-(2-hydroxyethoxy)ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCO MZGMQAMKOBOIDR-UHFFFAOYSA-N 0.000 description 1
- UEQXEQXNHPQBQO-UHFFFAOYSA-N 2-[2-[2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOCCOCCO UEQXEQXNHPQBQO-UHFFFAOYSA-N 0.000 description 1
- KWBPADJUMGROCH-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO KWBPADJUMGROCH-UHFFFAOYSA-N 0.000 description 1
- DHORSBRLGKJPFC-UHFFFAOYSA-N 2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethanol Chemical compound OCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCOCCO DHORSBRLGKJPFC-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- JXENLILXUMZMFC-UHFFFAOYSA-N 3-methylhexa-1,5-diene Chemical group C=CC(C)CC=C JXENLILXUMZMFC-UHFFFAOYSA-N 0.000 description 1
- 244000215068 Acacia senegal Species 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- YZEOBNMACGJWCW-UHFFFAOYSA-N C(C=C)(=O)N.[C] Chemical compound C(C=C)(=O)N.[C] YZEOBNMACGJWCW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- HTIRHQRTDBPHNZ-UHFFFAOYSA-N Dibutyl sulfide Chemical compound CCCCSCCCC HTIRHQRTDBPHNZ-UHFFFAOYSA-N 0.000 description 1
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- 101150060598 GPI1 gene Proteins 0.000 description 1
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- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
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- 239000012965 benzophenone Substances 0.000 description 1
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- 238000012662 bulk polymerization Methods 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 239000005018 casein Substances 0.000 description 1
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- 235000021240 caseins Nutrition 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 1
- 229940114081 cinnamate Drugs 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- FBSAITBEAPNWJG-UHFFFAOYSA-N dimethyl phthalate Natural products CC(=O)OC1=CC=CC=C1OC(C)=O FBSAITBEAPNWJG-UHFFFAOYSA-N 0.000 description 1
- 229960001826 dimethylphthalate Drugs 0.000 description 1
- XGZRAKBCYZIBKP-UHFFFAOYSA-L disodium;dihydroxide Chemical compound [OH-].[OH-].[Na+].[Na+] XGZRAKBCYZIBKP-UHFFFAOYSA-L 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 230000032050 esterification Effects 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 238000006902 nitrogenation reaction Methods 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229940092253 ovalbumin Drugs 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000010557 suspension polymerization reaction Methods 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910003452 thorium oxide Inorganic materials 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Abstract
Description
【発明の詳細な説明】
本発明は紫外光、可視光などの活性光線により重合硬化
し、しかも水現像可能な水溶性の光硬化性樹脂組成物に
関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a water-soluble photocurable resin composition that can be polymerized and cured by actinic light such as ultraviolet light or visible light, and can be developed with water.
水溶性高分子、たとえば卵白アルブミン、カゼイン、グ
ルー、ゼラチン、アラビアゴム、七ラッりなどの天然高
分子や、ポリビニルアルコール、ポリ7クリルアミド、
ポリ−N−ビニルビフリトンなどの合成高分子の水溶液
に重りpム酸塩を混入した感光材料はフォトエツチング
工程に使用されるフォトレジストとして印刷原版作製を
始め、プリント配綜板、カラーテレビのシャドウマスク
やブラウン管の螢光面作製、その細条(の精密加工分野
に広(用いられているが、これらは暗反応が生じやすい
ため長期保存をすることができず、また重クロム酸塩を
使用しているため、排水中の6価クロムの公害処理が必
要であるといった欠点を持っている。Water-soluble polymers, such as natural polymers such as ovalbumin, casein, glue, gelatin, gum arabic, and 7-acrylic, polyvinyl alcohol, poly7-acrylamide,
Photosensitive materials made by mixing polymeric acid salts into an aqueous solution of synthetic polymers such as poly-N-vinyl bifritone are used in the production of printing plates as photoresists used in the photoetching process, as well as in printed heddle boards and color televisions. It is widely used in the field of making shadow masks, fluorescent surfaces for cathode ray tubes, and precision processing of their strips, but these products cannot be stored for long periods of time because they tend to cause dark reactions, and they do not contain dichromates. Because of the use of chromium, it has the disadvantage of requiring pollution treatment for hexavalent chromium in wastewater.
一方、ポリビニルアルコールにケイ皮酸を付加させたも
のや、環化ゴムにアジド化合物を添加したものは保存安
定性に優れたフォトレジストであるが、溶解、現像に多
量の有機溶剤を使用しな1すればならない欠点を有して
いる。On the other hand, photoresists made by adding cinnamic acid to polyvinyl alcohol or those made by adding an azide compound to cyclized rubber are photoresists with excellent storage stability, but they require the use of large amounts of organic solvents for dissolution and development. 1 has some disadvantages that must be addressed.
