JPS5953485B2 - Tilt sensor - Google Patents

Tilt sensor

Info

Publication number
JPS5953485B2
JPS5953485B2 JP7747681A JP7747681A JPS5953485B2 JP S5953485 B2 JPS5953485 B2 JP S5953485B2 JP 7747681 A JP7747681 A JP 7747681A JP 7747681 A JP7747681 A JP 7747681A JP S5953485 B2 JPS5953485 B2 JP S5953485B2
Authority
JP
Japan
Prior art keywords
rotating body
capacitance
conductive member
tilt sensor
fixed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7747681A
Other languages
Japanese (ja)
Other versions
JPS57191510A (en
Inventor
宏 川本
正之 村上
泰夫 富田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiko Electric Works Ltd
Original Assignee
Taiko Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiko Electric Works Ltd filed Critical Taiko Electric Works Ltd
Priority to JP7747681A priority Critical patent/JPS5953485B2/en
Publication of JPS57191510A publication Critical patent/JPS57191510A/en
Publication of JPS5953485B2 publication Critical patent/JPS5953485B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02Details
    • G01C9/06Electric or photoelectric indication or reading means

Description

【発明の詳細な説明】 本発明は地球の重力方向に対する傾斜角を静電容量的に
検出し傾斜角に比例した出力電圧を得るようにした傾斜
センサーに関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inclination sensor that capacitively detects an inclination angle with respect to the direction of gravity of the earth and obtains an output voltage proportional to the inclination angle.

従来この種の傾斜センサーは精密ポテンショメータの回
転軸をおもりの回転力で駆動する構造のものや、メータ
機構とフォトカプラーを主体とする電子回路を組合わせ
た構造のものなどがあるが、温度特性に対する安定度や
分解能をあげるため、機構が複雑であったり高価な精密
ポテンショメータなどの精密部品を使用する必要がある
など小形安価に構成出来ないと云う欠点がある。
Conventionally, this type of tilt sensor has a structure in which the rotating shaft of a precision potentiometer is driven by the rotational force of a weight, or a structure that combines a meter mechanism and an electronic circuit mainly consisting of a photocoupler, but the temperature characteristics In order to improve stability and resolution, the mechanism is complicated and precision parts such as expensive precision potentiometers must be used, which means that it cannot be constructed in a compact and inexpensive manner.

またシャフトエンコーダで量定板と回転板との間で構成
する静電容量変化を周期的符号出力に変換して回転角度
を検出する方式のものでは、回転角度の絶対値を検出し
ようとすると検出部と信号処理装置を複雑に構成する必
要があって安価な傾斜センサーとして応用出来ないとい
う欠点があった。
In addition, with a shaft encoder that detects the rotation angle by converting the electrostatic capacitance change between the quantitative plate and the rotary plate into a periodic code output, it is detected that when an attempt is made to detect the absolute value of the rotation angle, The drawback is that it requires a complicated configuration of the unit and signal processing device, making it impossible to apply it as an inexpensive tilt sensor.

本発明はこれらの欠点を除去するため、簡単な構造で構
成出来る静電容量式検出方法を用いて、温湿度などの環
境条件の変化に対して安定で高感度の傾斜センサーを小
形安価に構成出来るようにしたものである。
In order to eliminate these drawbacks, the present invention uses a capacitive detection method that can be configured with a simple structure to construct a small and inexpensive tilt sensor that is stable and highly sensitive to changes in environmental conditions such as temperature and humidity. It was made possible.

以下図面について詳細に説明する。The drawings will be explained in detail below.

第1図は本発明の一実施例を示す縦断面図、第2図はそ
の回転体および固定電極基板の対向面を示す図である。
FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the present invention, and FIG. 2 is a view showing opposing surfaces of the rotating body and the fixed electrode substrate.

1は両面にそれぞれ導電部材1a、1bを設は内部にお
もり2を有する回転体で、1Cは回転中心である。
1 is a rotating body having conductive members 1a and 1b on both sides and a weight 2 inside, and 1C is the center of rotation.

3はシャフト、4は軸受4a、4bを有する筐体である
3 is a shaft, and 4 is a housing having bearings 4a and 4b.

