JPS5952891A - Laser oscillator - Google Patents

Laser oscillator

Info

Publication number
JPS5952891A
JPS5952891A JP57163378A JP16337882A JPS5952891A JP S5952891 A JPS5952891 A JP S5952891A JP 57163378 A JP57163378 A JP 57163378A JP 16337882 A JP16337882 A JP 16337882A JP S5952891 A JPS5952891 A JP S5952891A
Authority
JP
Japan
Prior art keywords
laser oscillation
apertures
laser
cooled
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57163378A
Other languages
Japanese (ja)
Other versions
JPS6311797B2 (en
Inventor
Takashi Ando
隆 安藤
Nobutaka Morohashi
諸橋　信孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57163378A priority Critical patent/JPS5952891A/en
Publication of JPS5952891A publication Critical patent/JPS5952891A/en
Publication of JPS6311797B2 publication Critical patent/JPS6311797B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/042—Arrangements for thermal management for solid state lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0407—Liquid cooling, e.g. by water

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To prevent apertures from heating, enable to change the laser oscillation mode from outside easily, prevent the decrease of the laser output, and to stabilize the laser oscillation by a method wherein the connecting rods to be connected to the apertures are made of pipe to pass cooling water inside the pipes. CONSTITUTION:Water-cooled apertures 7c, 7d are respectively connected with connecting pipes 8c, 8d to be pulled outside utilizing a bearing as a guide. Two connecting pipes 8c, 8d and the water-cooled apertures 7c, 7d are composed to pass the cooling water inside, and to discharge the cooling water outside through the connecting pipes 8c, 8d, the apertures 7c, 7d and said pipes 8c, 8d again. This device changes laser oscillation mode by driving the apertures 7c, 7d. Opening plates 12a, 12b are heated during laser oscillation absorbing the laser beams but are cooled down by said water-cooled apertures 7c, 7d stuck on the opening plates 12a, 12b. Resultantly problem of laser output deterioration caused by the rise of gas temperature in front of a mirror 6 is solved, thereby stable output of the laser is obtained.

Description

【発明の詳細な説明】 この発明は、レーザ発振装置の改良に関するもので、特
にレーザ発振モードの変更を容易に操作することができ
るレーザ発振装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a laser oscillation device, and particularly to a laser oscillation device in which the laser oscillation mode can be easily changed.

従来のこの稲の装置としては第１図、第２図に示すもの
があり、第１図は平面図、第２図は第１図のト」線を断
面とした側面図である。これらの図において、（１）は
基準板で、この基準板は図示されていない調整装置によ
り、Ｘ軸、Ｙ軸に関してθＸ、θｙ　の回転方向に角度
調整できる構造となっている。（２；は基準板（１１ｙ
ａｌ−ガイドとするスライド板であり９図示されていな
い位置決めねじによ覧 り、Ｘ軸、ｙ軸の平面上を位置調整される。（３）はハ
ウジングで、このハウジング（３）は基準板（１）乞ガ
イドとするスライド板（２；に固定され、伸度および位
置の微調整をするものである。（４）はミラーホルダ取
付板で、ハウジング（３）の側面に配置され、水冷ミラ
ーホルダ（５）Ｚ介してミラー（６）乞固定するもので
ある。（７ａ）　、　（７ｂ）は夫々異なる開口径の穴
が形成された板状のアパーチャ部で、このアパーチャ部
（７ａ）、　（７ｂ）はハウジング（３）に内蔵されて
いる。This conventional rice growing device is shown in FIGS. 1 and 2, where FIG. 1 is a plan view and FIG. 2 is a side view taken along the line T in FIG. 1. In these figures, (1) is a reference plate, and this reference plate has a structure in which the angle can be adjusted in rotational directions of θX and θy with respect to the X-axis and Y-axis by means of an adjustment device (not shown). (2; is the reference plate (11y
It is a sliding plate used as an al-guide, and its position is adjusted on the plane of the X-axis and the y-axis as seen by 9 positioning screws (not shown). (3) is a housing, and this housing (3) is fixed to a slide plate (2) that serves as a guide for the reference plate (1), and is used to finely adjust the extension and position. (4) is a mirror holder. This is a mounting plate that is placed on the side of the housing (3) and fixes the mirror (6) through the water-cooled mirror holder (5) Z. (7a) and (7b) are holes with different opening diameters. The aperture portions (7a) and (7b) are built into the housing (3).