そこでこれらの欠点の無い感光材料、すなわち重クロム
酸塩を使用しない水浴性フォトレジスFが当業界から強
く要望されていた。Therefore, there has been a strong demand in the art for a photosensitive material that does not have these drawbacks, that is, a water bath photoresist F that does not use dichromate.
このようなことから木発明者が9+5 :Q:研究した
結果、爪クロム酸塩を用いずに暗反応がなく長間イy存
性に優れ、しかも通常の水で工!l、 1(gぴ1工龍
の5Y−硬化性ff14脂組成物を発明するに到った。For this reason, the inventor of the tree made 9+5:Q: As a result of his research, he found that it does not use nail chromate, has no dark reaction, has excellent long-term durability, and can be made with ordinary water! 1, 1 (gpi1) 5Y-curable FF14 fat composition was invented.
すなわち、本発明は一般式(1)
で示される不飽和単量体の1種または2種以上を(り返
し却位として重合体中の構成成分に含む光硬化性重合体
を有効成分とする水溶性の光硬化性樹脂組成物を提供す
るものである。That is, the present invention uses a photocurable polymer containing one or more unsaturated monomers represented by the general formula (1) as a constituent component in the polymer as an active ingredient. The present invention provides a water-soluble photocurable resin composition.
で示される不f〈1和単量体の1押または2種以上の単
1”7体の重合または一般式([l)で示される不飽和
単量体とこれと共重合可能なエチレン性不飽和IItλ
体との共重合で得られる重合体に、下記一般式(IN)
トリウム、水酸化カリウム等のアルカリ金属水酸化物や
、ナトリウムメトキシド等のアルカリ金属アルコキシド
化合物を用いて、アルカリ金属塩としたり、アンモニア
や各種アミンを用いてアンモニウム塩またはアミン塩と
することにより得ることができる。ここでアミンとして
は、脂肪族第1アミン、脂肪族!82アミン、脂肪族第
3アミン、アルカノールアミン、芳香族第1アミン、芳
香族第2アミン、芳香族第3アミン、脂環式アミン等の
ほとんどすべてのものが使用できる。Polymerization of one or more monomeric monomers represented by the formula ([l)] or an ethylenic monomer copolymerizable with the unsaturated monomer represented by the general formula ([l)] Unsaturated IItλ
The following general formula (IN) is added to the polymer obtained by copolymerization with
Obtained by forming an alkali metal salt using an alkali metal hydroxide such as thorium or potassium hydroxide or an alkali metal alkoxide compound such as sodium methoxide, or by forming an ammonium salt or amine salt using ammonia or various amines. be able to. Here, the amines include aliphatic primary amines, aliphatic! Almost all of them can be used, such as 82 amines, aliphatic tertiary amines, alkanolamines, aromatic primary amines, aromatic secondary amines, aromatic tertiary amines, and alicyclic amines.
本発明において、一般式(IllのA部が7リルオキシ
基およびその低級アルキル、アリールまたは)・ロゲン
置換体として示される不飽和単量体とじては、ジエチレ
ングリコールアリルエーテル、トリエチレングリコール
アリルエーテル、プロピレングリコールアリルエーテル
、プロピレン−ジエチレングリコールエーテルアリルエ
ーテル、テトラエチレングリコールアリルエーテル、ジ
エチレングリコールクロチルエーテル、ヘキサエチレン
グリコールアリルエーテル、ノナエチレングリコールア
リルエーテル、ペンタデカエチレングリコールアリルエ
ーテル等があり、一般式(■)のA部が1クリロイルオ
キシ基およびその低級アルキル、アリールまたはハーゲ
ン同換体として示される不飽和単量体としては、ヒドロ
キシエチルアクリレート、ジエチレングリコールアクリ
レート、ツートラエチレングリコールアクリレート、f
カエチレングリコールアクリレート、ヘキサデカエチレ
ングリコールアクリレ−11テトラコンタエチレングリ
コール7クリレート、ヒドロ1シヱチルメタクリレート
、ジエチレングリコールメタクリレート、トリエチレン
グリコールメタクリレート、テトラエチレングリコール
メタクリレート、ヘキサエチレングリコールメタクリレ
ート、ノナエチレングリコールメタクリレート、ペンタ
デカエチレングリコールメタクリレート、トリコサエチ
レングリコールメタクリレート、ジエチレングリコール
シンナメート等があり、一般式(■)のA部がマレオイ
ルオキシ基またはフマロイルオキシ基およびそれらの低
級アルキル、アリールまたはハpゲン置換体として示さ
れる不飽和坪量体としては、ジ(エチレングリコール)
マレート、ジ(トリエチレングリコール)マレート、ジ
(テトラエチレングリコール)マレート、ジ(ヘキサエ
チレングリコール)マレート、ジ(ノナエチレングリコ
ール)マレート、ジ(ペンタデカエチレングリコール)
マレート、ジ(トリコサエチレングリコール)マレート
および上記に対応するフマレート等があり、一般式(I
I)のA部がイタコノイルオキシ基およびその異性体と
して示される不飽和単量体としては、ジ(エチレングリ
コール)イタコネート、ジ(ジエチレングリコール)イ
タコネート、ジ(テトラエチレングリコール)イタコネ
ート、ジ(デカエチレングリコール)イタコネート筈が
ある。In the present invention, unsaturated monomers represented by the general formula (where A part of Ill is a 7lyloxy group and its lower alkyl, aryl or) rogene substituted product include diethylene glycol allyl ether, triethylene glycol allyl ether, propylene There are glycol allyl ether, propylene-diethylene glycol allyl ether, tetraethylene glycol allyl ether, diethylene glycol crotyl ether, hexaethylene glycol allyl ether, nonaethylene glycol allyl ether, pentadecaethylene glycol allyl ether, etc. A of the general formula (■) Unsaturated monomers in which the moiety is 1 chloroyloxy group and its lower alkyl, aryl or Hagen equivalents include hydroxyethyl acrylate, diethylene glycol acrylate, two-traethylene glycol acrylate, f