該回転体1はシャフト3によって軸受4a、4bに回動
自在に支持されている。
The rotating body 1 is rotatably supported by a shaft 3 in bearings 4a and 4b.

また回転体1の導電部材1a、lbは第2図1に示す縦
線部分のように回転中心1Cに対して扇形の形状をして
いて、その扇形の中心軸外に回転体1の重心が出来るよ
うにおもり2が設けられている。
Further, the conductive members 1a and lb of the rotating body 1 have a fan-shaped shape with respect to the center of rotation 1C, as shown by the vertical line in FIG. A weight 2 is provided to allow this.

5および6は固定電極基板で導電部材1a、lbと対向
する面に設けられた固定電極5a、5b、5C,6a、
6b、6Cは第2図2゜3に示すように、導電部材1a
、lbと同心的に且つ扇形に分割され左右対称となって
いて、又導電部材1a、lbに対し並行である。
5 and 6 are fixed electrode substrates, and fixed electrodes 5a, 5b, 5C, 6a, and
6b and 6C are conductive members 1a as shown in FIG.
, lb, and is divided concentrically into a fan shape and is symmetrical, and is parallel to the conductive members 1a and lb.

5a’、5b’、 5c’、 6a’、 6b’
、 6c’は接続端子で、固定電極5aと6a、5b
と6b、5Cと60をそれぞれ電気的に接続している。
5a', 5b', 5c', 6a', 6b'
, 6c' is a connection terminal, and fixed electrodes 5a, 6a, 5b
and 6b, and 5C and 60 are electrically connected to each other.

筐体4の内部にはシリコーンオイルなどの制動油7が充
填されていて回転体1の振動を抑制するダンパーとなっ
ている。
The inside of the casing 4 is filled with a damping oil 7 such as silicone oil, which acts as a damper to suppress vibrations of the rotating body 1.

8は導電材料からなるシールドカバーで、導電体や誘電
体の接近による浮遊容量の影響や外来ノイズなどを防止
している。
8 is a shield cover made of a conductive material, which prevents the influence of stray capacitance caused by the proximity of conductors or dielectrics, and external noise.

9はカバーで、これを導電材料で作ればシールドカバー
8が不用となることは勿論である。
9 is a cover, and if this is made of a conductive material, it goes without saying that the shield cover 8 will be unnecessary.

次に動作を説明する。Next, the operation will be explained.

固定電極5a、 5b、 5C,6a、6b、6C
と導電部材1a、lbとの相対位置関係は第3図1,2
に示すようになっており、筐体の底面4Cが水平位置に
ある時について第3図1の状態にあったものが、第3図
2のように角θ1だけ傾斜すると、回転体1はその重心
が地球の重力方向に向うことによってθ1だけ回転し、
導電部材1a、lbと固定電極5a、5aおよび5b、
6bとの対向面積は一方が角θ1に相酋する面積だけ増
加し、他方が角θ1に相当する面積だけ減少する。
Fixed electrodes 5a, 5b, 5C, 6a, 6b, 6C
The relative positional relationship between the conductive members 1a and lb is shown in FIGS. 1 and 2.
When the bottom surface 4C of the casing is in the horizontal position as shown in FIG. 31, when it is tilted by an angle θ1 as shown in FIG. As the center of gravity moves toward the direction of Earth's gravity, it rotates by θ1,
Conductive members 1a, lb and fixed electrodes 5a, 5a and 5b,
The opposing area with 6b increases by the area corresponding to the angle θ1 on one side, and decreases on the other side by the area corresponding to the angle θ1.

併し固定電極5c、5cと導電部材1a、lbとの対向
面積は不変である。
However, the facing areas of the fixed electrodes 5c, 5c and the conductive members 1a, lb remain unchanged.

導電部材1a、lbを介して固定電極5a、6aと固定
電極5c、6C間に構成される静電容量CI、および導
電部材1a、lbを介して固定電極5b、6bと固定電
極5c、5C間に構成する静電容量C2は固定電極と導
電部材の対向面積の変化に比例して変化し、対向面積の
変化は傾斜角度に比例して変化する。
Capacitance CI configured between fixed electrodes 5a, 6a and fixed electrodes 5c, 6C via conductive members 1a, lb, and between fixed electrodes 5b, 6b and fixed electrodes 5c, 5C via conductive members 1a, lb. The electrostatic capacitance C2 constituted by the fixed electrode changes in proportion to the change in the facing area of the fixed electrode and the conductive member, and the change in the facing area changes in proportion to the inclination angle.