（８ａ）　、　（８ｂ）はアパーチャ部（７ａ）　、　
（７ｂ）に各々２本連結された連結棒、（９）はこの連
結棒（８ａ）　、　（８ｂ）　Ｙガイドする軸受、翰は
ハンドルで、アパーチャ部（７ａ）（７ｂ）が軸受（９
）ヲガイドとして外部へ引出されたとき、連結棒（８ａ
）（８ｂ）の両端がハンドルａ〔によって固定される。(8a), (8b) are the aperture part (7a),
Two connecting rods are connected to (7b), (9) is a bearing that Y-guides the connecting rods (8a) and (8b), the handle is a handle, and the aperture parts (7a) and (7b) are connecting rods (9) to the bearings (9).
) When the connecting rod (8a) is pulled out as a guide, the connecting rod (8a
) (8b) are fixed by handle a[.

（１１）はアパーチャ部（７ａＸ７ｂ）の位置決めをす
るストッパーボルトである。なお、この装置において連
結棒（８ａ）（８ｂ）と軸受（９）など発振装置内部と
外部に連通して摺動する部分には、Ｏリングを配設する
ことによってシールしている。(11) is a stopper bolt for positioning the aperture portion (7aX7b). In this device, O-rings are provided to seal the connecting rods (8a), (8b), the bearing (9), and other parts that communicate and slide between the inside and outside of the oscillation device.

この様に構成された従来装置において、レーザ発振モー
ド乞変更する場合は、ストッパーボルトαυをゆるめ、
ハンドル顛により、連結棒（８ａ）（８ｂ）ン介してア
パーチャ部（７ａ）または（７ｂ）のいずれか馨第１図
の中央部に移動させ、ミラー（６）の前面にアパーチャ
部（７ａＸ７ｂ）　ｗ設置することにより行なわれる。In the conventional device configured in this way, when changing the laser oscillation mode, loosen the stopper bolt αυ,
Using the handle, move either the aperture part (7a) or (7b) through the connecting rods (8a) and (8b) to the center part of Figure 1, and attach the aperture part (7aX7b) to the front of the mirror (6). This is done by setting w.

しかしながら、このような従来装置では、レーザ出力が
太き（なると、アパーチャ部（７ａＸ７１））がミラー
（６）の前面に設置された時、アパーチャ部（７ａ）（
７ｂ）がレーザ光を吸収し加熱されるため、ミラー（６
）前面のレーザガス雰囲気温度が上昇しレーザ出力が低
下してしまうという欠点があった。However, in such a conventional device, when the laser output is large (so the aperture part (7aX71)) is installed in front of the mirror (6), the aperture part (7a) (
7b) absorbs the laser beam and is heated, so the mirror (6
) There was a drawback that the temperature of the laser gas atmosphere at the front surface rose and the laser output decreased.

この発明は上記のような従来の欠点を除去するためにな
されたもので、アパーチャ部に連結される連結棒馨バイ
ブ構造とし、パイプ内部に冷却水を通しアバ−、チャ部
ン冷却することによりアパーチャ部の加熱を防止し、レ
ーザ発振モードの変更が発振器外部から容易にでき、レ
ーザ出力の低下がおこらず、安定したレーザ出力Ｚ得ら
れるレーザ発振装置を提供することン目的としている。This invention was made in order to eliminate the above-mentioned drawbacks of the conventional technology, and has a connecting rod vibrator structure connected to the aperture part, and cools the aperture and chamber parts by passing cooling water through the inside of the pipe. It is an object of the present invention to provide a laser oscillation device that prevents heating of an aperture portion, allows easy change of laser oscillation mode from outside the oscillator, prevents decrease in laser output, and provides stable laser output Z.

以下、この発明の一実施例を第３図、第４図を用いて説
明するっ第３図はこの発明によるレーザ発振装置の一実
施例〉示す平面図、第４図は第３図のＩＶ−ＩＶ線線断
断面した側面図である。Hereinafter, one embodiment of the present invention will be explained with reference to FIGS. 3 and 4. FIG. 3 is a plan view showing an embodiment of the laser oscillation device according to the present invention, and FIG. It is a side view cut along the line -IV.