Caethylene glycol acrylate, hexadecaethylene glycol acrylate-11 tetracontaethylene glycol 7 acrylate, hydro-1-cyethyl methacrylate, diethylene glycol methacrylate, triethylene glycol methacrylate, tetraethylene glycol methacrylate, hexaethylene glycol methacrylate, nonaethylene glycol methacrylate, Pentadecaethylene glycol methacrylate, tricosaethylene glycol methacrylate, diethylene glycol cinnamate, etc., where part A of the general formula (■) is a maleoyloxy group or a fumaroyloxy group and their lower alkyl, aryl, or hapogen substituted product. The unsaturated basis weight is di(ethylene glycol).
Malate, di(triethylene glycol) malate, di(tetraethylene glycol) malate, di(hexaethylene glycol) malate, di(nonaethylene glycol) malate, di(pentadecaethylene glycol)
There are malate, di(tricosaethylene glycol) malate, fumarate corresponding to the above, and the general formula (I
Examples of unsaturated monomers in which part A of I) is an itaconoyloxy group or an isomer thereof include di(ethylene glycol) itaconate, di(diethylene glycol) itaconate, di(tetraethylene glycol) itaconate, and di(decaethylene glycol) itaconate. Glycol) Itaconate must be it.
また、一般式(Illで示される不%+和甲■1体と共
風合可能なエチレン性不飽和単叶体(以下エチレン性不
飽和岸量体と称す)としては、アクリルへ2エステル、
メタクリル酸エステル、クロトン酸エステル、マレイン
酸エステル、フマル酸ニスデル、イタコン酸ニスチル、
アクリル7ミド、アクリロニトリル、エチレン、塩化ビ
ニル、酢酸ビニル、塩化ビニリデン、メチルビニルエー
テル、メチルビニルケトン、スチレン、ビニルトルエン
などがある。In addition, as ethylenically unsaturated monomers (hereinafter referred to as ethylenically unsaturated monomers) that can be co-fabricated with the general formula (Ill), 2 esters,
Methacrylic acid ester, crotonic acid ester, maleic acid ester, Nisder fumarate, Nistil itaconate,
Examples include acryl 7mide, acrylonitrile, ethylene, vinyl chloride, vinyl acetate, vinylidene chloride, methyl vinyl ether, methyl vinyl ketone, styrene, and vinyl toluene.
また、一般式(IN)で示される酸無水物の例としては
、無水マレイン酸や無水シトラコン酸などがある。Furthermore, examples of the acid anhydride represented by the general formula (IN) include maleic anhydride and citraconic anhydride.
本発明に用いる光硬化性爪台体の化学的、物理的性質は
、一般式(1()で示される不t、O和単量体のtpt
造およびエチレン性不飽和単琶体の種類や共重合比に主
として依存する。したがって、−JQ式(TI)で示さ
れる不飽和単量体およびエチレン性不トベ和単量体を適
宜選択し、なおかつ共重合比を適当に変えることにより
、化学的、物理的性質が種々界なる光硬化性重合体を得
ることがでとる。The chemical and physical properties of the photocurable nail base used in the present invention are as follows.
It mainly depends on the type and copolymerization ratio of the ethylenically unsaturated monophosphor. Therefore, by appropriately selecting the unsaturated monomer and the ethylenically unsaturated monomer represented by the -JQ formula (TI) and appropriately changing the copolymerization ratio, chemical and physical properties can be varied. It is possible to obtain a photocurable polymer having the following properties.
一般式(IIJで示される不飽和単Ij七体の重合また
は共重合方法としては、ラジカル重合触媒の存在下で溶
液、乳化、懸濁、塊状などの重合方法のほかイオン爪台
など、はとんどすべての方法が適用可能である。Polymerization or copolymerization methods for the unsaturated mono-Ij heptad represented by the general formula (IIJ) include polymerization methods such as solution, emulsification, suspension, and bulk polymerization in the presence of a radical polymerization catalyst, as well as ionic nail platform, etc. Almost all methods are applicable.