特に本発明によれば、両側の固定板が対称的であって相
互間が接続されているので、回転体1の軸方向に対する
傾斜によって、回転体1が軸方向に移動しても静電容量
CI、C2には変化がないので所定方向のみの傾斜を正
確に検出することができる。
In particular, according to the present invention, since the fixing plates on both sides are symmetrical and connected to each other, the capacitance is reduced even if the rotating body 1 moves in the axial direction due to the inclination with respect to the axial direction of the rotating body 1. Since there is no change in CI and C2, it is possible to accurately detect inclinations only in a predetermined direction.

第3図1は導電部材1a、lbが正常位置の場合の固定
電極との相対位置関係を示し、第3図2はセンサーが角
θ1傾斜した場合に導電部材1a、lbの固定電極5a
、5aに対向する面積が角θ1の分だけ増加し、固定電
極5b、6bに対向する面積が角θ1の分だけ減少する
事を示している。
FIG. 3 1 shows the relative positional relationship with the fixed electrode when the conductive members 1a and 1b are in their normal positions, and FIG.
, 5a increases by the angle θ1, and the area facing the fixed electrodes 5b and 6b decreases by the angle θ1.

このように傾斜角度に比例して互に逆方向に増減する静
電容量C1とC2が得られる。
In this way, capacitances C1 and C2 are obtained which increase and decrease in opposite directions in proportion to the inclination angle.

尚導電部材と固定電極の形状は静電容量CI、C2が傾
斜角度に比例する形状であれば、全円でなく第4図の電
極10a、10b、l0C(7)ようであっても良い。
Note that the shapes of the conductive member and the fixed electrode may not be completely circular but may be like the electrodes 10a, 10b, 10C (7) in FIG. 4, as long as the capacitances CI and C2 are proportional to the inclination angle.

静電容量変化から直流電圧変化への変換は第5図の回路
図による。
The conversion from capacitance change to DC voltage change is based on the circuit diagram shown in FIG.

容量、電圧変換回路CV1゜CV2で静電容量CI、C
2に比例した直流電圧への変換を行ない、その出力電圧
を差動増巾器DAにより差動増巾することによって傾斜
角度に比例した直流電圧の出力を高感度に得る事が出来
る。
Capacitance, voltage conversion circuit CV1゜CV2, capacitance CI, C
By converting the output voltage into a DC voltage proportional to 2 and differentially amplifying the output voltage using a differential amplifier DA, it is possible to obtain a DC voltage output proportional to the tilt angle with high sensitivity.

以上説明したように傾斜角度に比例して互に逆方向に増
減する二つの静電容量変化を検出し、直流電圧変化に変
換後差動増巾して出力電圧を得る構成になっているので
、温湿度などの環境条件の変化や浮遊容量の影響で静電
容量が変化しても互いにキャンセルすることが出来ると
ともに、静電容量の変化分だけを増巾しているので高感
度の傾斜センサーを構成出来る。
As explained above, the structure is such that two capacitance changes that increase and decrease in opposite directions in proportion to the inclination angle are detected, converted to DC voltage changes, and then differentially amplified to obtain the output voltage. , even if the capacitance changes due to changes in environmental conditions such as temperature and humidity or due to the effects of stray capacitance, they can cancel each other out, and only the changes in capacitance are amplified, making it a highly sensitive tilt sensor. can be configured.