これらの図において第１図、第２図と同一符号は同一ま
たは相当部分を示しており、その説明を省略する。図中
、　　（７０Ｘ７ｄ）は水冷アパーチャ部で内部に水通
路（Ｔ３ａ）（１３ｂ）　Ｙ有している。（１２ａ）（
１２ｂ）は水冷アパーチャ部（７０Ｘ７ｄ）に固定され
た異なった開ロ穴形状ビ有した開口板であり、これによ
り発振モードが決定される。水冷アパーチャ部（７ｃ）
（Ｍ）はパイプ状連結棒（８ｅ）（＆ｌ）　［夫々連結
され、軸受（９）ヲガイドとして外部忙引出される。In these figures, the same reference numerals as in FIGS. 1 and 2 indicate the same or corresponding parts, and the explanation thereof will be omitted. In the figure, (70X7d) is a water cooling aperture portion which has water passages (T3a) and (13b) Y inside. (12a) (
12b) is an aperture plate having different hole shapes fixed to the water-cooled aperture part (70X7d), which determines the oscillation mode. Water cooling aperture part (7c)
(M) is a pipe-shaped connecting rod (8e) (&l) [respectively connected, and the bearing (9) is pulled out as a guide.

２本のパイプ状連結棒（８Ｑ）Ｃａｌｌ）と水冷アパー
チャ部（７０Ｘ７（１）は、その内部に冷却水が通るよ
うに構成され、外部より冷却水が導びかれ、冷却水はパ
イプ状連結棒（８０Ｘ８ｄ）水冷アパーチャ部（７ｃ）
　、　（７（１）パイプ状連結棒（８ｃＸａａ）　′ｌ
ｚｆ経由して外部に排出される。The two pipe-shaped connecting rods (8Q) and the water cooling aperture section (70 Rod (80x8d) Water cooling aperture part (7c)
, (7(1) Pipe-shaped connecting rod (8cXaa) 'l
It is discharged to the outside via zf.

このように構成された実施例装置では、従来装置と同様
にアパーチャ部（７ｃ）（７ｄ）が駆動されレーザ発振
モードの変更が行なわれる。そして、レーザ発振中に開
口板（１２ａ）（１２ｂ）はレーザ光を吸収し加熱され
るが、開口板に密着された水冷アバ寸ヤ部（７ＣＸ７ｄ
）により冷却される。In the apparatus of this embodiment configured as described above, the aperture portions (7c) (7d) are driven to change the laser oscillation mode in the same manner as in the conventional apparatus. During laser oscillation, the aperture plates (12a) and (12b) absorb laser light and are heated;
).

従って、従来ミラー（６）前面のレーザガス雰囲気温度
が上昇しレーザ出力を低下させるという問題点ビ除去で
き、安定したレーザ出力が得られることになる。Therefore, the conventional problem that the temperature of the laser gas atmosphere in front of the mirror (6) increases and the laser output decreases can be eliminated, and stable laser output can be obtained.

なお、上記実施例ではアパーチャ部に大小２個の開口径
の穴を形成した場合・につぃて説明したが開口形状の異
なる複数の開口穴を有するアバ寸ヤ部を構成すれば、レ
ーザ発振モードの変更範囲が拡大され、それだけ加工適
用範囲を増すことができる。In the above embodiment, the case where holes with two diameters, large and small, were formed in the aperture section was explained, but if the aperture section is configured to have a plurality of holes with different opening shapes, laser oscillation can be achieved. The range of mode changes is expanded, and the range of processing applications can be increased accordingly.