重合体の平均分子量(M榊平均)は、水溶性と硬化ル;
↓の強D(に関係するが、1000〜500000の範
11jlで使用可能であり、特に好ましくは5o o
o’〜100000の範囲である。The average molecular weight (M Sakaki average) of the polymer is determined by water solubility and curing ratio;
It is related to the strong D of
The range is from o' to 100,000.
このようにして得られた重合体に一般式値)で示される
rシ2無水物(以下酸無水物とわ)、す)を(=J加さ
せるには、得られたm合体がすでに6液である場合はそ
のまま、また重合体単体の場合は′適当な溶媒、たとえ
ばピリジン、ジメチルホルム7舛ド、ジメチルスルホキ
シド、ヘキザメチルポスホルアミド、ベンゼン、トルエ
ン、キシレン、アセトン、メチルエチルケトン、メチル
イソブチルケトン、酢酸エチル、酢酸ブチル、テトラヒ
ドロフラン、ジオキサン等に溶1’+’i’ L溶液と
した後、酸無水物を重合体の水酸基1モルに対して05
〜2モルの帥四内で添加し、加熱反応すればよい。この
ll’j、必要に応じて通常のエステル化触媒を用いて
もよい。In order to add (=J) anhydride (hereinafter referred to as acid anhydride) represented by the general formula value) to the polymer obtained in this way, the obtained m polymer must already be 6 If it is a liquid, use it as is, or if it is a simple polymer, use an appropriate solvent such as pyridine, dimethylform, dimethyl sulfoxide, hexamethylposphoramide, benzene, toluene, xylene, acetone, methyl ethyl ketone, methyl isobutyl. Dissolve in ketone, ethyl acetate, butyl acetate, tetrahydrofuran, dioxane, etc. to make a 1'+'i' L solution, and then add acid anhydride to 1 mole of hydroxyl groups in the polymer at 05%
It is sufficient to add the compound in an amount of up to 2 moles and heat the reaction. For this ll'j, a conventional esterification catalyst may be used if necessary.
このようにして酸無水物を個別させた重合体溶液に1ア
ルカリ金属水酸化物、アンモニアまたを土各種アミンの
水溶液やアルコール溶液を添加して塩にすることにより
、水溶性光硬化性重合体がl’Jられる。By adding an aqueous or alcoholic solution of an alkali metal hydroxide, ammonia, or various amines to the polymer solution in which the acid anhydride has been separated in this way to form a salt, a water-soluble photocurable polymer can be produced. is l'J.
他に、あらかじめ一般式(幻で示される不一4和単量体
に、前記の酸無水物を付加させた後、これを重合または
共重合し、さらにアルカリ金属塩またはアンモニウム塩
とすることによっても水溶性光硬化性重合体を得ること
ができる。In addition, by adding the above-mentioned acid anhydride to the monotetrahydric monomer represented by the general formula (phantom) in advance, and then polymerizing or copolymerizing this to form an alkali metal salt or ammonium salt. A water-soluble photocurable polymer can also be obtained.
本発明においては、この光硬化性重合体は溶液の場合は
そのまま、また単離されている場合はこれを水、弱アル
カリ水溶液等に溶解し、光増感剤、物(以下感光液と称
す)とする。In the present invention, this photocurable polymer is used as it is if it is in solution, or if it is isolated, it is dissolved in water, a weak alkaline aqueous solution, etc. ).
光増感剤としては、通常のベンゾフェノン、アセトフヱ
ノン、ベンゾイン、ベンゾインメチルエーテル、ベンゾ
インエチルエーテル、ベンゾインイソプルピルエーテル
、ジブチルスルフィド、ベンジルスルフィド、チウラム
ジスルフィド、アントラキノン、アントラキノン−β−
スルホン酸ナトリウム、5−二)pアセナフテン、チオ
キサントンやさらに有機過酸化物等が用いられる。光増
感剤の使用割合は、感光液総量の0.1〜30爪量チが
好ましい。また光架橋剤としてはジアゾニウム塩類の池
水溶性のアジド化合物、アクリレート類、アクリルアミ
ドカ1等が使用できる。Examples of photosensitizers include common benzophenone, acetophenone, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, dibutyl sulfide, benzyl sulfide, thiuram disulfide, anthraquinone, anthraquinone-β-
Sodium sulfonate, 5-2) p-acenaphthene, thioxanthone, and further organic peroxides are used. The proportion of the photosensitizer used is preferably 0.1 to 30% of the total amount of the photosensitive solution. Further, as the photocrosslinking agent, water-soluble azide compounds such as diazonium salts, acrylates, acrylamide carbon 1, etc. can be used.