又回転体を導電材料からなる一体部材で簡易に構成出来
る効果もある。
Another advantage is that the rotating body can be easily constructed from an integral member made of a conductive material.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す縦断面図、第2図はそ
の回転体および固定電極基板の対向面を示す図、第3図
はその回転体と固定電極の相対位置関係を示す図、第4
図は他の実施例の固定電極および回転体の形状を示す図
、第5図は傾斜角に比例した直流電圧出力を得る回路図
。 1・・・・・・回転体、2・・・・・・おもり、3・・
・・・・シャフト、4・・・・・・筐体、4a、4b・
・・・・・軸受部、5,6・・・・・・固定電極基板、
5a、 5b、 5C,6a、 6b、 6C
,10a、 10b、 10C・−・−・固定電極
、7・・・・・・制動油、8・・・・・・シールドカバ
ー、9・・・・・・カバー。
FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, FIG. 2 is a view showing the opposing surfaces of the rotating body and the fixed electrode substrate, and FIG. 3 is a diagram showing the relative positional relationship between the rotating body and the fixed electrode. Figure, 4th
The figure shows the shapes of the fixed electrode and rotating body of another embodiment, and FIG. 5 is a circuit diagram for obtaining a DC voltage output proportional to the tilt angle. 1... Rotating body, 2... Weight, 3...
...Shaft, 4...Housing, 4a, 4b.
... Bearing part, 5, 6 ... Fixed electrode board,
5a, 5b, 5C, 6a, 6b, 6C
, 10a, 10b, 10C---fixed electrode, 7---braking oil, 8---shield cover, 9---cover.

Claims (1)

【特許請求の範囲】 1 回動自在に支持した板状の回転体に近接してその両
側に互いに並行に固定電極板を配置してなる静電容量式
傾斜センサーにおいて、回転体の両面の一部に導電体を
配し、回転体の重心が回転中心より偏在するように回転
体を構成すると共に、前記両側の固定電極板にはそれぞ
れ回転体の回転角度に対して回転体の導電部材との対向
面積が一方は増加すると他方は減少する第1、第2の固
定電極と、対向面積が変化しない第3の固定電極とを対
称的にほぼ同一平面上に分離して設けそれぞれの電極相
互間を接続し、第1と第3の固定電極間で回転体の導電
部材を介して構成する静電容量C1と、第2と第3の固
定電極間で回転体の導電部材を介して構成する静電容量
C2とを、容量電圧変換し、差動増巾して重力方向に対
する傾斜角に比例した出力を得るようにしたことを特徴
とする傾斜センサー。 2 回転体を導電部材で一体に構成した特許請求の範囲
第1項記載の傾斜センサー。
[Scope of Claims] 1. In a capacitive tilt sensor in which fixed electrode plates are disposed in parallel to each other on both sides of a rotatably supported plate-shaped body in the vicinity of the plate-shaped rotating body, one of both sides of the rotating body is The rotating body is configured such that the center of gravity of the rotating body is unevenly distributed from the center of rotation, and the fixed electrode plates on both sides are each provided with a conductive member and a conductive member of the rotating body with respect to the rotation angle of the rotating body. The first and second fixed electrodes, whose opposing areas increase on one side and decrease on the other, and the third fixed electrode, whose opposing area does not change, are symmetrically separated on substantially the same plane, and the electrodes are mutually connected to each other. A capacitance C1 is configured between the first and third fixed electrodes via a conductive member of a rotating body, and a capacitance C1 is configured between the second and third fixed electrodes via a conductive member of a rotating body. A tilt sensor characterized in that the capacitance C2 is converted into a capacitance voltage and differentially amplified to obtain an output proportional to the tilt angle with respect to the direction of gravity. 2. The tilt sensor according to claim 1, wherein the rotating body is integrally formed of a conductive member.
JP7747681A 1981-05-22 1981-05-22 Tilt sensor Expired JPS5953485B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7747681A JPS5953485B2 (en) 1981-05-22 1981-05-22 Tilt sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7747681A JPS5953485B2 (en) 1981-05-22 1981-05-22 Tilt sensor

Publications (2)

Publication Number Publication Date
JPS57191510A JPS57191510A (en) 1982-11-25
JPS5953485B2 true JPS5953485B2 (en) 1984-12-25

Family

ID=13635031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7747681A Expired JPS5953485B2 (en) 1981-05-22 1981-05-22 Tilt sensor

Country Status (1)

Country Link
JP (1) JPS5953485B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59194010U (en) * 1982-11-25 1984-12-24 株式会社大興電機製作所 capacitive tilt sensor
JPS59179316U (en) * 1983-05-18 1984-11-30 株式会社 大興電機製作所 capacitive tilt sensor
JPS61193015A (en) * 1985-01-31 1986-08-27 ルーカス・インダストリーズ・インコーポレイテッド Inclinometer

Also Published As

Publication number Publication date
JPS57191510A (en) 1982-11-25

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