以上のよう、に、この発明によるレーザ発振装置は、外
部操作により容易に交換され、レーザ発振モートビ変更
するアパーチャ自身暑水冷できる構造としたので、大出
力レーザ発振−用の発振モード変換装置として安定した
性能を得られる効果がある。As described above, the laser oscillation device according to the present invention can be easily replaced by external operation, and the aperture itself for changing the laser oscillation mode can be cooled with hot water, so it is stable as an oscillation mode conversion device for high-output laser oscillation. This has the effect of providing superior performance.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のレーザ発振装置を示す平面図。 第２図は第１図の菖−円線を断面とした側面図。 第３図はこの発明の一実施例にょるレーザ発振装置の平
面図、第４図は第３図のＮ−ＩＶ線を断面とした側面図
である。 図において、同一符号は同一または相当部分を示し、（
ｌ）は基準板、（２）はスライド板、（３）はハウジン
グ、（４）はミラーホルダ取付板、（５）は水冷ミラー
ホルダ、（６）はミラー、　　（７ａ）（７ｃ）はアパ
ーチャ部。 （７０Ｘ７ｄ）は水冷アパーチャ部＋　　（８ａＸｓｂ
）は連結棒。 （８ｃ）（８ｄ）　ハハイ７’状連結棒、（９）は軸受
、Ｈはハンドル、αＤはストッパーボルト＋　　（１２
ａ）（１２ｂ）は開口板、　　（１３ａ）（１３ｂ）は
水通路である−代理人　　葛　野　信　−FIG. 1 is a plan view showing a conventional laser oscillation device. FIG. 2 is a side view taken along the iris-circle line in FIG. 1. FIG. 3 is a plan view of a laser oscillation device according to an embodiment of the present invention, and FIG. 4 is a side view taken along the line N-IV in FIG. 3. In the figures, the same reference numerals indicate the same or equivalent parts, (
l) is the reference plate, (2) is the slide plate, (3) is the housing, (4) is the mirror holder mounting plate, (5) is the water-cooled mirror holder, (6) is the mirror, (7a) and (7c) are the apertures. Department. (70X7d) is water cooling aperture part + (8aXsb
) is a connecting rod. (8c) (8d) Hahai 7'-shaped connecting rod, (9) is bearing, H is handle, αD is stopper bolt + (12
a) (12b) is the opening plate, (13a) and (13b) are the water passages - Agent Shin Kuzuno -

Claims (1)

【特許請求の範囲】 （１１レーザ発振用のミラーと、このミラー前面に移動
位置決めされ、開口形状の異なる複数の穴を有するアパ
ーチャ部と、このアパーチャ部に連結棒にて連結され、
装置外部から上記アパーチャ部を移動させる操作手段と
、上記アパーチャ部の複数の穴のひとつか上記ミラーの
前面位置に停止するよう固定させる固定手段とを備えた
レーザ発振装置において、上記連結棒をパイプ形状とし
。 パイプ内部に冷却水を通し上記アパーチャ部を水２冷し
たことを特徴とするレーザ発振装置。 （２；　　操作手段は装置本体に対し気密摺動すること
を特徴とする特許請求の範囲第（１）項に記載のレーザ
発振装置。[Scope of Claims] (11) A mirror for laser oscillation, an aperture section movably positioned on the front surface of the mirror and having a plurality of holes with different opening shapes, and connected to the aperture section by a connecting rod,
In the laser oscillation device, the connecting rod is connected to a pipe, and the laser oscillation device includes an operation means for moving the aperture portion from outside the device, and a fixing means for fixing the aperture portion to one of a plurality of holes in the aperture portion or at a position in front of the mirror. As shape. A laser oscillation device characterized in that the aperture portion is cooled with water by passing cooling water inside the pipe. (2) The laser oscillation device according to claim (1), wherein the operating means slides in an airtight manner with respect to the main body of the device.
JP57163378A 1982-09-20 1982-09-20 Laser oscillator Granted JPS5952891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57163378A JPS5952891A (en) 1982-09-20 1982-09-20 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57163378A JPS5952891A (en) 1982-09-20 1982-09-20 Laser oscillator

Publications (2)

Publication Number Publication Date
JPS5952891A true JPS5952891A (en) 1984-03-27
JPS6311797B2 JPS6311797B2 (en) 1988-03-16

Family

ID=15772741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57163378A Granted JPS5952891A (en) 1982-09-20 1982-09-20 Laser oscillator

Country Status (1)

Country Link
JP (1) JPS5952891A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10210893A1 (en) * 2002-03-07 2003-09-18 Zeiss Carl Laser Optics Gmbh Optical arrangement has optical component with optically active first region on optical axis of optical system at least partly enclosed by inactive region connected to heat conductive element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460590A (en) * 1977-10-24 1979-05-16 Mitsubishi Electric Corp Laser oscillator
JPS5565921A (en) * 1978-11-10 1980-05-17 Nec Corp Special filter device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460590A (en) * 1977-10-24 1979-05-16 Mitsubishi Electric Corp Laser oscillator
JPS5565921A (en) * 1978-11-10 1980-05-17 Nec Corp Special filter device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10210893A1 (en) * 2002-03-07 2003-09-18 Zeiss Carl Laser Optics Gmbh Optical arrangement has optical component with optically active first region on optical axis of optical system at least partly enclosed by inactive region connected to heat conductive element

Also Published As

Publication number Publication date
JPS6311797B2 (en) 1988-03-16

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