本発明のm光液は、下記のように使用され、医れた4゛
ケ長を持っている。The light solution of the present invention is used as described below and has a length of 4 degrees.
まず、この感光液を金属板その他の系板上に塗布して乾
IY:させると、感光膜が11られる。この感光膜は、
所定のパターンを通して紫外線、可視光線で露光するこ
とにより、感光膜の被露光部分が重合架橋し硬化する。First, this photosensitive liquid is applied onto a metal plate or other type plate and dried (IY) to form a photosensitive film. This photosensitive film is
By exposing the photosensitive film to ultraviolet light or visible light through a predetermined pattern, the exposed portion of the photoresist film is polymerized and crosslinked and cured.
未露光部分は水溶性であるため、露光後水洗することに
より、未露光部分ができる。光源としては低圧、高圧、
超高圧の水銀灯やメタルハライドランプ、キセノン灯、
ケミカルランプ、さらに各種レーザーランプ等が月1い
られる。この硬化膜は耐酸性が良〃Iで強固なレジスト
股となるので、印刷版、プリント配線板をjlI11造
するのに適し、さらに種々の尚削加工等にも使用できる
。Since the unexposed area is water-soluble, the unexposed area can be created by washing with water after exposure. Light sources include low pressure, high pressure,
Ultra-high pressure mercury lamps, metal halide lamps, xenon lamps,
Chemical lamps and various laser lamps are required once a month. This cured film has good acid resistance and forms a strong resist layer, so it is suitable for making printing plates and printed wiring boards, and can also be used for various fine cutting processes.
次に本発明を実絢例によって具体的に説明する。Next, the present invention will be explained in detail using an actual example.
本発明は以下の実権側により侑11限されるものではな
い。なお、例中部は鍬(Tt部、係は爪猷チ、分子量は
取「を平均分子fべを示す。The present invention is not limited to the following authorities. In addition, the middle part of the example shows the hoe (Tt part), the part shows the tsume huchi part, and the molecular weight shows the average molecular fbe.
実権側!
(fE拌機イ1きのフラスコにジオギザ780部を仕込
み、窒素を吹き込みつつ100cに昇温し、4fJ、拌
しながらトリエチレングリコールメタクリン−) 30
.6msスチレン10.8部、メタクリル酸エチル7.
2部、アクリル酸ノチル1.41i5ターシャリイブチ
ルパーオキシ(2−エチルヘキ”j−/エート) 0.
7部、ジオキサン50部の混合液を2時間かけて滴下し
た。The real power side! (Pour 780 parts of Geogiza into a flask equipped with fE stirrer, raise the temperature to 100C while blowing nitrogen, and add triethylene glycol methacrine to 4fJ while stirring.) 30
.. 6ms styrene 10.8 parts, ethyl methacrylate 7.
2 parts, notyl acrylate 1.41i5 tertiary butyl peroxy (2-ethylhex"j-/ate) 0.
A mixed solution of 7 parts of dioxane and 50 parts of dioxane was added dropwise over 2 hours.
滴下終了後、同温Iyで2時間反応を継続した後、クー
シャリイブチルパーオキシ(2−エチルヘキサノニー)
) 0.2部、ジオキサ710部の混合液を加え、さ
らに同温度で2時間攪拌した。After the completion of the dropwise addition, the reaction was continued for 2 hours at the same temperature Iy, and then cooled butyl peroxy(2-ethylhexanony)
) and 710 parts of dioxa were added thereto, and the mixture was further stirred at the same temperature for 2 hours.
次いで?、H1の吹き込みを[ヒめ、無水マレイン酸9
8部をジオキサン1o部に加温溶解した溶液を加え、同
温度で6時間反応を行なった後、室温まで降温し、20
ヂ水酸化ナトリウム水溶液20部を30分かけて滴下し
、水溶性光硬化性重合体の沈〃を得た。重合体の分子量
は32000であった。Next? , Blow H1 [Hime, maleic anhydride 9]
A solution prepared by dissolving 8 parts of dioxane in 10 parts of dioxane was added thereto, and the reaction was carried out at the same temperature for 6 hours, then the temperature was lowered to room temperature and 20
20 parts of an aqueous sodium dihydroxide solution was added dropwise over 30 minutes to obtain a precipitate of a water-soluble photocurable polymer. The molecular weight of the polymer was 32,000.
分離乾燥後の沈澱物1o部を水90部に溶解し、アント
ラキノン−β−スルホン酸ナトリウム02部を添加し、
感光液とした。次いで、この感光液を砂目立てしたアル
ミ板上にスピンナーにより塗布乾燥し、400V/高圧
水銀灯にて、1o5+の距龍からパターンを通して7秒
間露光した後、水道ひ、いi ) 7’L 、 蕗ノ
じf’i11ガ1工「1訂IK社υノめゐ甥回な硬1し
バ・壓となってアルミ板上にりqリ p+’f11+7
なレジストパターンが1−十らJ1ブこ。Dissolve 10 parts of the precipitate after separation and drying in 90 parts of water, add 02 parts of sodium anthraquinone-β-sulfonate,
It was made into a photosensitive liquid. Next, this photosensitive solution was applied onto a grained aluminum plate using a spinner, dried, and exposed for 7 seconds using a 400V/high-pressure mercury lamp through a 1o5+ pattern. Noji f'i 11 ga 1 work ``1st edition IK company υ's nephew times hard 1 shiba 壓 and put it on the aluminum plate qri p+'f11+7
The resist pattern is 1-10 J1.
男相1列 2
攪拌4;、島付きのフラスコにノナエチレングリフール
メタクリV −) 38.64”157.1−1/7
El、 2部、メトキシへキザエヂレングリコールメタ
クリレート32部、キシ177200部、アゾビスイソ
ブチロニトリル08部を仕込み、(・7素を吹き込みつ
つ9opにて5 It) lln攪拌し反応を継続した
後、110Cに肩司表171!N素吹き込みを市め、溶
融した無水マレイン(H+27.8部を加え、同心ハI
で6時間反応を行ない、1又1ら終了後、10倍旦の石
油ニーデル中に江別し、重合体を沈増さ−Uだ。これを
濾別乾燥した後、メタノールに溶解し、室温で20q6
水酸化ナトリウノ・水溶液16部を20分間かけて滴下
し、水溶性光1+1!!化性爪合体の沈tl’を1′)
た。取合体の分子1λは3700(Iで)〕つた。Male phase 1 row 2 Stirring 4;, nonaethyleneglyfur methacrylate V-) in a flask with island 38.64"157.1-1/7
2 parts of El, 32 parts of methoxy hexaedylene glycol methacrylate, 177,200 parts of oxy, and 08 parts of azobisisobutyronitrile were added (5 It at 9op while blowing in 7 elements).The reaction was continued by stirring. After that, 110C and shoulder table 171! Start blowing N, add molten anhydrous maleic (H + 27.8 parts), and
The reaction was carried out for 6 hours, and after completion of 1 or 1, the mixture was poured into a 10 times warmer oil needle and the polymer was precipitated. After filtering and drying this, it was dissolved in methanol and 20q6
Add 16 parts of sodium hydroxide/aqueous solution dropwise over 20 minutes, and water-soluble light 1+1! ! 1')
Ta. The molecule 1λ of the aggregate was 3700 (in I).
分I憔乾燥後の沈lTり物10部を水90部に溶解し、
板上にスピンナーを用いて塗布して、ケミカ、レランプ
でパターンを通して1分間露光した後、水洗することに
より実施例1と同様な良好なレジストパターンが得られ
た。10 parts of the sediment after drying was dissolved in 90 parts of water,
A good resist pattern similar to that of Example 1 was obtained by applying it onto a plate using a spinner, exposing it to light for 1 minute through the pattern using Chemika and Relamp, and washing with water.
実施例3
攪拌機付きのフラスコにジメチルホルムアミド100部
を仕込み、9累を吹きこみつつ1ooCに昇温し、攪拌
しながら、デカエチレングリコールアクリレート256
部、テトラエチレングリコールメタクリレート138部
、メタクリル酸メチル5,2部、アクリルアミド54部
、ペンゾイルパーオキザイド05部の混合液を1時間か
1すで滴下し同温度で5時間反応を行なった。重合反応
終了後、窒素吹き込みを止め、溶融した無水シトラコン
酸11.2部を加え、同温度で6時間反応を行なった後
、室温まで降温し、20%水酸化カリウム水溶液28部
を15分間かげて滴下し、水溶性光硬化性重合体の沈澱
を得た。重合体の分子量は28000であった。Example 3 100 parts of dimethylformamide was placed in a flask equipped with a stirrer, and the temperature was raised to 1ooC while blowing in 9 parts, and while stirring, 256 parts of decaethylene glycol acrylate was added.
A mixture of 138 parts of tetraethylene glycol methacrylate, 5.2 parts of methyl methacrylate, 54 parts of acrylamide, and 0.5 parts of penzoyl peroxide was added dropwise over an hour or so, and the reaction was carried out at the same temperature for 5 hours. After the polymerization reaction was completed, nitrogen blowing was stopped, 11.2 parts of molten citraconic anhydride was added, and the reaction was carried out at the same temperature for 6 hours, then the temperature was lowered to room temperature, and 28 parts of a 20% potassium hydroxide aqueous solution was added in the shade for 15 minutes. was added dropwise to obtain a precipitate of a water-soluble photocurable polymer. The molecular weight of the polymer was 28,000.
分離乾燥後の沈t9.物を実施例1と同様な操作により
感光液とし、さらに実施「111と同(:1)な方法で
露光および現1争を行なったところ、良好なレジストパ
ターンが1’1られた。Sedimentation after separation and drying t9. A photosensitive solution was prepared from the product in the same manner as in Example 1, and exposure and development were performed in the same manner as in Example 111 (1:1), and a good resist pattern was obtained.
実施例4
持拌楼付きのフラスコにジ(トリエチレングリコール)
マレート12部、ジ(ヘキザエチレングリコール)マレ
ート7剖、酢l′it<ビニル6部、スチレン14部、
ターシャリイブチルパーオキジペンゾエート05部、酢
酸ブチル150部を仕込み、窒素を吹き込みつつ90C
に昇温し6時間重合反応を行なった後、大抵のノルマル
ヘキサン中に圧加し取合体を沈Itr;1.生成させた
。d−1別乾燥後、重合体20部をジオキサ770部に
溶解し、無水マレイン酸4.2部をジオキサン5部に加
aa酔解した溶液を加え、95Cにて4時間反応を行な
った。反応後の重合体溶/11は犬■の石油エーテル中
に江別し、沈澱させた後、濾別乾燥した。さらにこの取
合体15部をメタノール40部に溶解し、30チ水酸化
ナトリウム水溶液3部を10分間かけて滴下し、水溶性
光硬化性重合体の沈fqtを得た。重合体の分子量は3
0000であった。Example 4 Di(triethylene glycol) in a flask with stirring tower
12 parts of malate, 7 parts of di(hexaethylene glycol) malate, 6 parts of vinegar l'it<vinyl, 14 parts of styrene,
Add 05 parts of tertiary butyl peroxydipenzoate and 150 parts of butyl acetate, and heat to 90C while blowing nitrogen.
After the polymerization reaction was carried out for 6 hours, the aggregate was precipitated by pressurizing it into normal hexane; 1. generated. After drying (d-1), 20 parts of the polymer was dissolved in 770 parts of dioxa, and a solution of 4.2 parts of maleic anhydride dissolved in 5 parts of dioxane was added, followed by reaction at 95C for 4 hours. After the reaction, the polymer solution No. 11 was poured into petroleum ether to precipitate it, and then filtered and dried. Further, 15 parts of this aggregate was dissolved in 40 parts of methanol, and 3 parts of a 30% sodium hydroxide aqueous solution was added dropwise over 10 minutes to obtain a precipitate fqt of a water-soluble photocurable polymer. The molecular weight of the polymer is 3
It was 0000.
分離乾燥後の沈澱物を実施例2と同様な十“☆作により
感光液とし、さらに実がり例2と同様な方法で露光およ
びw像を行なったところ、良好なレジストパターンが得
られた。The precipitate after separation and drying was made into a photosensitive solution by the same method as in Example 2, and then exposed and imaged in the same manner as in Example 2, and a good resist pattern was obtained.
実施例5
攪拌機付きのフラスコにジ(テトラエチレングリコール
)イタコネート15部、ヘキサエチレングリコールアリ
ルエーテル12部、スチレン10部、ジメチルフタレー
ト7部、メタクリル酸エチイ
ル3部、ターシャリlブチルパーオキシ(2−エチルヘ
キサノエート)0.8部、ジメチルポルムアミド120
部を仕込み、窒素を吹き込みながら1000に昇温し、
5時間重合反応を行なった後、窒素吹き込みを止め、溶
融した無水マレイン酸7゜2部を加え、4時間同温度で
反応を行なった後、大量のノルマルヘキサン中に圧加し
、重合体を沈澱生成した。演劇乾燥後、重合体20部を
メタノール50部に溶解し、20チ水酸化ナトリウム水
溶C夜6部を15分間か1すて滴下し、水溶性光硬化性
重合体のt4二紺を得た。重合体のη子+=ii4o。Example 5 In a flask equipped with a stirrer, 15 parts of di(tetraethylene glycol) itaconate, 12 parts of hexaethylene glycol allyl ether, 10 parts of styrene, 7 parts of dimethyl phthalate, 3 parts of ethyl methacrylate, and tert-butyl peroxy(2-ethyl hexanoate) 0.8 parts, dimethylpolamide 120
The temperature was raised to 1,000 ℃ while blowing nitrogen,
After carrying out the polymerization reaction for 5 hours, nitrogen blowing was stopped, 7.2 parts of molten maleic anhydride was added, and the reaction was carried out at the same temperature for 4 hours, then the polymer was pressurized into a large amount of n-hexane. A precipitate was formed. After drying, 20 parts of the polymer was dissolved in 50 parts of methanol, and 6 parts of aqueous sodium 20 thihydroxide was added dropwise for 15 minutes or once, to obtain a water-soluble photocurable polymer, T42. . η+=ii4o of the polymer.
00であった。It was 00.
分(ト(ξ乾燥後の沈−物を実施例1と同様安(・77
作により感光液とし、さらに実施例1と同様な方法で露
光およびSj像を行なったところ、良好なレジストパタ
ーンが1′)られた。The precipitate after drying was heated as in Example 1.
A photosensitive solution was prepared by the process, and when exposure and Sj imaging were performed in the same manner as in Example 1, a good resist pattern 1') was obtained.
74A ′IAfil 6
攪拌機付きのフラスコにヘキサエチレングリフールメタ
クリレート35部、スチレン10部、アクリルアミド5
部、アブビスイソブチロニトリル06部、ジオキサン1
00部を仕込み、窒素を吹き込みつつ100Cに昇温し
、同温度にて6時間重合反111、を行なった。その後
、窒素吹き込みを止め、溶#:lt した無水マンイン
酸98部を加え同温度で5時間反応を行なった。この重
合体溶液を室温まで冷却し、同温度にてエタノールアミ
ン61部を水200部に溶解した溶11kを30分間で
滴下し、さらに1時間反応を行な(・水溶性光(i’r
!化性重合体(分子量:42000)の溶液を()だ。74A 'IAfil 6 In a flask equipped with a stirrer, add 35 parts of hexaethyleneglyfur methacrylate, 10 parts of styrene, and 5 parts of acrylamide.
part, abbisisobutyronitrile 06 parts, dioxane 1 part
00 parts was charged, the temperature was raised to 100 C while blowing nitrogen, and polymerization reaction 111 was carried out at the same temperature for 6 hours. Thereafter, the nitrogen blowing was stopped, and 98 parts of dissolved maninic anhydride was added, and the reaction was carried out at the same temperature for 5 hours. This polymer solution was cooled to room temperature, and at the same temperature, solution 11k, which was prepared by dissolving 61 parts of ethanolamine in 200 parts of water, was added dropwise over 30 minutes, and the reaction was further carried out for 1 hour (・Water-soluble light (i'r
! A solution of polymer (molecular weight: 42,000) is ().
この水浴性光硬化性重合体溶液15部に水80部、アン
ド1と同様な方法により露光および、1.lJ像を行な
ったところ、良好なレジストパターンが得らitた。1. Expose 80 parts of water to 15 parts of this water-bathable photocurable polymer solution in the same manner as in AND1. When IJ imaging was performed, a good resist pattern was obtained.
実施例7Example 7
Claims (1)
し甲2位として重合体中のfj1成成分成分む光硬化性
重合体を有効成分とする水溶性の光硬化性樹脂組成物。A water-soluble photocurable resin composition comprising, as an active ingredient, a photocurable polymer containing one or more unsaturated monomers represented by the formula (A) 2 or more as the fj1 component in the polymer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412782A JPS5953835A (en) | 1982-09-22 | 1982-09-22 | Water-soluble photohardenable resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412782A JPS5953835A (en) | 1982-09-22 | 1982-09-22 | Water-soluble photohardenable resin composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5953835A true JPS5953835A (en) | 1984-03-28 |
Family
ID=15787256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16412782A Pending JPS5953835A (en) | 1982-09-22 | 1982-09-22 | Water-soluble photohardenable resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5953835A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4859488A (en) * | 1987-09-15 | 1989-08-22 | Kabushiki Kaisha Yakult Honsha | Liquid food for curing constipation: polydextrose and oligosaccharide |
US5130239A (en) * | 1990-03-08 | 1992-07-14 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo | Process for preparing lactosucrose high-content power |
WO1993019625A1 (en) | 1992-03-27 | 1993-10-14 | Otsuka Pharmaceutical Co., Ltd | Health drink composition |
US5294458A (en) * | 1992-04-03 | 1994-03-15 | Maruha Corporation | Pet food |
WO2019182124A1 (en) * | 2018-03-23 | 2019-09-26 | 株式会社 資生堂 | Cosmetic ingredient using core-corona polymer particles and oil-in-water emulsion cosmetic |
-
1982
- 1982-09-22 JP JP16412782A patent/JPS5953835A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4859488A (en) * | 1987-09-15 | 1989-08-22 | Kabushiki Kaisha Yakult Honsha | Liquid food for curing constipation: polydextrose and oligosaccharide |
US5130239A (en) * | 1990-03-08 | 1992-07-14 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo | Process for preparing lactosucrose high-content power |
US5296473A (en) * | 1990-03-08 | 1994-03-22 | Kabushiki Kaisha Hayashibara Seibutsu Kagaku Kenkyujo | Process for preparing a powder having a high concentration of lactosucrose and use of said powder |
WO1993019625A1 (en) | 1992-03-27 | 1993-10-14 | Otsuka Pharmaceutical Co., Ltd | Health drink composition |
US5294458A (en) * | 1992-04-03 | 1994-03-15 | Maruha Corporation | Pet food |
WO2019182124A1 (en) * | 2018-03-23 | 2019-09-26 | 株式会社 資生堂 | Cosmetic ingredient using core-corona polymer particles and oil-in-water emulsion cosmetic |
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